DOI: 10.1063/1.371520. Complete thermal characterization of film-on-substrate system by modulated thermoreflectance microscopy and multiparameter fitting

Complete thermal characterization of film-on-substrate system by modulated thermoreflectance microscopy and multiparameter fitting

10.1063/1.371520

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Modulated thermoreflectance microscopy is applied to a complete thermal characterization of a thin film of gold (78 nm) or YBaCuO (300 nm) on a LaAlO3 substrate. The phase profile, measured at several modulation frequencies covering an appropriate range, is fitted with a rigorous thermal diffusion model. This leads to a simultaneous estimation of the thermal diffusivities of the film and the substrate, as well as of the thermal film/substrate boundary resistance. The estimated values for the gold film sample are, respectively, 4.3×10−6 m2 s−1 (substrate diffusivity), 1.0×10−4 m2 s−1 (film diffusivity), and 1.0×10−8 m2 KW−1 (thermal boundary resistance), while for the thermally anisotropic YBaCuO film sample are, 4.1×10−6 m2 s−1, 3.5×10−6 m2 s−1 (in-plane diffusivity), and 8.0×10−8 m2 KW−1, respectively.

Bibliography

Li, B., Roger, J. P., Pottier, L., & Fournier, D. (1999). Complete thermal characterization of film-on-substrate system by modulated thermoreflectance microscopy and multiparameter fitting. Journal of Applied Physics, 86(9), 5314â5316.

Authors 4

Bincheng Li (first)
J. P. Roger (additional)
L. Pottier (additional)
D. Fournier (additional)

References 16 Referenced 59

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10.1063/1.1147638 / Rev. Sci. Instrum. (1997)
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Dates

Type	When
Created	23 years ago (July 26, 2002, 9:55 a.m.)
Deposited	1 year, 6 months ago (Feb. 6, 2024, 1:05 a.m.)
Indexed	1 month, 2 weeks ago (July 3, 2025, 6:24 a.m.)
Issued	25 years, 9 months ago (Nov. 1, 1999)
Published	25 years, 9 months ago (Nov. 1, 1999)
Published Print	25 years, 9 months ago (Nov. 1, 1999)

Funders 0

None

BibTeX

@article{Li_1999, title={Complete thermal characterization of film-on-substrate system by modulated thermoreflectance microscopy and multiparameter fitting}, volume={86}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.371520}, DOI={10.1063/1.371520}, number={9}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Li, Bincheng and Roger, J. P. and Pottier, L. and Fournier, D.}, year={1999}, month=nov, pages={5314–5316} }

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