DOI: 10.1063/1.368435. Nitrogen engineering of ultrathin oxynitrides by a thermal NO/O2/NO process

Nitrogen engineering of ultrathin oxynitrides by a thermal NO/O2/NO process

10.1063/1.368435

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The paper discusses nitrogen engineering of ultrathin (&lt;5 nm) oxynitride gate dielectrics. The dielectric film that we have aimed for has two nitrogen enhanced layers: one at the SiO2/polysilicon interface to retard boron diffusion from the gate, and a smaller one peaked at the Si/SiO2 interface to increase the hot electron degradation resistance. We were able to produce this dielectric by a thermal (NO/O2/NO) process, aided by an understanding of the kinetics and thermodynamics of nitrogen incorporation in SiO2.

Bibliography

Gusev, E. P., Lu, H. C., Garfunkel, E., Gustafsson, T., Green, M. L., Brasen, D., & Lennard, W. N. (1998). Nitrogen engineering of ultrathin oxynitrides by a thermal NO/O2/NO process. Journal of Applied Physics, 84(5), 2980â2982.

Authors 7

E. P. Gusev (first)
H. C. Lu (additional)
E. Garfunkel (additional)
T. Gustafsson (additional)
M. L. Green (additional)
D. Brasen (additional)
W. N. Lennard (additional)

References 37 Referenced 43

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{'key': '2023071204000671900_r26'}
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Dates

Type	When
Created	23 years ago (July 26, 2002, 8:39 a.m.)
Deposited	2 years, 1 month ago (July 12, 2023, 12:07 a.m.)
Indexed	1 year, 6 months ago (Feb. 11, 2024, 12:30 a.m.)
Issued	26 years, 11 months ago (Sept. 1, 1998)
Published	26 years, 11 months ago (Sept. 1, 1998)
Published Print	26 years, 11 months ago (Sept. 1, 1998)

Funders 0

None

BibTeX

@article{Gusev_1998, title={Nitrogen engineering of ultrathin oxynitrides by a thermal NO/O2/NO process}, volume={84}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.368435}, DOI={10.1063/1.368435}, number={5}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Gusev, E. P. and Lu, H. C. and Garfunkel, E. and Gustafsson, T. and Green, M. L. and Brasen, D. and Lennard, W. N.}, year={1998}, month=sep, pages={2980–2982} }

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