DOI: 10.1063/1.3665129. Heterodyne picosecond thermoreflectance applied to nanoscale thermal metrology

Heterodyne picosecond thermoreflectance applied to nanoscale thermal metrology

10.1063/1.3665129

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Picosecond thermoreflectance is an unprecedented powerful technique for nanoscale heat transfer analysis and metrology, but different sources of artifacts were reported in the literature making this technique difficult to use for long delay (several ns) thermal analysis. We present in this paper a new heterodyne picosecond thermoreflectance (HPTR) technique. As it uses two slightly frequency shifted lasers instead of a mechanical translation stage, it is possible to avoid all artifacts leading to erroneous thermal parameter identifications. The principle and set-up are described as well as the model. The signal delivered by the HPTR experiment is calculated for each excitation configurations, modulating or not the pump beam. We demonstrate the accuracy of the technique in the identification of the thermal conductivity of a 50 nm thick SiO2 layer. Then, we discuss the role of the modulation frequency for nanoscale heat transfer analysis.

Bibliography

Dilhaire, S., Pernot, G., Calbris, G., Rampnoux, J. M., & Grauby, S. (2011). Heterodyne picosecond thermoreflectance applied to nanoscale thermal metrology. Journal of Applied Physics, 110(11).

Authors 5

S. Dilhaire (first)
G. Pernot (additional)
G. Calbris (additional)
J. M. Rampnoux (additional)
S. Grauby (additional)

References 36 Referenced 53

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Dates

Type	When
Created	13 years, 8 months ago (Dec. 9, 2011, 9:59 a.m.)
Deposited	2 years, 1 month ago (June 24, 2023, 10:07 p.m.)
Indexed	2 weeks, 5 days ago (Aug. 2, 2025, 1:06 a.m.)
Issued	13 years, 8 months ago (Dec. 1, 2011)
Published	13 years, 8 months ago (Dec. 1, 2011)
Published Online	13 years, 8 months ago (Dec. 8, 2011)
Published Print	13 years, 8 months ago (Dec. 1, 2011)

Funders 0

None

BibTeX

@article{Dilhaire_2011, title={Heterodyne picosecond thermoreflectance applied to nanoscale thermal metrology}, volume={110}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.3665129}, DOI={10.1063/1.3665129}, number={11}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Dilhaire, S. and Pernot, G. and Calbris, G. and Rampnoux, J. M. and Grauby, S.}, year={2011}, month=dec }

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