DOI: 10.1063/1.88537. Relief-type diffraction grating by amorphous chalcogenide films

Relief-type diffraction grating by amorphous chalcogenide films

10.1063/1.88537

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

In As-Se- (S) -Ge amorphous films, a remarkable difference of chemical etching rate between the heat-treated state and the light-irradiated state has been observed. Utilizing this characteristic, a relief-type diffraction grating of the amorphous film was obtained (the pitch between grating lines, 0.86 μm). This grating has achieved a high diffraction efficiency of 15.8%, which was about 10 times greater than before chemical etching.

Bibliography

Utsugi, Y., & Zembutsu, S. (1975). Relief-type diffraction grating by amorphous chalcogenide films. Applied Physics Letters, 27(9), 508â509.

Authors 2

Yasushi Utsugi (first)
Sakae Zembutsu (additional)

References 5 Referenced 22

10.1143/JJAP.11.117 / Jpn. J. Appl. Phys. (1972)
10.1016/0022-3093(73)90019-7 / J. Non-Cryst. Solids (1973)
{'key': '2024020509200395600_r3'}
{'key': '2024020509200395600_r4', 'first-page': '141', 'volume': '19', 'year': '1975', 'journal-title': 'Photogr. Sci. Eng.'} / Photogr. Sci. Eng. (1975)
{'key': '2024020509200395600_r5', 'first-page': '193', 'volume': '25', 'year': '1973', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. (1973)

Dates

Type	When
Created	22 years, 6 months ago (Feb. 13, 2003, 2:59 p.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 4:20 a.m.)
Indexed	1 year, 6 months ago (Feb. 5, 2024, 11:01 a.m.)
Issued	49 years, 9 months ago (Nov. 1, 1975)
Published	49 years, 9 months ago (Nov. 1, 1975)
Published Print	49 years, 9 months ago (Nov. 1, 1975)

Funders 0

None

BibTeX

@article{Utsugi_1975, title={Relief-type diffraction grating by amorphous chalcogenide films}, volume={27}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.88537}, DOI={10.1063/1.88537}, number={9}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Utsugi, Yasushi and Zembutsu, Sakae}, year={1975}, month=nov, pages={508–509} }

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