DOI: 10.1063/1.353151. Aberrations of emission cathodes: Nanometer diameter field-emission electron sources

Aberrations of emission cathodes: Nanometer diameter field-emission electron sources

10.1063/1.353151

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The electron optical properties of nanometer sized field-emission cathodes are examined for suitability as electron sources for low-voltage scanning electron microscopy, low-voltage transmission point projection microscopy, and low-voltage transmission and reflection electron holography. First-order electron optical properties, aperture and chromatic aberrations, and source coherence are computed using an all-orders numerical method, and compared with analytically computed properties where possible. The electron optical properties of planar emitters, conventional field-emission tips, and new nanotip structures are compared in the absence of space-charge effects. It is found that the spherical and chromatic aberrations of nanotips are dominated by their base structures and that beams produced by nanotips can be considered as totally coherent.

Bibliography

Scheinfein, M. R., Qian, W., & Spence, J. C. H. (1993). Aberrations of emission cathodes: Nanometer diameter field-emission electron sources. Journal of Applied Physics, 73(5), 2057â2068.

Authors 3

M. R. Scheinfein (first)
W. Qian (additional)
J. C. H. Spence (additional)

References 50 Referenced 47

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Dates

Type	When
Created	23 years ago (July 26, 2002, 8:27 a.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 11:29 a.m.)
Indexed	11 months, 2 weeks ago (Sept. 9, 2024, 1:11 p.m.)
Issued	32 years, 5 months ago (March 1, 1993)
Published	32 years, 5 months ago (March 1, 1993)
Published Print	32 years, 5 months ago (March 1, 1993)

Funders 0

None

BibTeX

@article{Scheinfein_1993, title={Aberrations of emission cathodes: Nanometer diameter field-emission electron sources}, volume={73}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.353151}, DOI={10.1063/1.353151}, number={5}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Scheinfein, M. R. and Qian, W. and Spence, J. C. H.}, year={1993}, month=mar, pages={2057–2068} }

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