DOI: 10.1063/1.372589. Atom probe analysis of planar multilayer structures

Atom probe analysis of planar multilayer structures

10.1063/1.372589

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Atom probe field ion microscopy has been used to analyze a planar-deposited layered structure in plan view. The specimens were prepared with a newly developed method that involves a combination of photolithography and focused ion-beam milling. A multilayer structure consisting of {Ta/CoFe/(Cu/CoFe)15/Ru/(CoFe/Ru)5/Ru/NiFe} was sputter deposited for use as a test stack. The corresponding thicknesses of these layers were 7/13(3/3)/50/(3/1)/50/150 nm. The nanometer-scale periodicity of the Cu/CoFe stack is readily apparent in transmission electron microscopy images of a field ion specimen fabricated from this material, suggesting that the specimen preparation procedure does not lead to destruction of the multilayer structure. Atom probe analysis of the bulk NiFe layer and the Ru/NiFe interface revealed the distribution of impurity atoms in the film, and these may affect the magnetic properties of the multilayers. Whereas a uniform distribution of C, N and Ar was observed, segregation of O was observed in the NiFe layer within ∼0.25 nm of the interphase interface, with a concentration greater than 20 times that found in the bulk of the NiFe layer.

Bibliography

Larson, D. J., Martens, R. L., Kelly, T. F., Miller, M. K., & Tabat, N. (2000). Atom probe analysis of planar multilayer structures. Journal of Applied Physics, 87(9), 5989â5991.

Authors 5

D. J. Larson (first)
R. L. Martens (additional)
T. F. Kelly (additional)
M. K. Miller (additional)
N. Tabat (additional)

References 12 Referenced 26

10.1146/annurev.ms.25.080195.002041 / Annu. Rev. Mater. Sci. (1995)
{'key': '2024021007521613400_r2'}
10.1016/0304-3991(92)90167-I / Ultramicroscopy (1992)
10.1016/0304-8853(93)90559-K / J. Magn. Magn. Mater. (1993)
{'key': '2024021007521613400_r5', 'first-page': '306', 'volume': '94/95', 'year': '1995', 'journal-title': 'Appl. Surf. Sci.'} / Appl. Surf. Sci. (1995)
10.1063/1.122104 / Appl. Phys. Lett. (1998)
10.1016/S1359-6454(99)00284-0 / Acta Mater. (1999)
10.1017/S1431927600020572 / Microsc. Microanal. (1998)
10.1016/S0304-3991(98)00058-8 / Ultramicroscopy (1998)
10.1016/S0304-3991(99)00055-8 / Ultramicroscopy (1999)
10.1063/1.321776 / J. Appl. Phys. (1975)
{'key': '2024021007521613400_r12', 'first-page': '6142', 'volume': '82', 'year': '1998', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. (1998)

Dates

Type	When
Created	23 years ago (July 26, 2002, 9:55 a.m.)
Deposited	1 year, 6 months ago (Feb. 10, 2024, 4:46 a.m.)
Indexed	1 year, 6 months ago (Feb. 10, 2024, 5:10 a.m.)
Issued	25 years, 3 months ago (May 1, 2000)
Published	25 years, 3 months ago (May 1, 2000)
Published Print	25 years, 3 months ago (May 1, 2000)

Funders 0

None

BibTeX

@article{Larson_2000, title={Atom probe analysis of planar multilayer structures}, volume={87}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.372589}, DOI={10.1063/1.372589}, number={9}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Larson, D. J. and Martens, R. L. and Kelly, T. F. and Miller, M. K. and Tabat, N.}, year={2000}, month=may, pages={5989–5991} }

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