DOI: 10.1063/1.93795. Electro-optic effects of (Pb, La)(Zr, Ti)O3 thin films prepared by rf planar magnetron sputtering

Electro-optic effects of (Pb, La)(Zr, Ti)O3 thin films prepared by rf planar magnetron sputtering

10.1063/1.93795

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Epitaxial (Pb, La)(Zr, Ti)O3 thin films were grown successfully on (0001) sapphire substrates at below 600 °C. High quadratic electro-optic coefficient of 0.8×10−16 (m/V)2 was also obtained at 6328 Å. The rf planar magnetron sputtering process improved the quality of the film, which will be suitable for thin-film integrated optic devices.

Bibliography

Adachi, H., Kawaguchi, T., Setsune, K., Ohji, K., & Wasa, K. (1983). Electro-optic effects of (Pb, La)(Zr, Ti)O3 thin films prepared by rf planar magnetron sputtering. Applied Physics Letters, 42(10), 867â868.

Authors 5

Hideaki Adachi (first)
Takao Kawaguchi (additional)
Kentaro Setsune (additional)
Kenzo Ohji (additional)
Kiyotaka Wasa (additional)

References 8 Referenced 107

{'key': '2024020513321504700_r1', 'first-page': '1', 'volume': '54', 'year': '1971', 'journal-title': 'J. Am. Ceram. Soc.'} / J. Am. Ceram. Soc. (1971)
10.1063/1.89722 / Appl. Phys. Lett. (1977)
10.1016/0022-0248(78)90468-2 / J. Cryst. Growth (1978)
10.1007/BF00895925 / Appl. Phys. (1980)
{'key': '2024020513321504700_r5'}
10.1080/00150198208008116 / Ferroelectrics (1982)
{'key': '2024020513321504700_r7', 'first-page': '188', 'volume': 'SU-17', 'year': '1970', 'journal-title': 'IEEE Trans. Sonics Ultrason.'} / IEEE Trans. Sonics Ultrason. (1970)
10.1103/PhysRev.35.269 / Phys. Rev. (1930)

Dates

Type	When
Created	22 years, 6 months ago (Feb. 13, 2003, 4:33 p.m.)
Deposited	1 year, 7 months ago (Feb. 5, 2024, 8:45 a.m.)
Indexed	1 month, 4 weeks ago (July 7, 2025, 9:06 a.m.)
Issued	42 years, 3 months ago (May 15, 1983)
Published	42 years, 3 months ago (May 15, 1983)
Published Print	42 years, 3 months ago (May 15, 1983)

Funders 0

None

BibTeX

@article{Adachi_1983, title={Electro-optic effects of (Pb, La)(Zr, Ti)O3 thin films prepared by rf planar magnetron sputtering}, volume={42}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.93795}, DOI={10.1063/1.93795}, number={10}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Adachi, Hideaki and Kawaguchi, Takao and Setsune, Kentaro and Ohji, Kenzo and Wasa, Kiyotaka}, year={1983}, month=may, pages={867–868} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        7
      ]
    ],
    "date-time": "2025-07-07T13:06:35Z",
    "timestamp": 1751893595628
  },
  "reference-count": 8,
  "publisher": "AIP Publishing",
  "issue": "10",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1983,
        5,
        15
      ]
    ]
  },
  "abstract": "<jats:p>Epitaxial (Pb, La)(Zr, Ti)O3 thin films were grown successfully on (0001) sapphire substrates at below 600\u2009\u00b0C. High quadratic electro-optic coefficient of 0.8\u00d710\u221216 (m/V)2 was also obtained at 6328 \u00c5. The rf planar magnetron sputtering process improved the quality of the film, which will be suitable for thin-film integrated optic devices.</jats:p>",
  "DOI": "10.1063/1.93795",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        2,
        13
      ]
    ],
    "date-time": "2003-02-13T21:33:15Z",
    "timestamp": 1045171995000
  },
  "page": "867-868",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 107,
  "title": "Electro-optic effects of (Pb, La)(Zr, Ti)O3 thin films prepared by rf planar magnetron sputtering",
  "prefix": "10.1063",
  "volume": "42",
  "author": [
    {
      "given": "Hideaki",
      "family": "Adachi",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Central Research Laboratories, Matsushita Electric Industrial Company, Ltd., Moriguchi, Osaka 570, Japan"
        }
      ]
    },
    {
      "given": "Takao",
      "family": "Kawaguchi",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Central Research Laboratories, Matsushita Electric Industrial Company, Ltd., Moriguchi, Osaka 570, Japan"
        }
      ]
    },
    {
      "given": "Kentaro",
      "family": "Setsune",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Central Research Laboratories, Matsushita Electric Industrial Company, Ltd., Moriguchi, Osaka 570, Japan"
        }
      ]
    },
    {
      "given": "Kenzo",
      "family": "Ohji",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Central Research Laboratories, Matsushita Electric Industrial Company, Ltd., Moriguchi, Osaka 570, Japan"
        }
      ]
    },
    {
      "given": "Kiyotaka",
      "family": "Wasa",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Central Research Laboratories, Matsushita Electric Industrial Company, Ltd., Moriguchi, Osaka 570, Japan"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020513321504700_r1",
      "first-page": "1",
      "volume": "54",
      "year": "1971",
      "journal-title": "J. Am. Ceram. Soc."
    },
    {
      "key": "2024020513321504700_r2",
      "doi-asserted-by": "crossref",
      "first-page": "433",
      "DOI": "10.1063/1.89722",
      "volume": "31",
      "year": "1977",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020513321504700_r3",
      "doi-asserted-by": "crossref",
      "first-page": "393",
      "DOI": "10.1016/0022-0248(78)90468-2",
      "volume": "45",
      "year": "1978",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "2024020513321504700_r4",
      "doi-asserted-by": "crossref",
      "first-page": "339",
      "DOI": "10.1007/BF00895925",
      "volume": "21",
      "year": "1980",
      "journal-title": "Appl. Phys."
    },
    {
      "key": "2024020513321504700_r5"
    },
    {
      "key": "2024020513321504700_r6",
      "doi-asserted-by": "crossref",
      "first-page": "233",
      "DOI": "10.1080/00150198208008116",
      "volume": "42",
      "year": "1982",
      "journal-title": "Ferroelectrics"
    },
    {
      "key": "2024020513321504700_r7",
      "first-page": "188",
      "volume": "SU-17",
      "year": "1970",
      "journal-title": "IEEE Trans. Sonics Ultrason."
    },
    {
      "key": "2024020513321504700_r8",
      "doi-asserted-by": "crossref",
      "first-page": "269",
      "DOI": "10.1103/PhysRev.35.269",
      "volume": "35",
      "year": "1930",
      "journal-title": "Phys. Rev."
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/42/10/867/18448673/867_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/42/10/867/18448673/867_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T13:45:02Z",
    "timestamp": 1707140702000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/42/10/867/47670/Electro-optic-effects-of-Pb-La-Zr-Ti-O3-thin-films"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1983,
        5,
        15
      ]
    ]
  },
  "references-count": 8,
  "journal-issue": {
    "issue": "10",
    "published-print": {
      "date-parts": [
        [
          1983,
          5,
          15
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.93795",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1983,
        5,
        15
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1983,
        5,
        15
      ]
    ]
  }
}