Crossref journal-article
AIP Publishing
Applied Physics Letters (317)
Abstract

Boron Nitride (BN) is a two dimensional insulator with excellent chemical, thermal, mechanical, and optical properties, which make it especially attractive for logic device applications. Nevertheless, its insulating properties and reliability as a dielectric material have never been analyzed in-depth. Here, we present the first thorough characterization of BN as dielectric film using nanoscale and device level experiments complementing with theoretical study. Our results reveal that BN is extremely stable against voltage stress, and it does not show the reliability problems related to conventional dielectrics like HfO2, such as charge trapping and detrapping, stress induced leakage current, and untimely dielectric breakdown. Moreover, we observe a unique layer-by-layer dielectric breakdown, both at the nanoscale and device level. These findings may be of interest for many materials scientists and could open a new pathway towards two dimensional logic device applications.

Bibliography

Ji, Y., Pan, C., Zhang, M., Long, S., Lian, X., Miao, F., Hui, F., Shi, Y., Larcher, L., Wu, E., & Lanza, M. (2016). Boron nitride as two dimensional dielectric: Reliability and dielectric breakdown. Applied Physics Letters, 108(1).

Authors 11
  1. Yanfeng Ji (first)
  2. Chengbin Pan (additional)
  3. Meiyun Zhang (additional)
  4. Shibing Long (additional)
  5. Xiaojuan Lian (additional)
  6. Feng Miao (additional)
  7. Fei Hui (additional)
  8. Yuanyuan Shi (additional)
  9. Luca Larcher (additional)
  10. Ernest Wu (additional)
  11. Mario Lanza (additional)
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Dates
Type When
Created 9 years, 7 months ago (Jan. 6, 2016, 1 p.m.)
Deposited 2 years, 2 months ago (June 17, 2023, 11:15 a.m.)
Indexed 4 weeks, 1 day ago (July 30, 2025, 7:06 a.m.)
Issued 9 years, 7 months ago (Jan. 4, 2016)
Published 9 years, 7 months ago (Jan. 4, 2016)
Published Online 9 years, 7 months ago (Jan. 6, 2016)
Published Print 9 years, 7 months ago (Jan. 4, 2016)
Funders 6
  1. Major State Basic Research Development Program of China 10.13039/501100012336
    Awards1
    1. 2011CB013101
  2. Priority Academic Program Development of Jiangsu Higher Education Institutions 10.13039/501100012246

    Region: Asia

    gov (Local government)

    Labels1
    1. PAPD
  3. Young 1000 Talent Program of China
  4. Young 973 National Program of the Chinese Ministry of Science and Technology
    Awards1
    1. 2015CB932700
  5. National Natural Science Foundation of China 10.13039/501100001809

    Region: Asia

    gov (National government)

    Labels11
    1. Chinese National Science Foundation
    2. Natural Science Foundation of China
    3. National Science Foundation of China
    4. NNSF of China
    5. NSF of China
    6. 国家自然科学基金委员会
    7. National Nature Science Foundation of China
    8. Guójiā Zìrán Kēxué Jījīn Wěiyuánhuì
    9. NSFC
    10. NNSF
    11. NNSFC
    Awards4
    1. 10872003
    2. 11225208
    3. 11172001
    4. 10932001
  6. National Nanotechnology Center 10.13039/501100007056

    Region: Asia

    gov (National government)

    Labels1
    1. NANOTEC
    Awards1
    1. 11072230

@article{Ji_2016, title={Boron nitride as two dimensional dielectric: Reliability and dielectric breakdown}, volume={108}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.4939131}, DOI={10.1063/1.4939131}, number={1}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Ji, Yanfeng and Pan, Chengbin and Zhang, Meiyun and Long, Shibing and Lian, Xiaojuan and Miao, Feng and Hui, Fei and Shi, Yuanyuan and Larcher, Luca and Wu, Ernest and Lanza, Mario}, year={2016}, month=jan }