DOI: 10.1063/1.372290. Analytic model of direct tunnel current through ultrathin gate oxides

Analytic model of direct tunnel current through ultrathin gate oxides

10.1063/1.372290

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

A theoretical model for tunnel leakage current through 1.65–3.90-nm-thick gate oxides in metal-oxide-semiconductor structures has been developed. The electron effective mass in the oxide layer and the Fermi energy in the n+ poly-Si gate are the only two fitting parameters. It is shown that the calculated tunnel current is well fitted to the measured one over the entire oxide thickness range when the nonparabolic E-k dispersion relationship for the oxide band gap is employed. The electron effective mass in the oxide layer tends to increase as the oxide thickness decreases to less than 2.80 nm presumably due to the existence of compressive stress in the oxide layer near the SiO2/Si(100) interface.

Bibliography

Khairurrijal, Mizubayashi, W., Miyazaki, S., & Hirose, M. (2000). Analytic model of direct tunnel current through ultrathin gate oxides. Journal of Applied Physics, 87(6), 3000â3005.

Authors 4

Khairurrijal (first)
W. Mizubayashi (additional)
S. Miyazaki (additional)
M. Hirose (additional)

References 37 Referenced 65

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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:55 a.m.)
Deposited	1 year, 6 months ago (Feb. 10, 2024, 1:27 p.m.)
Indexed	2 months, 3 weeks ago (June 6, 2025, 5:08 a.m.)
Issued	25 years, 5 months ago (March 15, 2000)
Published	25 years, 5 months ago (March 15, 2000)
Published Print	25 years, 5 months ago (March 15, 2000)

Funders 0

None

BibTeX

@article{Khairurrijal_2000, title={Analytic model of direct tunnel current through ultrathin gate oxides}, volume={87}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.372290}, DOI={10.1063/1.372290}, number={6}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Khairurrijal and Mizubayashi, W. and Miyazaki, S. and Hirose, M.}, year={2000}, month=mar, pages={3000–3005} }

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