DOI: 10.1063/1.4922994. Strain mapping at nanometer resolution using advanced nano-beam electron diffraction

Strain mapping at nanometer resolution using advanced nano-beam electron diffraction

10.1063/1.4922994

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We report on the development of a nanometer scale strain mapping technique by means of scanning nano-beam electron diffraction. Only recently possible due to fast acquisition with a direct electron detector, this technique allows for strain mapping with a high precision of 0.1% at a lateral resolution of 1 nm for a large field of view reaching up to 1 μm. We demonstrate its application to a technologically relevant strain-engineered GaAs/GaAsP hetero-structure and show that the method can even be applied to highly defected regions with substantial changes in local crystal orientation. Strain maps derived from atomically resolved scanning transmission electron microscopy images were used to validate the accuracy, precision and resolution of this versatile technique.

Bibliography

Ozdol, V. B., Gammer, C., Jin, X. G., Ercius, P., Ophus, C., Ciston, J., & Minor, A. M. (2015). Strain mapping at nanometer resolution using advanced nano-beam electron diffraction. Applied Physics Letters, 106(25).

Authors 7

V. B. Ozdol (first)
C. Gammer (additional)
X. G. Jin (additional)
P. Ercius (additional)
C. Ophus (additional)
J. Ciston (additional)
A. M. Minor (additional)

References 29 Referenced 185

10.1557/mrs.2014.3 / MRS Bull. (2014)
10.1146/annurev-matsci-082908-145312 / Annu. Rev. Mater. Res. (2009)
10.1063/1.2218385 / J. Appl. Phys. (2006)
10.7567/APEX.6.015801 / Appl. Phys. Express (2013)
10.1524/zkri.2008.1213 / Z. Kristallogr. (2008)
10.1557/S0883769400058371 / MRS Bull. (1990)
10.1002/(SICI)1097-4555(199910)30:10%3C877::AID-JRS464%3E3.0.CO;2-5 / J. Raman Spectrosc. (1999)
10.1557/mrs.2014.4 / MRS Bull. (2014)
10.1063/1.1774275 / Appl. Phys. Lett. (2004)
10.1016/j.mseb.2005.08.062 / Mater. Sci. Eng. B (2005)
10.1063/1.4906513 / Appl. Phys. Lett. (2015)
10.1017/S1431927612001274 / Microsc. Microanal. (2012)
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10.1016/S0304-3991(98)00035-7 / Ultramicroscopy (1998)
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10.1016/j.actamat.2013.06.006 / Acta Mater. (2013)
See supplementary material at http://dx.doi.org/10.1063/1.4922994 for supplemental Figures. (10.1063/1.4922994)
{'volume-title': 'The Mechanical and Thermodynamical Theory of Plasticity', 'year': '2010', 'key': '2023061800055435100_c23'} / The Mechanical and Thermodynamical Theory of Plasticity (2010)
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{'edition': '2nd ed.', 'volume-title': 'Advanced Computing in Electron Microscopy', 'year': '2010', 'key': '2023061800055435100_c25'} / Advanced Computing in Electron Microscopy (2010)
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10.1016/j.ultramic.2015.03.015 / Ultramicroscopy (2015)
10.1103/PhysRevLett.103.097202 / Phys. Rev. Lett. (2009)
10.1017/S1551929510000404 / Micros. Today (2010)

Dates

Type	When
Created	10 years, 2 months ago (June 24, 2015, 1 p.m.)
Deposited	2 years, 2 months ago (June 17, 2023, 8:06 p.m.)
Indexed	5 days, 8 hours ago (Aug. 30, 2025, 12:59 p.m.)
Issued	10 years, 2 months ago (June 22, 2015)
Published	10 years, 2 months ago (June 22, 2015)
Published Online	10 years, 2 months ago (June 24, 2015)
Published Print	10 years, 2 months ago (June 22, 2015)

Funders 2

Austrian Science Fund 10.13039/501100002428
Region: Europe
gov (National government)
Labels8
1. Fonds zur Förderung der Wissenschaftlichen Forschung
2. FWF Der Wissenschaftsfonds
3. FWF Austrian Science Fund
4. Der Wissenschaftsfonds FWF
5. Österreichischer Wissenschaftsfonds
6. FWF
7. FFWF
8. FWF EN
Awards1
1. J3397
U.S. Department of Energy 10.13039/100000015
Region: Americas
gov (National government)
Labels8
1. Energy Department
2. Department of Energy
3. United States Department of Energy
4. ENERGY.GOV
5. US Department of Energy
6. USDOE
7. DOE
8. USADOE
Awards1
1. DE-AC02-05CH11231

BibTeX

@article{Ozdol_2015, title={Strain mapping at nanometer resolution using advanced nano-beam electron diffraction}, volume={106}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.4922994}, DOI={10.1063/1.4922994}, number={25}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Ozdol, V. B. and Gammer, C. and Jin, X. G. and Ercius, P. and Ophus, C. and Ciston, J. and Minor, A. M.}, year={2015}, month=jun }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        30
      ]
    ],
    "date-time": "2025-08-30T16:59:29Z",
    "timestamp": 1756573169848,
    "version": "3.41.2"
  },
  "reference-count": 29,
  "publisher": "AIP Publishing",
  "issue": "25",
  "funder": [
    {
      "DOI": "10.13039/501100002428",
      "name": "Austrian Science Fund",
      "doi-asserted-by": "publisher",
      "award": [
        "J3397"
      ],
      "id": [
        {
          "id": "10.13039/501100002428",
          "id-type": "DOI",
          "asserted-by": "publisher"
        }
      ]
    },
    {
      "DOI": "10.13039/100000015",
      "name": "U.S. Department of Energy",
      "doi-asserted-by": "publisher",
      "award": [
        "DE-AC02-05CH11231"
      ],
      "id": [
        {
          "id": "10.13039/100000015",
          "id-type": "DOI",
          "asserted-by": "publisher"
        }
      ]
    }
  ],
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2015,
        6,
        22
      ]
    ]
  },
  "abstract": "<jats:p>We report on the development of a nanometer scale strain mapping technique by means of scanning nano-beam electron diffraction. Only recently possible due to fast acquisition with a direct electron detector, this technique allows for strain mapping with a high precision of 0.1% at a lateral resolution of 1\u2009nm for a large field of view reaching up to 1\u2009\u03bcm. We demonstrate its application to a technologically relevant strain-engineered GaAs/GaAsP hetero-structure and show that the method can even be applied to highly defected regions with substantial changes in local crystal orientation. Strain maps derived from atomically resolved scanning transmission electron microscopy images were used to validate the accuracy, precision and resolution of this versatile technique.</jats:p>",
  "DOI": "10.1063/1.4922994",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2015,
        6,
        24
      ]
    ],
    "date-time": "2015-06-24T17:00:55Z",
    "timestamp": 1435165255000
  },
  "update-policy": "https://doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 185,
  "title": "Strain mapping at nanometer resolution using advanced nano-beam electron diffraction",
  "prefix": "10.1063",
  "volume": "106",
  "author": [
    {
      "given": "V. B.",
      "family": "Ozdol",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory 1 National Center for Electron Microscopy, Molecular Foundry, , Berkeley, California 94720, USA"
        }
      ]
    },
    {
      "given": "C.",
      "family": "Gammer",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory 1 National Center for Electron Microscopy, Molecular Foundry, , Berkeley, California 94720, USA"
        },
        {
          "name": "University of California 2 Department of Materials Science and Engineering, , Berkeley, California 94720, USA"
        },
        {
          "name": "University of Vienna 3 Physics of Nanostructured Materials, Faculty of Physics, , 1090 Vienna, Austria"
        }
      ]
    },
    {
      "given": "X. G.",
      "family": "Jin",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Nagoya University 4 Institute for Advanced Research, , Nagoya 464-8603, Japan"
        }
      ]
    },
    {
      "given": "P.",
      "family": "Ercius",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory 1 National Center for Electron Microscopy, Molecular Foundry, , Berkeley, California 94720, USA"
        }
      ]
    },
    {
      "given": "C.",
      "family": "Ophus",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory 1 National Center for Electron Microscopy, Molecular Foundry, , Berkeley, California 94720, USA"
        }
      ]
    },
    {
      "given": "J.",
      "family": "Ciston",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory 1 National Center for Electron Microscopy, Molecular Foundry, , Berkeley, California 94720, USA"
        }
      ]
    },
    {
      "given": "A. M.",
      "family": "Minor",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Lawrence Berkeley National Laboratory 1 National Center for Electron Microscopy, Molecular Foundry, , Berkeley, California 94720, USA"
        },
        {
          "name": "University of California 2 Department of Materials Science and Engineering, , Berkeley, California 94720, USA"
        }
      ]
    }
  ],
  "member": "317",
  "published-online": {
    "date-parts": [
      [
        2015,
        6,
        24
      ]
    ]
  },
  "reference": [
    {
      "key": "2023061800055435100_c1",
      "doi-asserted-by": "publisher",
      "first-page": "108",
      "DOI": "10.1557/mrs.2014.3",
      "volume": "39",
      "year": "2014",
      "journal-title": "MRS Bull."
    },
    {
      "key": "2023061800055435100_c2",
      "doi-asserted-by": "publisher",
      "first-page": "203",
      "DOI": "10.1146/annurev-matsci-082908-145312",
      "volume": "39",
      "year": "2009",
      "journal-title": "Annu. Rev. Mater. Res."
    },
    {
      "key": "2023061800055435100_c3",
      "doi-asserted-by": "publisher",
      "first-page": "023522",
      "DOI": "10.1063/1.2218385",
      "volume": "100",
      "year": "2006",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2023061800055435100_c4",
      "doi-asserted-by": "publisher",
      "first-page": "015801",
      "DOI": "10.7567/APEX.6.015801",
      "volume": "6",
      "year": "2013",
      "journal-title": "Appl. Phys. Express"
    },
    {
      "key": "2023061800055435100_c5",
      "doi-asserted-by": "publisher",
      "first-page": "552",
      "DOI": "10.1524/zkri.2008.1213",
      "volume": "223",
      "year": "2008",
      "journal-title": "Z. Kristallogr."
    },
    {
      "key": "2023061800055435100_c6",
      "doi-asserted-by": "publisher",
      "first-page": "57",
      "DOI": "10.1557/S0883769400058371",
      "volume": "15",
      "year": "1990",
      "journal-title": "MRS Bull."
    },
    {
      "key": "2023061800055435100_c7",
      "doi-asserted-by": "publisher",
      "first-page": "877",
      "DOI": "10.1002/(SICI)1097-4555(199910)30:10%3C877::AID-JRS464%3E3.0.CO;2-5",
      "volume": "30",
      "year": "1999",
      "journal-title": "J. Raman Spectrosc."
    },
    {
      "key": "2023061800055435100_c8",
      "doi-asserted-by": "publisher",
      "first-page": "138",
      "DOI": "10.1557/mrs.2014.4",
      "volume": "39",
      "year": "2014",
      "journal-title": "MRS Bull."
    },
    {
      "key": "2023061800055435100_c9",
      "doi-asserted-by": "publisher",
      "first-page": "651",
      "DOI": "10.1063/1.1774275",
      "volume": "85",
      "year": "2004",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023061800055435100_c10",
      "doi-asserted-by": "publisher",
      "first-page": "143",
      "DOI": "10.1016/j.mseb.2005.08.062",
      "volume": "124\u2013125",
      "year": "2005",
      "journal-title": "Mater. Sci. Eng. B"
    },
    {
      "key": "2023061800055435100_c11",
      "doi-asserted-by": "publisher",
      "first-page": "042104",
      "DOI": "10.1063/1.4906513",
      "volume": "106",
      "year": "2015",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023061800055435100_c12",
      "doi-asserted-by": "publisher",
      "first-page": "995",
      "DOI": "10.1017/S1431927612001274",
      "volume": "18",
      "year": "2012",
      "journal-title": "Microsc. Microanal."
    },
    {
      "key": "2023061800055435100_c13",
      "doi-asserted-by": "publisher",
      "first-page": "212110",
      "DOI": "10.1063/1.4767655",
      "volume": "101",
      "year": "2012",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023061800055435100_c14",
      "doi-asserted-by": "publisher",
      "first-page": "131",
      "DOI": "10.1016/S0304-3991(98)00035-7",
      "volume": "74",
      "year": "1998",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023061800055435100_c15",
      "doi-asserted-by": "publisher",
      "first-page": "233121",
      "DOI": "10.1063/1.4723572",
      "volume": "100",
      "year": "2012",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023061800055435100_c16",
      "doi-asserted-by": "publisher",
      "first-page": "011601",
      "DOI": "10.1063/1.4905368",
      "volume": "106",
      "year": "2015",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023061800055435100_c17",
      "doi-asserted-by": "publisher",
      "first-page": "1086",
      "DOI": "10.1038/nature07049",
      "volume": "453",
      "year": "2008",
      "journal-title": "Nature"
    },
    {
      "key": "2023061800055435100_c18",
      "doi-asserted-by": "publisher",
      "first-page": "091901",
      "DOI": "10.1063/1.3337090",
      "volume": "96",
      "year": "2010",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023061800055435100_c19",
      "doi-asserted-by": "publisher",
      "first-page": "203509",
      "DOI": "10.1063/1.4902337",
      "volume": "105",
      "year": "2014",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023061800055435100_c20",
      "doi-asserted-by": "publisher",
      "first-page": "096101",
      "DOI": "10.1103/PhysRevLett.102.096101",
      "volume": "102",
      "year": "2009",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2023061800055435100_c21",
      "doi-asserted-by": "publisher",
      "first-page": "5646",
      "DOI": "10.1016/j.actamat.2013.06.006",
      "volume": "61",
      "year": "2013",
      "journal-title": "Acta Mater."
    },
    {
      "key": "2023061800055435100_c22",
      "doi-asserted-by": "crossref",
      "unstructured": "See supplementary material at http://dx.doi.org/10.1063/1.4922994 for supplemental Figures.",
      "DOI": "10.1063/1.4922994"
    },
    {
      "volume-title": "The Mechanical and Thermodynamical Theory of Plasticity",
      "year": "2010",
      "key": "2023061800055435100_c23"
    },
    {
      "key": "2023061800055435100_c24",
      "doi-asserted-by": "publisher",
      "first-page": "168",
      "DOI": "10.1107/S0108767396012378",
      "volume": "53",
      "year": "1997",
      "journal-title": "Acta Crystallogr. Sect. A"
    },
    {
      "edition": "2nd ed.",
      "volume-title": "Advanced Computing in Electron Microscopy",
      "year": "2010",
      "key": "2023061800055435100_c25"
    },
    {
      "key": "2023061800055435100_c26",
      "doi-asserted-by": "publisher",
      "first-page": "118",
      "DOI": "10.1016/j.ultramic.2009.10.001",
      "volume": "110",
      "year": "2010",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023061800055435100_c27",
      "doi-asserted-by": "publisher",
      "first-page": "1",
      "DOI": "10.1016/j.ultramic.2015.03.015",
      "volume": "155",
      "year": "2015",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2023061800055435100_c28",
      "doi-asserted-by": "publisher",
      "first-page": "097202",
      "DOI": "10.1103/PhysRevLett.103.097202",
      "volume": "103",
      "year": "2009",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2023061800055435100_c29",
      "doi-asserted-by": "publisher",
      "first-page": "14",
      "DOI": "10.1017/S1551929510000404",
      "volume": "18",
      "year": "2010",
      "journal-title": "Micros. Today"
    }
  ],
  "container-title": "Applied Physics Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://aip.scitation.org/doi/am-pdf/10.1063/1.4922994",
      "content-type": "application/pdf",
      "content-version": "am",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.4922994/14328379/253107_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.4922994/14328379/253107_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        6,
        18
      ]
    ],
    "date-time": "2023-06-18T00:06:02Z",
    "timestamp": 1687046762000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/apl/article/106/25/253107/27065/Strain-mapping-at-nanometer-resolution-using"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2015,
        6,
        22
      ]
    ]
  },
  "references-count": 29,
  "journal-issue": {
    "issue": "25",
    "published-print": {
      "date-parts": [
        [
          2015,
          6,
          22
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.4922994",
  "relation": {},
  "ISSN": [
    "0003-6951",
    "1077-3118"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2015,
        6,
        22
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2015,
        6,
        22
      ]
    ]
  },
  "article-number": "253107"
}