DOI: 10.1063/1.92192. Spatially delineated growth of metal films via photochemical prenucleation

Spatially delineated growth of metal films via photochemical prenucleation

10.1063/1.92192

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Photodissociation of a thin surface layer of metal-alkyl molecules with a UV laser is shown to be an effective technique for predisposing the irradiated region to subsequent film growth. The efficacy of this technique, termed ’’prenucleation,’’ can be understood using a simple mathematical model for the early stages of thin-film formation. The technique has applications in direct writing of microstructures.

Bibliography

Ehrlich, D. J., Osgood, R. M., & Deutsch, T. F. (1981). Spatially delineated growth of metal films via photochemical prenucleation. Applied Physics Letters, 38(11), 946â948.

Authors 3

D. J. Ehrlich (first)
R. M. Osgood (additional)
T. F. Deutsch (additional)

References 11 Referenced 86

{'key': '2024020512230993400_r1'}
10.1063/1.91026 / Appl. Phys. Lett. (1979)
{'key': '2024020512230993400_r3', 'first-page': '1233', 'volume': 'QE-16', 'year': '1980', 'journal-title': 'IEEE J. Quantum Electron.'} / IEEE J. Quantum Electron. (1980)
10.1063/1.90010 / Appl. Phys. Lett. (1978)
10.1116/1.569967 / J. Vac. Sci. Technol. (1979)
{'key': '2024020512230993400_r5'}
{'key': '2024020512230993400_r6'}
{'key': '2024020512230993400_r7'}
10.1051/jphysrad:0195200130205301 / J. Phys. Radium (1952)
10.1063/1.1726986 / J. Chem. Phys. (1966)
10.1016/0001-8686(67)80007-1 / Adv. Colloid Interface Sci. (1967)

Dates

Type	When
Created	22 years, 6 months ago (Feb. 13, 2003, 4:05 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 7:49 a.m.)
Indexed	1 year, 6 months ago (Feb. 10, 2024, 3:33 a.m.)
Issued	44 years, 3 months ago (June 1, 1981)
Published	44 years, 3 months ago (June 1, 1981)
Published Print	44 years, 3 months ago (June 1, 1981)

Funders 0

None

BibTeX

@article{Ehrlich_1981, title={Spatially delineated growth of metal films via photochemical prenucleation}, volume={38}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.92192}, DOI={10.1063/1.92192}, number={11}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Ehrlich, D. J. and Osgood, R. M. and Deutsch, T. F.}, year={1981}, month=jun, pages={946–948} }

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