DOI: 10.1063/1.89692. Quasisimultaneous SIMS-AES-XPS investigation of the oxidation of Ti in the monolayer range

Quasisimultaneous SIMS-AES-XPS investigation of the oxidation of Ti in the monolayer range

10.1063/1.89692

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

In order to calibrate previous secondary ion mass spectrometry (SIMS) measurements on various oxidized metal surfaces in terms of oxygen coverage, quasisimultaneous SIMS, AES, and XPS have been applied to several metal-oxygen systems. First, results are given for the Ti-O system. In this case, the oxygen signals obtained with the three methods show an identical dependence on the oxygen exposure and can therefore be used for establishing a coverage scale. The successive stages of oxidation lead to significant changes of first the AES, then the SIMS signals, and finally a chemical shift in XPS.

Bibliography

Benninghoven, A., Bispinck, H., Ganschow, O., & Wiedmann, L. (1977). Quasisimultaneous SIMS-AES-XPS investigation of the oxidation of Ti in the monolayer range. Applied Physics Letters, 31(5), 341â343.

Authors 4

A. Benninghoven (first)
H. Bispinck (additional)
O. Ganschow (additional)
L. Wiedmann (additional)

References 20 Referenced 24

10.1016/0039-6028(75)90158-2 / Surf. Sci. (1975)
10.1016/0039-6028(73)90012-5 / Surf. Sci. (1973)
10.1016/0039-6028(73)90013-7 / Surf. Sci. (1973)
10.1016/0039-6028(74)90064-8 / Surf. Sci. (1974)
10.1016/0039-6028(74)90065-X / Surf. Sci. (1974)
10.1002/pssa.2210210212 / Phys. Status Solidi A (1974)
{'key': '2024020510112568300_r7'}
10.1063/1.1656374 / J. Appl. Phys. (1968)
10.1016/0039-6028(71)90210-X / Surf. Sci. (1971)
{'key': '2024020510112568300_r10'}
10.1016/0368-2048(74)85005-X / J. Electron Spectrosc. Relat. Phenom. (1974)
10.1116/1.568791 / J. Vac. Sci. Technol. (1975)
10.1063/1.1751660 / Rev. Sci. Instrum. (1940)
10.1116/1.568796 / J. Vac. Sci. Technol. (1975)
{'key': '2024020510112568300_r15'}
{'key': '2024020510112568300_r16'}
10.1016/0039-6028(71)90217-2 / Surf. Sci. (1971)
10.1016/0368-2048(73)80052-0 / J. Electron Spectrosc. Relat. Phenom. (1973)
10.1116/1.1318572 / J. Vac. Sci. Technol. (1974)
{'key': '2024020510112568300_r20'}

Dates

Type	When
Created	22 years, 6 months ago (Feb. 13, 2003, 3:20 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 5:13 a.m.)
Indexed	2 months, 1 week ago (June 25, 2025, 8:10 p.m.)
Issued	48 years ago (Sept. 1, 1977)
Published	48 years ago (Sept. 1, 1977)
Published Print	48 years ago (Sept. 1, 1977)

Funders 0

None

BibTeX

@article{Benninghoven_1977, title={Quasisimultaneous SIMS-AES-XPS investigation of the oxidation of Ti in the monolayer range}, volume={31}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.89692}, DOI={10.1063/1.89692}, number={5}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Benninghoven, A. and Bispinck, H. and Ganschow, O. and Wiedmann, L.}, year={1977}, month=sep, pages={341–343} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        26
      ]
    ],
    "date-time": "2025-06-26T00:10:14Z",
    "timestamp": 1750896614635
  },
  "reference-count": 20,
  "publisher": "AIP Publishing",
  "issue": "5",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1977,
        9,
        1
      ]
    ]
  },
  "abstract": "<jats:p>In order to calibrate previous secondary ion mass spectrometry (SIMS) measurements on various oxidized metal surfaces in terms of oxygen coverage, quasisimultaneous SIMS, AES, and XPS have been applied to several metal-oxygen systems. First, results are given for the Ti-O system. In this case, the oxygen signals obtained with the three methods show an identical dependence on the oxygen exposure and can therefore be used for establishing a coverage scale. The successive stages of oxidation lead to significant changes of first the AES, then the SIMS signals, and finally a chemical shift in XPS.</jats:p>",
  "DOI": "10.1063/1.89692",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        2,
        13
      ]
    ],
    "date-time": "2003-02-13T20:20:22Z",
    "timestamp": 1045167622000
  },
  "page": "341-343",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 24,
  "title": "Quasisimultaneous SIMS-AES-XPS investigation of the oxidation of Ti in the monolayer range",
  "prefix": "10.1063",
  "volume": "31",
  "author": [
    {
      "given": "A.",
      "family": "Benninghoven",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Physikalisches Institut, Universitaet Muenster, D-4400 Muenster, West Germany"
        }
      ]
    },
    {
      "given": "H.",
      "family": "Bispinck",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Physikalisches Institut, Universitaet Muenster, D-4400 Muenster, West Germany"
        }
      ]
    },
    {
      "given": "O.",
      "family": "Ganschow",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Physikalisches Institut, Universitaet Muenster, D-4400 Muenster, West Germany"
        }
      ]
    },
    {
      "given": "L.",
      "family": "Wiedmann",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Physikalisches Institut, Universitaet Muenster, D-4400 Muenster, West Germany"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020510112568300_r1",
      "doi-asserted-by": "crossref",
      "first-page": "596",
      "DOI": "10.1016/0039-6028(75)90158-2",
      "volume": "53",
      "year": "1975",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020510112568300_r2",
      "doi-asserted-by": "crossref",
      "first-page": "416",
      "DOI": "10.1016/0039-6028(73)90012-5",
      "volume": "39",
      "year": "1973",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020510112568300_r3",
      "doi-asserted-by": "crossref",
      "first-page": "427",
      "DOI": "10.1016/0039-6028(73)90013-7",
      "volume": "39",
      "year": "1973",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020510112568300_r4",
      "doi-asserted-by": "crossref",
      "first-page": "483",
      "DOI": "10.1016/0039-6028(74)90064-8",
      "volume": "41",
      "year": "1974",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020510112568300_r5",
      "doi-asserted-by": "crossref",
      "first-page": "493",
      "DOI": "10.1016/0039-6028(74)90065-X",
      "volume": "41",
      "year": "1974",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020510112568300_r6",
      "doi-asserted-by": "crossref",
      "first-page": "479",
      "DOI": "10.1002/pssa.2210210212",
      "volume": "21",
      "year": "1974",
      "journal-title": "Phys. Status Solidi A"
    },
    {
      "key": "2024020510112568300_r7"
    },
    {
      "key": "2024020510112568300_r8",
      "doi-asserted-by": "crossref",
      "first-page": "1419",
      "DOI": "10.1063/1.1656374",
      "volume": "39",
      "year": "1968",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020510112568300_r9",
      "doi-asserted-by": "crossref",
      "first-page": "53",
      "DOI": "10.1016/0039-6028(71)90210-X",
      "volume": "25",
      "year": "1971",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020510112568300_r10"
    },
    {
      "key": "2024020510112568300_r11",
      "doi-asserted-by": "crossref",
      "first-page": "3",
      "DOI": "10.1016/0368-2048(74)85005-X",
      "volume": "5",
      "year": "1974",
      "journal-title": "J. Electron Spectrosc. Relat. Phenom."
    },
    {
      "key": "2024020510112568300_r12",
      "doi-asserted-by": "crossref",
      "first-page": "361",
      "DOI": "10.1116/1.568791",
      "volume": "12",
      "year": "1975",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "2024020510112568300_r13",
      "doi-asserted-by": "crossref",
      "first-page": "94",
      "DOI": "10.1063/1.1751660",
      "volume": "11",
      "year": "1940",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2024020510112568300_r14",
      "doi-asserted-by": "crossref",
      "first-page": "379",
      "DOI": "10.1116/1.568796",
      "volume": "12",
      "year": "1975",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "2024020510112568300_r15"
    },
    {
      "key": "2024020510112568300_r16"
    },
    {
      "key": "2024020510112568300_r17",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/0039-6028(71)90217-2",
      "volume": "24",
      "year": "1971",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020510112568300_r18",
      "doi-asserted-by": "crossref",
      "first-page": "101",
      "DOI": "10.1016/0368-2048(73)80052-0",
      "volume": "2",
      "year": "1973",
      "journal-title": "J. Electron Spectrosc. Relat. Phenom."
    },
    {
      "key": "2024020510112568300_r19",
      "doi-asserted-by": "crossref",
      "first-page": "212",
      "DOI": "10.1116/1.1318572",
      "volume": "11",
      "year": "1974",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "2024020510112568300_r20"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/31/5/341/18435285/341_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/31/5/341/18435285/341_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T10:13:01Z",
    "timestamp": 1707127981000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/31/5/341/45834/Quasisimultaneous-SIMS-AES-XPS-investigation-of"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1977,
        9,
        1
      ]
    ]
  },
  "references-count": 20,
  "journal-issue": {
    "issue": "5",
    "published-print": {
      "date-parts": [
        [
          1977,
          9,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.89692",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1977,
        9,
        1
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1977,
        9,
        1
      ]
    ]
  }
}