DOI: 10.1063/1.94069. Optical and electrical properties of amorphous silicon films prepared by photochemical vapor deposition

Optical and electrical properties of amorphous silicon films prepared by photochemical vapor deposition

10.1063/1.94069

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Amorphous silicon films have been prepared through mercury-photosensitized decomposition of monosilane gas at low temperatures. The films show optical and electrical properties comparable with those of the best films prepared by plasma chemical vapor deposition. The feasibility of amorphous solar cells with short-circuit current densities of more than 10 mA/cm2 has been demonstrated by fabrication of a Schottky barrier structure.

Bibliography

Saitoh, T., Muramatsu, S., Shimada, T., & Migitaka, M. (1983). Optical and electrical properties of amorphous silicon films prepared by photochemical vapor deposition. Applied Physics Letters, 42(8), 678â679.

Authors 4

T. Saitoh (first)
S. Muramatsu (additional)
T. Shimada (additional)
M. Migitaka (additional)

References 6 Referenced 56

10.1063/1.88617 / Appl. Phys. Lett. (1976)
{'key': '2024020513310465000_r2'}
{'key': '2024020513310465000_r3'}
10.1021/j100784a016 / J. Phys. Chem. (1964)
{'key': '2024020513310465000_r5'}
10.1103/PhysRevB.19.2064 / Phys. Rev. B (1979)

Dates

Type	When
Created	22 years, 6 months ago (Feb. 13, 2003, 4:33 p.m.)
Deposited	1 year, 7 months ago (Feb. 5, 2024, 8:44 a.m.)
Indexed	1 year, 6 months ago (March 4, 2024, 12:22 p.m.)
Issued	42 years, 4 months ago (April 15, 1983)
Published	42 years, 4 months ago (April 15, 1983)
Published Print	42 years, 4 months ago (April 15, 1983)

Funders 0

None

BibTeX

@article{Saitoh_1983, title={Optical and electrical properties of amorphous silicon films prepared by photochemical vapor deposition}, volume={42}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.94069}, DOI={10.1063/1.94069}, number={8}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Saitoh, T. and Muramatsu, S. and Shimada, T. and Migitaka, M.}, year={1983}, month=apr, pages={678–679} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        3,
        4
      ]
    ],
    "date-time": "2024-03-04T17:22:10Z",
    "timestamp": 1709572930174
  },
  "reference-count": 6,
  "publisher": "AIP Publishing",
  "issue": "8",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1983,
        4,
        15
      ]
    ]
  },
  "abstract": "<jats:p>Amorphous silicon films have been prepared through mercury-photosensitized decomposition of monosilane gas at low temperatures. The films show optical and electrical properties comparable with those of the best films prepared by plasma chemical vapor deposition. The feasibility of amorphous solar cells with short-circuit current densities of more than 10 mA/cm2 has been demonstrated by fabrication of a Schottky barrier structure.</jats:p>",
  "DOI": "10.1063/1.94069",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        2,
        13
      ]
    ],
    "date-time": "2003-02-13T21:33:15Z",
    "timestamp": 1045171995000
  },
  "page": "678-679",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 56,
  "title": "Optical and electrical properties of amorphous silicon films prepared by photochemical vapor deposition",
  "prefix": "10.1063",
  "volume": "42",
  "author": [
    {
      "given": "T.",
      "family": "Saitoh",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185, Japan"
        }
      ]
    },
    {
      "given": "S.",
      "family": "Muramatsu",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185, Japan"
        }
      ]
    },
    {
      "given": "T.",
      "family": "Shimada",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185, Japan"
        }
      ]
    },
    {
      "given": "M.",
      "family": "Migitaka",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185, Japan"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020513310465000_r1",
      "doi-asserted-by": "crossref",
      "first-page": "671",
      "DOI": "10.1063/1.88617",
      "volume": "28",
      "year": "1976",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020513310465000_r2"
    },
    {
      "key": "2024020513310465000_r3"
    },
    {
      "key": "2024020513310465000_r4",
      "doi-asserted-by": "crossref",
      "first-page": "304",
      "DOI": "10.1021/j100784a016",
      "volume": "68",
      "year": "1964",
      "journal-title": "J. Phys. Chem."
    },
    {
      "key": "2024020513310465000_r5"
    },
    {
      "key": "2024020513310465000_r6",
      "doi-asserted-by": "crossref",
      "first-page": "2064",
      "DOI": "10.1103/PhysRevB.19.2064",
      "volume": "19",
      "year": "1979",
      "journal-title": "Phys. Rev. B"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/42/8/678/18448572/678_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/42/8/678/18448572/678_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T13:44:15Z",
    "timestamp": 1707140655000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/42/8/678/49257/Optical-and-electrical-properties-of-amorphous"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1983,
        4,
        15
      ]
    ]
  },
  "references-count": 6,
  "journal-issue": {
    "issue": "8",
    "published-print": {
      "date-parts": [
        [
          1983,
          4,
          15
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.94069",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1983,
        4,
        15
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1983,
        4,
        15
      ]
    ]
  }
}