DOI: 10.1063/1.361439. Characterization of <i>a</i>-C:H:N deposition from CH4/N2 rf plasmas using optical emission spectroscopy

Characterization of a-C:H:N deposition from CH4/N2 rf plasmas using optical emission spectroscopy

10.1063/1.361439

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Optical emission spectra (OES) from CH4/N2 rf plasmas, which are used for the deposition of nitrogen-containing hydrogenated amorphous carbon (a-C:H:N) thin films, have been characterized. Previously unidentified spectral lines have been assigned to atomic N. Further identified species include CH, H, H2, N2, N+2, N, and CN. Variations between spectra from the pure CH4 or N2 plasmas and the mixed CH4/N2 plasma are discussed. The enhancement of excited nitrogen species, with the addition CH4, is attributed to Penning ionization. The observed OES variations of the CH4/N2 plasma with power, pressure, and CH4/N2 ratio are explained in terms of possible reaction mechanisms and their activation, and correlated with preliminary film growth characteristics.

Bibliography

Clay, K. J., Speakman, S. P., Amaratunga, G. A. J., & Silva, S. R. P. (1996). Characterization of a-C:H:N deposition from CH4/N2 rf plasmas using optical emission spectroscopy. Journal of Applied Physics, 79(9), 7227â7233.

Authors 4

K. J. Clay (first)
S. P. Speakman (additional)
G. A. J. Amaratunga (additional)
S. R. P. Silva (additional)

References 49 Referenced 145

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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:50 a.m.)
Deposited	1 year, 7 months ago (Feb. 2, 2024, 1:10 p.m.)
Indexed	1 month ago (Aug. 2, 2025, 12:32 a.m.)
Issued	29 years, 4 months ago (May 1, 1996)
Published	29 years, 4 months ago (May 1, 1996)
Published Print	29 years, 4 months ago (May 1, 1996)

Funders 0

None

BibTeX

@article{Clay_1996, title={Characterization of a-C:H:N deposition from CH4/N2 rf plasmas using optical emission spectroscopy}, volume={79}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.361439}, DOI={10.1063/1.361439}, number={9}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Clay, K. J. and Speakman, S. P. and Amaratunga, G. A. J. and Silva, S. R. P.}, year={1996}, month=may, pages={7227–7233} }

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    ]
  },
  "published": {
    "date-parts": [
      [
        1996,
        5,
        1
      ]
    ]
  }
}