Abstract
In the last decade, atom probe tomography has become a powerful tool to investigate semiconductor and insulator nanomaterials in microelectronics, spintronics, and optoelectronics. In this paper, we report an investigation of zinc oxide nanostructures using atom probe tomography. We observed that the chemical composition of zinc oxide is strongly dependent on the analysis parameters used for atom probe experiments. It was observed that at high laser pulse energies, the electric field at the specimen surface is strongly dependent on the crystallographic directions. This dependence leads to an inhomogeneous field evaporation of the surface atoms, resulting in unreliable measurements. We show that the laser pulse energy has to be well tuned to obtain reliable quantitative chemical composition measurements of undoped and doped ZnO nanomaterials.
Bibliography
Amirifar, N., Lardé, R., Talbot, E., Pareige, P., Rigutti, L., Mancini, L., Houard, J., Castro, C., Sallet, V., Zehani, E., Hassani, S., Sartel, C., Ziani, A., & Portier, X. (2015). Quantitative analysis of doped/undoped ZnO nanomaterials using laser assisted atom probe tomography: Influence of the analysis parameters. Journal of Applied Physics, 118(21).
Authors
14
- Nooshin Amirifar (first)
- Rodrigue Lardé (additional)
- Etienne Talbot (additional)
- Philippe Pareige (additional)
- Lorenzo Rigutti (additional)
- Lorenzo Mancini (additional)
- Jonathan Houard (additional)
- Celia Castro (additional)
- Vincent Sallet (additional)
- Emir Zehani (additional)
- Said Hassani (additional)
- Corine Sartel (additional)
- Ahmed Ziani (additional)
- Xavier Portier (additional)
References
38
Referenced
36
10.1016/S0921-5107(00)00604-8
/ Mater. Sci. Eng. B (2001)10.1063/1.1992666
/ J. Appl. Phys. (2005)10.1038/nmat1284
/ Nat. Mater. (2005)10.1016/j.cplett.2008.06.039
/ Chem. Phys. Lett. (2008)10.1063/1.3243453
/ Appl. Phys. Lett. (2009)10.1103/PhysRevB.66.073202
/ Phys. Rev. B (2002)10.1016/S0960-8974(98)00011-4
/ Prog. Cryst. Growth Charact. Mater. (1998)10.1016/j.materresbull.2014.05.020
/ Mater. Res. Bull. (2014)10.1016/j.matlet.2010.06.056
/ Mater. Lett. (2010)10.1016/j.jlumin.2012.11.034
/ J. Lumin. (2013)10.1039/b406082m
/ Chem. Soc. Rev. (2005)10.1016/j.apsusc.2014.04.192
/ Appl. Surf. Sci. (2014)10.1016/j.physb.2009.05.019
/ Phys. B Condens. Matter (2009)10.1063/1.2194089
/ Rev. Sci. Instrum. (2006)10.1063/1.3106636
/ J. Appl. Phys. (2009)10.1016/j.ultramic.2009.08.002
/ Ultramicroscopy (2009)10.1186/1556-276X-6-271
/ Nanoscale Res. Lett. (2011)10.1063/1.4830375
/ Appl. Phys. Lett. (2013)10.1021/ja108290u
/ J. Am. Chem. Soc. (2011){'volume-title': 'Atom Probe Field Ion Microscopy', 'year': '1996', 'key': '2023062400402354000_c20'}
/ Atom Probe Field Ion Microscopy (1996)10.1016/j.ultramic.2014.09.004
/ Ultramicroscopy (2015)10.1021/jz400015h
/ J. Phys. Chem. Lett. (2013)10.1016/j.jnucmat.2012.12.052
/ J. Nucl. Mater. (2013)10.1021/jp5071264
/ J. Phys. Chem. C (2014)10.1063/1.4830023
/ J. Appl. Phys. (2013)10.1021/nn2050517
/ ACS Nano (2012)10.1016/j.ultramic.2010.12.013
/ Ultramicroscopy (2011)10.1007/s11664-011-1803-x
/ J. Electron. Mater. (2012)10.1021/nl502715s
/ Nano Lett. (2014)10.1016/j.ultramic.2006.06.008
/ Ultramicroscopy (2007)10.1016/j.ultramic.2010.11.023
/ Ultramicroscopy (2011)10.1016/j.tsf.2009.09.159
/ Thin Solid Films (2010)10.1016/j.tsf.2009.08.020
/ Thin Solid Films (2010)10.1016/j.apsusc.2013.11.039
/ Appl. Surf. Sci. (2014)10.1016/0039-6028(82)90434-4
/ Surf. Sci. (1982){'edition': '2012 ed.', 'volume-title': 'Atom Probe Microscopy', 'year': '2012', 'key': '2023062400402354000_c36'}
/ Atom Probe Microscopy (2012)10.1016/0022-1902(61)80142-5
/ J. Inorg. Nucl. Chem. (1961)10.1063/1.4926489
/ J. Appl. Phys. (2015)
Dates
Type | When |
---|---|
Created | 9 years, 9 months ago (Dec. 2, 2015, 1 p.m.) |
Deposited | 2 years, 2 months ago (June 24, 2023, 9:07 a.m.) |
Indexed | 1 month ago (July 30, 2025, 7:06 a.m.) |
Issued | 9 years, 9 months ago (Dec. 2, 2015) |
Published | 9 years, 9 months ago (Dec. 2, 2015) |
Published Online | 9 years, 9 months ago (Dec. 2, 2015) |
Published Print | 9 years, 8 months ago (Dec. 7, 2015) |
@article{Amirifar_2015, title={Quantitative analysis of doped/undoped ZnO nanomaterials using laser assisted atom probe tomography: Influence of the analysis parameters}, volume={118}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.4936167}, DOI={10.1063/1.4936167}, number={21}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Amirifar, Nooshin and Lardé, Rodrigue and Talbot, Etienne and Pareige, Philippe and Rigutti, Lorenzo and Mancini, Lorenzo and Houard, Jonathan and Castro, Celia and Sallet, Vincent and Zehani, Emir and Hassani, Said and Sartel, Corine and Ziani, Ahmed and Portier, Xavier}, year={2015}, month=dec }