DOI: 10.1063/1.56793. Structure, composition and strain profiling of

Structure, composition and strain profiling of

10.1063/1.56793

Crossref proceedings-article

ASCE

The 1998 international conference on characterization and metrology for ULSI technology (317)

Bibliography

Duscher, G., Pennycook, S. J., Browning, N. D., Rupangudi, R., Takoudis, C., Gao, H.-J., & Singh, R. (1998). Structure, composition and strain profiling of. The 1998 International Conference on Characterization and Metrology for ULSI Technology, 191â195.

Authors 7

G. Duscher (first)
S. J. Pennycook (additional)
N. D. Browning (additional)
R. Rupangudi (additional)
C. Takoudis (additional)
H-J Gao (additional)
R. Singh (additional)

References 0 Referenced 7

None

Dates

Type	When
Created	16 years, 4 months ago (April 9, 2009, 11:07 a.m.)
Deposited	2 years, 4 months ago (April 19, 2023, 4:50 p.m.)
Indexed	11 months, 3 weeks ago (Sept. 6, 2024, 8:03 p.m.)
Issued	27 years, 8 months ago (Jan. 1, 1998)
Published	27 years, 8 months ago (Jan. 1, 1998)
Published Print	27 years, 8 months ago (Jan. 1, 1998)

Funders 0

None

BibTeX

@inproceedings{Duscher_1998, title={Structure, composition and strain profiling of}, url={http://dx.doi.org/10.1063/1.56793}, DOI={10.1063/1.56793}, booktitle={The 1998 international conference on characterization and metrology for ULSI technology}, publisher={ASCE}, author={Duscher, G. and Pennycook, S. J. and Browning, N. D. and Rupangudi, R. and Takoudis, C. and Gao, H-J and Singh, R.}, year={1998}, pages={191–195} }

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