DOI: 10.1063/1.358864. InP optical constants between 0.75 and 5.0 eV determined by variable-angle spectroscopic ellipsometry

InP optical constants between 0.75 and 5.0 eV determined by variable-angle spectroscopic ellipsometry

10.1063/1.358864

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Using variable-angle spectroscopic ellipsometry (VASE) InP optical constants for photon energies have been determined in the range from 0.75 to 5.0 eV, which includes the fundamental gap at 1.35 eV. Above 1.5 eV the results are consistent with previously measured pseudovalues from an oxide-stripped sample when a very thin residual overlayer is accounted for. They are also shown to be compatible with previously published prism measurements of refractive index below the band gap. Real and imaginary parts of the dielectric function are shown to be Kramers–Kronig (KK) self-consistent above the gap, and the KK analysis was used to extend the dielectric function below the measurement range to 0.5 eV. The assumptions underlying biased fitting of VASE data and the importance of variable-angle measurements were investigated. The detection and significance of systematic errors for general VASE data analysis were also investigated, especially with regard to fit parameter confidence limits.

Bibliography

Herzinger, C. M., Snyder, P. G., Johs, B., & Woollam, J. A. (1995). InP optical constants between 0.75 and 5.0 eV determined by variable-angle spectroscopic ellipsometry. Journal of Applied Physics, 77(4), 1715â1724.

Authors 4

C. M. Herzinger (first)
P. G. Snyder (additional)
B. Johs (additional)
J. A. Woollam (additional)

References 21 Referenced 114

{'key': '2024020214220567700_r1'}
10.1016/0040-6090(93)90085-4 / Thin Solid Films (1993)
10.1103/PhysRev.136.A1467 / Phys. Rev. (1964)
10.1063/1.1714410 / J. Appl. Phys. (1965)
10.1063/1.329973 / J. Appl. Phys. (1982)
10.1103/PhysRevB.27.985 / Phys. Rev. B (1983)
10.1103/PhysRevB.36.4813 / Phys. Rev. B (1987)
{'key': '2024020214220567700_r8', 'first-page': '622', 'volume': '12', 'year': '1978', 'journal-title': 'Sov. Phys. Semicond.'} / Sov. Phys. Semicond. (1978)
{'key': '2024020214220567700_r9'}
10.1557/PROC-242-481 / Mater. Res. Soc. Symp. Proc. (1992)
10.1016/0040-6090(93)90298-4 / Thin Solid Films (1993)
{'key': '2024020214220567700_r12'}
10.1364/AO.30.003354 / Appl. Opt. (1991)
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{'key': '2024020214220567700_r15'}
10.1016/0040-6090(86)90212-9 / Thin Solid Film (1986)
10.1063/1.110469 / Appl. Phys. Lett. (1993)
{'key': '2024020214220567700_r18'}
{'key': '2024020214220567700_r19', 'first-page': '151', 'volume': '1', 'year': '1992', 'journal-title': 'Opt. Mater.'} / Opt. Mater. (1992)
10.1016/0925-3467(92)90015-F / Opt. Mater. (1992)
{'key': '2024020214220567700_r21'}

Dates

Type	When
Created	23 years ago (July 26, 2002, 9:48 a.m.)
Deposited	1 year, 6 months ago (Feb. 2, 2024, 10:07 a.m.)
Indexed	2 weeks, 3 days ago (Aug. 5, 2025, 9:02 a.m.)
Issued	30 years, 6 months ago (Feb. 15, 1995)
Published	30 years, 6 months ago (Feb. 15, 1995)
Published Print	30 years, 6 months ago (Feb. 15, 1995)

Funders 0

None

BibTeX

@article{Herzinger_1995, title={InP optical constants between 0.75 and 5.0 eV determined by variable-angle spectroscopic ellipsometry}, volume={77}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.358864}, DOI={10.1063/1.358864}, number={4}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Herzinger, C. M. and Snyder, P. G. and Johs, B. and Woollam, J. A.}, year={1995}, month=feb, pages={1715–1724} }

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