DOI: 10.1063/1.358936. High-temperature ohmic contact to <i>n</i>-type 6H-SiC using nickel

High-temperature ohmic contact to n-type 6H-SiC using nickel

10.1063/1.358936

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Specific contact resistances measured at elevated temperatures for Ni ohmic contacts to 6H-SiC were reported. The specific contact resistances were measured with the linear transmission line method at both room temperature and at 500 °C and yielded values &lt;5×10−6 Ω cm2 at both temperatures. The trend shows a decreasing contact resistance at higher temperatures. The annealed metal film is a nickel silicide with substantial mixing of C throughout the silicide layer.

Bibliography

Crofton, J., McMullin, P. G., Williams, J. R., & Bozack, M. J. (1995). High-temperature ohmic contact to n-type 6H-SiC using nickel. Journal of Applied Physics, 77(3), 1317â1319.

Authors 4

J. Crofton (first)
P. G. McMullin (additional)
J. R. Williams (additional)
M. J. Bozack (additional)

References 6 Referenced 179

{'key': '2024020214184961300_r1'}
10.1016/0038-1101(72)90048-2 / Solid-State Electron. (1972)
{'key': '2024020214184961300_r3'}
10.1016/0168-583X(85)90762-1 / Nucl. Instrum. Methods B (1985)
10.1063/1.329018 / J. Appl. Phys. (1981)
10.1116/1.570618 / J. Vac. Sci. Technol. (1980)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:48 a.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 9:57 a.m.)
Indexed	2 weeks, 2 days ago (Aug. 12, 2025, 5:53 p.m.)
Issued	30 years, 6 months ago (Feb. 1, 1995)
Published	30 years, 6 months ago (Feb. 1, 1995)
Published Print	30 years, 6 months ago (Feb. 1, 1995)

Funders 0

None

BibTeX

@article{Crofton_1995, title={High-temperature ohmic contact to n-type 6H-SiC using nickel}, volume={77}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.358936}, DOI={10.1063/1.358936}, number={3}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Crofton, J. and McMullin, P. G. and Williams, J. R. and Bozack, M. J.}, year={1995}, month=feb, pages={1317–1319} }

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