DOI: 10.1063/1.91954. The structure of ultrathin oxide on silicon

The structure of ultrathin oxide on silicon

10.1063/1.91954

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

30-Å-thick oxide on silicon has been examined in cross section by high-resolution electron microscopy. The oxide thickness was uniform to within 5 Å, even though the oxide undulated up to 8 Å in height and with about 50 Å periodicity.

Bibliography

Krivanek, O. L., & Mazur, J. H. (1980). The structure of ultrathin oxide on silicon. Applied Physics Letters, 37(4), 392â394.

Authors 2

Ondrej L. Krivanek (first)
Jerzy H. Mazur (additional)

References 22 Referenced 72

10.1016/0038-1101(74)90172-5 / Solid State Electron. (1974)
{'key': '2024020511591562300_r2', 'first-page': '1308', 'volume': 'ED-25', 'year': '1978', 'journal-title': 'IEEE Trans. Electron. Devices'} / IEEE Trans. Electron. Devices (1978)
10.1063/1.90646 / Appl. Phys. Lett. (1979)
10.1149/1.2428428 / J. Electrochem. Soc. (1957)
10.1116/1.568771 / J. Vac. Sci. Technol. (1975)
10.1149/1.2134225 / J. Electrochem. Soc. (1975)
10.1016/0039-6028(77)90122-4 / Surf. Sci. (1977)
10.1063/1.326003 / J. Appl. Phys. (1979)
10.1063/1.1655297 / Appl. Phys. Lett. (1974)
10.1063/1.88345 / Appl. Phys. Lett. (1975)
10.1063/1.1655112 / Appl. Phys. Lett. (1974)
10.1116/1.569003 / J. Vac. Sci. Technol. (1976)
10.1063/1.89289 / Appl. Phys. Lett. (1977)
{'key': '2024020511591562300_r14'}
{'key': '2024020511591562300_r15'}
{'key': '2024020511591562300_r16', 'first-page': '100', 'volume': '78-3', 'year': '1978', 'journal-title': 'Electrochem. Soc. Proc.'} / Electrochem. Soc. Proc. (1978)
10.1063/1.90498 / Appl. Phys. Lett. (1978)
{'key': '2024020511591562300_r18'}
10.1116/1.570011 / J. Vac. Sci. Technol. (1979)
{'key': '2024020511591562300_r20', 'first-page': '531', 'volume': 'ED-23', 'year': '1976', 'journal-title': 'IEEE Trans. Electron. Devices'} / IEEE Trans. Electron. Devices (1976)
10.1038/262454a0 / Nature (London) (1976)
{'key': '2024020511591562300_r22'}

Dates

Type	When
Created	22 years, 6 months ago (Feb. 13, 2003, 3:58 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 7:35 a.m.)
Indexed	3 weeks ago (Aug. 7, 2025, 5:05 p.m.)
Issued	45 years ago (Aug. 15, 1980)
Published	45 years ago (Aug. 15, 1980)
Published Print	45 years ago (Aug. 15, 1980)

Funders 0

None

BibTeX

@article{Krivanek_1980, title={The structure of ultrathin oxide on silicon}, volume={37}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.91954}, DOI={10.1063/1.91954}, number={4}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Krivanek, Ondrej L. and Mazur, Jerzy H.}, year={1980}, month=aug, pages={392–394} }

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