DOI: 10.1063/1.368599. Deposition of hydrogenated diamond-like carbon films under the impact of energetic hydrocarbon ions

Deposition of hydrogenated diamond-like carbon films under the impact of energetic hydrocarbon ions

10.1063/1.368599

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

In this article we studied the influence of bombardment energy of hydrocarbon ions on the properties of hydrogenated diamond-like carbon (DLC) films using x-ray reflectivity, Raman spectroscopy, and Fourier-transform infrared. The DLC films were prepared with an electron cyclotron resonance system using H2 and CH4 gases and the ion energy was tunable through a rf-induced dc bias voltage. It was observed that the surface roughness is increased and C–H bonded hydrogen concentration is decreased with increased ion energy, whereas the mass density, hardness, and sp3/sp2 ratio exhibited optimum values. A thin SiC layer was found to form between the DLC films and silicon substrates. Two proposed carbon deposition mechanisms, i.e., the shallow implantation (subplantation) model and the adsorbed layer model, are examined based on the results obtained in this study. Our results indicate that ion bombardment energy is a critical factor in determining the film properties and the ion subplantation could be an important deposition process even for hydrogenated DLC films.

Bibliography

Zhang, Q., Yoon, S. F., Rusli, Ahn, J., Yang, H., & Bahr, D. (1998). Deposition of hydrogenated diamond-like carbon films under the impact of energetic hydrocarbon ions. Journal of Applied Physics, 84(10), 5538â5542.

Authors 6

Qing Zhang (first)
S. F. Yoon (additional)
Rusli (additional)
J. Ahn (additional)
H. Yang (additional)
D. Bahr (additional)

References 44 Referenced 49

{'key': '2024020619153732000_r1', 'first-page': '41', 'volume': '53&53', 'year': '1989', 'journal-title': 'Mater. Sci. Forum'} / Mater. Sci. Forum (1989)
10.1016/0257-8972(91)90306-H / Surf. Coat. Technol. (1991)
10.1143/JJAP.22.L210 / Jpn. J. Appl. Phys., Part 2 (1983)
10.1063/1.347094 / J. Appl. Phys. (1990)
10.1016/0925-9635(94)05264-6 / Diamond Relat. Mater. (1995)
{'key': '2024020619153732000_r6', 'first-page': '605', 'volume': '198–200', 'year': '1996', 'journal-title': 'J. Non-Cryst. Solids'} / J. Non-Cryst. Solids (1996)
{'key': '2024020619153732000_r7'}
10.1063/1.104597 / Appl. Phys. Lett. (1991)
10.1016/S0925-9635(97)00094-0 / Diamond Relat. Mater. (1997)
10.1103/PhysRevLett.62.1290 / Phys. Rev. Lett. (1989)
10.1103/PhysRevB.41.10468 / Phys. Rev. B (1990)
10.1103/PhysRevLett.67.773 / Phys. Rev. Lett. (1991)
10.1016/0925-9635(91)90011-X / Diamond Relat. Mater. (1991)
10.1016/0040-6090(93)90201-Y / Thin Solid Films (1993)
10.1016/0925-9635(93)90262-Z / Diamond Relat. Mater. (1993)
10.1116/1.576403 / J. Vac. Sci. Technol. A (1990)
10.1063/1.361205 / J. Appl. Phys. (1996)
10.1063/1.108525 / Appl. Phys. Lett. (1993)
10.1063/1.97670 / Appl. Phys. Lett. (1987)
10.1063/1.356603 / J. Appl. Phys. (1994)
{'key': '2024020619153732000_r21'}
10.1016/S0925-9635(97)00094-0 / Diamond Relat. Mater. (1997)
10.1116/1.581073 / J. Vac. Sci. Technol. A (1998)
10.1063/1.344361 / J. Appl. Phys. (1989)
10.1016/0040-6090(95)08131-3 / Thin Solid Films (1996)
10.1063/1.357275 / J. Appl. Phys. (1994)
10.1080/10408439708241258 / Crit. Rev. Solid State Mater. Sci. (1997)
{'key': '2024020619153732000_r28'}
{'key': '2024020619153732000_r29', 'first-page': '359', 'volume': '5', 'year': '1954', 'journal-title': 'Phys. Rev.'} / Phys. Rev. (1954)
10.1051/rphysap:01980001503076100 / Rev. Phys. Appl. (1980)
10.1103/PhysRevB.47.4385 / Phys. Rev. B (1993)
10.1063/1.357385 / J. Appl. Phys. (1994)
10.1063/1.1674108 / J. Chem. Phys. (1970)
10.1103/PhysRevB.29.3482 / Phys. Rev. B (1984)
{'key': '2024020619153732000_r35'}
10.1016/0921-5107(92)90233-Y / Mater. Sci. Eng., B (1992)
10.1063/1.97719 / Appl. Phys. Lett. (1987)
10.1016/0925-9635(93)90090-O / Diamond Relat. Mater. (1993)
10.1063/1.342063 / J. Appl. Phys. (1988)
10.1016/0925-9635(94)90186-4 / Diamond Relat. Mater. (1994)
10.1016/S0925-9635(96)00622-X / Diamond Relat. Mater. (1997)
{'key': '2024020619153732000_r42', 'first-page': '1470', 'volume': '5', 'year': '1987', 'journal-title': 'J. Vac. Sci. Technol. A'} / J. Vac. Sci. Technol. A (1987)
10.1007/BF00617856 / Appl. Phys. A: Solids Surf. (1989)
10.1016/S0039-6028(05)80013-5 / Surf. Sci. (1990)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:33 a.m.)
Deposited	1 year, 6 months ago (Feb. 6, 2024, 6:29 p.m.)
Indexed	1 week, 3 days ago (Aug. 26, 2025, 2:56 a.m.)
Issued	26 years, 9 months ago (Nov. 15, 1998)
Published	26 years, 9 months ago (Nov. 15, 1998)
Published Print	26 years, 9 months ago (Nov. 15, 1998)

Funders 0

None

BibTeX

@article{Zhang_1998, title={Deposition of hydrogenated diamond-like carbon films under the impact of energetic hydrocarbon ions}, volume={84}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.368599}, DOI={10.1063/1.368599}, number={10}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Zhang, Qing and Yoon, S. F. and Rusli and Ahn, J. and Yang, H. and Bahr, D.}, year={1998}, month=nov, pages={5538–5542} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        26
      ]
    ],
    "date-time": "2025-08-26T06:56:43Z",
    "timestamp": 1756191403847
  },
  "reference-count": 44,
  "publisher": "AIP Publishing",
  "issue": "10",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1998,
        11,
        15
      ]
    ]
  },
  "abstract": "<jats:p>In this article we studied the influence of bombardment energy of hydrocarbon ions on the properties of hydrogenated diamond-like carbon (DLC) films using x-ray reflectivity, Raman spectroscopy, and Fourier-transform infrared. The DLC films were prepared with an electron cyclotron resonance system using H2 and CH4 gases and the ion energy was tunable through a rf-induced dc bias voltage. It was observed that the surface roughness is increased and C\u2013H bonded hydrogen concentration is decreased with increased ion energy, whereas the mass density, hardness, and sp3/sp2 ratio exhibited optimum values. A thin SiC layer was found to form between the DLC films and silicon substrates. Two proposed carbon deposition mechanisms, i.e., the shallow implantation (subplantation) model and the adsorbed layer model, are examined based on the results obtained in this study. Our results indicate that ion bombardment energy is a critical factor in determining the film properties and the ion subplantation could be an important deposition process even for hydrogenated DLC films.</jats:p>",
  "DOI": "10.1063/1.368599",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:33:46Z",
    "timestamp": 1027690426000
  },
  "page": "5538-5542",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 49,
  "title": "Deposition of hydrogenated diamond-like carbon films under the impact of energetic hydrocarbon ions",
  "prefix": "10.1063",
  "volume": "84",
  "author": [
    {
      "given": "Qing",
      "family": "Zhang",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore\u2009639798, Republic of Singapore"
        }
      ]
    },
    {
      "given": "S. F.",
      "family": "Yoon",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore\u2009639798, Republic of Singapore"
        }
      ]
    },
    {
      "family": "Rusli",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore\u2009639798, Republic of Singapore"
        }
      ]
    },
    {
      "given": "J.",
      "family": "Ahn",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore\u2009639798, Republic of Singapore"
        }
      ]
    },
    {
      "given": "H.",
      "family": "Yang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore\u2009639798, Republic of Singapore"
        }
      ]
    },
    {
      "given": "D.",
      "family": "Bahr",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Bruker AXS Analytical X-ray Systems, Oestliche Rheinbrueckenstr. 50, D-76181\u2009Karlsruhe, Germany"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020619153732000_r1",
      "first-page": "41",
      "volume": "53&53",
      "year": "1989",
      "journal-title": "Mater. Sci. Forum"
    },
    {
      "key": "2024020619153732000_r2",
      "doi-asserted-by": "crossref",
      "first-page": "401",
      "DOI": "10.1016/0257-8972(91)90306-H",
      "volume": "47",
      "year": "1991",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "2024020619153732000_r3",
      "doi-asserted-by": "crossref",
      "first-page": "L210",
      "DOI": "10.1143/JJAP.22.L210",
      "volume": "22",
      "year": "1983",
      "journal-title": "Jpn. J. Appl. Phys., Part 2"
    },
    {
      "key": "2024020619153732000_r4",
      "doi-asserted-by": "crossref",
      "first-page": "62",
      "DOI": "10.1063/1.347094",
      "volume": "68",
      "year": "1990",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020619153732000_r5",
      "doi-asserted-by": "crossref",
      "first-page": "297",
      "DOI": "10.1016/0925-9635(94)05264-6",
      "volume": "4",
      "year": "1995",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020619153732000_r6",
      "first-page": "605",
      "volume": "198\u2013200",
      "year": "1996",
      "journal-title": "J. Non-Cryst. Solids"
    },
    {
      "key": "2024020619153732000_r7"
    },
    {
      "key": "2024020619153732000_r8",
      "doi-asserted-by": "crossref",
      "first-page": "592",
      "DOI": "10.1063/1.104597",
      "volume": "58",
      "year": "1991",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020619153732000_r9",
      "doi-asserted-by": "crossref",
      "first-page": "1683",
      "DOI": "10.1016/S0925-9635(97)00094-0",
      "volume": "6",
      "year": "1997",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020619153732000_r10",
      "doi-asserted-by": "crossref",
      "first-page": "1290",
      "DOI": "10.1103/PhysRevLett.62.1290",
      "volume": "62",
      "year": "1989",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020619153732000_r11",
      "doi-asserted-by": "crossref",
      "first-page": "10468",
      "DOI": "10.1103/PhysRevB.41.10468",
      "volume": "41",
      "year": "1990",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020619153732000_r12",
      "doi-asserted-by": "crossref",
      "first-page": "773",
      "DOI": "10.1103/PhysRevLett.67.773",
      "volume": "67",
      "year": "1991",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020619153732000_r13",
      "doi-asserted-by": "crossref",
      "first-page": "51",
      "DOI": "10.1016/0925-9635(91)90011-X",
      "volume": "1",
      "year": "1991",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020619153732000_r14",
      "doi-asserted-by": "crossref",
      "first-page": "30",
      "DOI": "10.1016/0040-6090(93)90201-Y",
      "volume": "226",
      "year": "1993",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020619153732000_r15",
      "doi-asserted-by": "crossref",
      "first-page": "984",
      "DOI": "10.1016/0925-9635(93)90262-Z",
      "volume": "2",
      "year": "1993",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020619153732000_r16",
      "doi-asserted-by": "crossref",
      "first-page": "38",
      "DOI": "10.1116/1.576403",
      "volume": "8",
      "year": "1990",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020619153732000_r17",
      "doi-asserted-by": "crossref",
      "first-page": "3718",
      "DOI": "10.1063/1.361205",
      "volume": "79",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020619153732000_r18",
      "doi-asserted-by": "crossref",
      "first-page": "937",
      "DOI": "10.1063/1.108525",
      "volume": "62",
      "year": "1993",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020619153732000_r19",
      "doi-asserted-by": "crossref",
      "first-page": "1870",
      "DOI": "10.1063/1.97670",
      "volume": "50",
      "year": "1987",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020619153732000_r20",
      "doi-asserted-by": "crossref",
      "first-page": "7718",
      "DOI": "10.1063/1.356603",
      "volume": "75",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020619153732000_r21"
    },
    {
      "key": "2024020619153732000_r22",
      "doi-asserted-by": "crossref",
      "first-page": "1683",
      "DOI": "10.1016/S0925-9635(97)00094-0",
      "volume": "6",
      "year": "1997",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020619153732000_r23",
      "doi-asserted-by": "crossref",
      "first-page": "572",
      "DOI": "10.1116/1.581073",
      "volume": "16",
      "year": "1998",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020619153732000_r24",
      "doi-asserted-by": "crossref",
      "first-page": "1861",
      "DOI": "10.1063/1.344361",
      "volume": "66",
      "year": "1989",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020619153732000_r25",
      "doi-asserted-by": "crossref",
      "first-page": "53",
      "DOI": "10.1016/0040-6090(95)08131-3",
      "volume": "279",
      "year": "1996",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020619153732000_r26",
      "doi-asserted-by": "crossref",
      "first-page": "4454",
      "DOI": "10.1063/1.357275",
      "volume": "76",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020619153732000_r27",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1080/10408439708241258",
      "volume": "22",
      "year": "1997",
      "journal-title": "Crit. Rev. Solid State Mater. Sci."
    },
    {
      "key": "2024020619153732000_r28"
    },
    {
      "key": "2024020619153732000_r29",
      "first-page": "359",
      "volume": "5",
      "year": "1954",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020619153732000_r30",
      "doi-asserted-by": "crossref",
      "first-page": "761",
      "DOI": "10.1051/rphysap:01980001503076100",
      "volume": "15",
      "year": "1980",
      "journal-title": "Rev. Phys. Appl."
    },
    {
      "key": "2024020619153732000_r31",
      "doi-asserted-by": "crossref",
      "first-page": "4385",
      "DOI": "10.1103/PhysRevB.47.4385",
      "volume": "47",
      "year": "1993",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020619153732000_r32",
      "doi-asserted-by": "crossref",
      "first-page": "3823",
      "DOI": "10.1063/1.357385",
      "volume": "76",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020619153732000_r33",
      "doi-asserted-by": "crossref",
      "first-page": "1126",
      "DOI": "10.1063/1.1674108",
      "volume": "53",
      "year": "1970",
      "journal-title": "J. Chem. Phys."
    },
    {
      "key": "2024020619153732000_r34",
      "doi-asserted-by": "crossref",
      "first-page": "3482",
      "DOI": "10.1103/PhysRevB.29.3482",
      "volume": "29",
      "year": "1984",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020619153732000_r35"
    },
    {
      "key": "2024020619153732000_r36",
      "doi-asserted-by": "crossref",
      "first-page": "321",
      "DOI": "10.1016/0921-5107(92)90233-Y",
      "volume": "11",
      "year": "1992",
      "journal-title": "Mater. Sci. Eng., B"
    },
    {
      "key": "2024020619153732000_r37",
      "doi-asserted-by": "crossref",
      "first-page": "1864",
      "DOI": "10.1063/1.97719",
      "volume": "50",
      "year": "1987",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020619153732000_r38",
      "doi-asserted-by": "crossref",
      "first-page": "397",
      "DOI": "10.1016/0925-9635(93)90090-O",
      "volume": "2",
      "year": "1993",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020619153732000_r39",
      "doi-asserted-by": "crossref",
      "first-page": "6464",
      "DOI": "10.1063/1.342063",
      "volume": "64",
      "year": "1988",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020619153732000_r40",
      "doi-asserted-by": "crossref",
      "first-page": "361",
      "DOI": "10.1016/0925-9635(94)90186-4",
      "volume": "3",
      "year": "1994",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020619153732000_r41",
      "doi-asserted-by": "crossref",
      "first-page": "730",
      "DOI": "10.1016/S0925-9635(96)00622-X",
      "volume": "6",
      "year": "1997",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "2024020619153732000_r42",
      "first-page": "1470",
      "volume": "5",
      "year": "1987",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020619153732000_r43",
      "doi-asserted-by": "crossref",
      "first-page": "549",
      "DOI": "10.1007/BF00617856",
      "volume": "48",
      "year": "1989",
      "journal-title": "Appl. Phys. A: Solids Surf."
    },
    {
      "key": "2024020619153732000_r44",
      "doi-asserted-by": "crossref",
      "first-page": "261",
      "DOI": "10.1016/S0039-6028(05)80013-5",
      "volume": "227",
      "year": "1990",
      "journal-title": "Surf. Sci."
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/84/10/5538/19240896/5538_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/84/10/5538/19240896/5538_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        6
      ]
    ],
    "date-time": "2024-02-06T23:29:03Z",
    "timestamp": 1707262143000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/84/10/5538/488870/Deposition-of-hydrogenated-diamond-like-carbon"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1998,
        11,
        15
      ]
    ]
  },
  "references-count": 44,
  "journal-issue": {
    "issue": "10",
    "published-print": {
      "date-parts": [
        [
          1998,
          11,
          15
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.368599",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1998,
        11,
        15
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1998,
        11,
        15
      ]
    ]
  }
}