DOI: 10.1063/1.89419. Comparison of range and range straggling of implanted 10B and 11B in silicon

Comparison of range and range straggling of implanted 10B and 11B in silicon

10.1063/1.89419

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

In this paper the ranges of implanted boron ions in silicon measured by the 10B (n,α)7Li reaction and by means of Hall-effect and sheet-resistivity measurements are compared for 10B and 11B. It is shown that the ranges and the range straggling are identical within the experimental error.

Bibliography

Ryssel, H., Kranz, H., MÃ¼ller, K., Henkelmann, R. A., & Biersack, J. (1977). Comparison of range and range straggling of implanted 10B and 11B in silicon. Applied Physics Letters, 30(8), 399â401.

Authors 5

H. Ryssel (first)
H. Kranz (additional)
K. Müller (additional)
R. A. Henkelmann (additional)
J. Biersack (additional)

References 14 Referenced 24

{'key': '2024020510013110000_r1'}
10.1088/0022-3735/6/5/025 / J. Phys. E (1973)
{'key': '2024020510013110000_r3'}
{'key': '2024020510013110000_r4', 'first-page': '319', 'volume': 'ED-22', 'year': '1975', 'journal-title': 'IEEE Trans. Electron Devices'} / IEEE Trans. Electron Devices (1975)
{'key': '2024020510013110000_r5', 'first-page': '417', 'volume': '128', 'year': '1975', 'journal-title': 'Nucl. Instrum. Methods'} / Nucl. Instrum. Methods (1975)
10.1063/1.88128 / Appl. Phys. Lett. (1975)
10.1063/1.88347 / Appl. Phys. Lett. (1975)
{'key': '2024020510013110000_r8'}
10.1016/0092-640X(74)90009-6 / At. Data Nucl. Tables (1974)
{'key': '2024020510013110000_r10', 'first-page': '5123', 'volume': '45', 'year': '1975', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. (1975)
{'key': '2024020510013110000_r11'}
10.1080/00337577508240811 / Radiat. Eff. (1975)
{'key': '2024020510013110000_r13'}
{'key': '2024020510013110000_r14'}

Dates

Type	When
Created	22 years, 6 months ago (Feb. 13, 2003, 3:15 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 5:01 a.m.)
Indexed	1 year, 6 months ago (Feb. 5, 2024, 5:40 a.m.)
Issued	48 years, 4 months ago (April 15, 1977)
Published	48 years, 4 months ago (April 15, 1977)
Published Print	48 years, 4 months ago (April 15, 1977)

Funders 0

None

BibTeX

@article{Ryssel_1977, title={Comparison of range and range straggling of implanted 10B and 11B in silicon}, volume={30}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.89419}, DOI={10.1063/1.89419}, number={8}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Ryssel, H. and Kranz, H. and Müller, K. and Henkelmann, R. A. and Biersack, J.}, year={1977}, month=apr, pages={399–401} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T10:40:04Z",
    "timestamp": 1707129604590
  },
  "reference-count": 14,
  "publisher": "AIP Publishing",
  "issue": "8",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1977,
        4,
        15
      ]
    ]
  },
  "abstract": "<jats:p>In this paper the ranges of implanted boron ions in silicon measured by the 10B (n,\u03b1)7Li reaction and by means of Hall-effect and sheet-resistivity measurements are compared for 10B and 11B. It is shown that the ranges and the range straggling are identical within the experimental error.</jats:p>",
  "DOI": "10.1063/1.89419",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        2,
        13
      ]
    ],
    "date-time": "2003-02-13T20:15:43Z",
    "timestamp": 1045167343000
  },
  "page": "399-401",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 24,
  "title": "Comparison of range and range straggling of implanted 10B and 11B in silicon",
  "prefix": "10.1063",
  "volume": "30",
  "author": [
    {
      "given": "H.",
      "family": "Ryssel",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Institut f\u00fcr Festk\u00f6rpertechnologie, Paul-Gerhardt-Allee 42, 8000 M\u00fcnchen 60, Germany"
        }
      ]
    },
    {
      "given": "H.",
      "family": "Kranz",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Institut f\u00fcr Festk\u00f6rpertechnologie, Paul-Gerhardt-Allee 42, 8000 M\u00fcnchen 60, Germany"
        }
      ]
    },
    {
      "given": "K.",
      "family": "M\u00fcller",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Institut f\u00fcr Radiochemie, 8046 Garching, Germany"
        }
      ]
    },
    {
      "given": "R. A.",
      "family": "Henkelmann",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Institut f\u00fcr Radiochemie, 8046 Garching, Germany"
        }
      ]
    },
    {
      "given": "J.",
      "family": "Biersack",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Hahn-Meitner-Institut, 1000 Berlin, Germany"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020510013110000_r1"
    },
    {
      "key": "2024020510013110000_r2",
      "doi-asserted-by": "crossref",
      "first-page": "492",
      "DOI": "10.1088/0022-3735/6/5/025",
      "volume": "6",
      "year": "1973",
      "journal-title": "J. Phys. E"
    },
    {
      "key": "2024020510013110000_r3"
    },
    {
      "key": "2024020510013110000_r4",
      "first-page": "319",
      "volume": "ED-22",
      "year": "1975",
      "journal-title": "IEEE Trans. Electron Devices"
    },
    {
      "key": "2024020510013110000_r5",
      "first-page": "417",
      "volume": "128",
      "year": "1975",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "2024020510013110000_r6",
      "doi-asserted-by": "crossref",
      "first-page": "221",
      "DOI": "10.1063/1.88128",
      "volume": "26",
      "year": "1975",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020510013110000_r7",
      "doi-asserted-by": "crossref",
      "first-page": "648",
      "DOI": "10.1063/1.88347",
      "volume": "27",
      "year": "1975",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020510013110000_r8"
    },
    {
      "key": "2024020510013110000_r9",
      "doi-asserted-by": "crossref",
      "first-page": "463",
      "DOI": "10.1016/0092-640X(74)90009-6",
      "volume": "13",
      "year": "1974",
      "journal-title": "At. Data Nucl. Tables"
    },
    {
      "key": "2024020510013110000_r10",
      "first-page": "5123",
      "volume": "45",
      "year": "1975",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020510013110000_r11"
    },
    {
      "key": "2024020510013110000_r12",
      "doi-asserted-by": "crossref",
      "first-page": "223",
      "DOI": "10.1080/00337577508240811",
      "volume": "24",
      "year": "1975",
      "journal-title": "Radiat. Eff."
    },
    {
      "key": "2024020510013110000_r13"
    },
    {
      "key": "2024020510013110000_r14"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/30/8/399/18434619/399_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/30/8/399/18434619/399_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T10:01:43Z",
    "timestamp": 1707127303000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/30/8/399/46026/Comparison-of-range-and-range-straggling-of"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1977,
        4,
        15
      ]
    ]
  },
  "references-count": 14,
  "journal-issue": {
    "issue": "8",
    "published-print": {
      "date-parts": [
        [
          1977,
          4,
          15
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.89419",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1977,
        4,
        15
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1977,
        4,
        15
      ]
    ]
  }
}