DOI: 10.1063/1.352348. Interaction force detection in scanning probe microscopy: Methods and applications

Interaction force detection in scanning probe microscopy: Methods and applications

10.1063/1.352348

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Fundamental aspects of interaction force detection and force microscopy are discussed. A formalism is developed for studying the dynamics of experimental setups in general terms. The analysis focuses on stability criteria and resonant properties of the force sensor. The latter are important for measuring interaction force gradients. Experimental techniques used for interaction force detection are examined in detail. Finally, experimental results are presented that demonstrate the potential of combining atomic scale interaction force detection with scanning tunneling microscopy.

Bibliography

DÃ¼rig, U., ZÃ¼ger, O., & Stalder, A. (1992). Interaction force detection in scanning probe microscopy: Methods and applications. Journal of Applied Physics, 72(5), 1778â1798.

Authors 3

U. Dürig (first)
O. Züger (additional)
A. Stalder (additional)

References 48 Referenced 134

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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:45 a.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 10:45 a.m.)
Indexed	3 months, 4 weeks ago (May 2, 2025, 8:11 a.m.)
Issued	32 years, 11 months ago (Sept. 1, 1992)
Published	32 years, 11 months ago (Sept. 1, 1992)
Published Print	32 years, 11 months ago (Sept. 1, 1992)

Funders 0

None

BibTeX

@article{D_rig_1992, title={Interaction force detection in scanning probe microscopy: Methods and applications}, volume={72}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.352348}, DOI={10.1063/1.352348}, number={5}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Dürig, U. and Züger, O. and Stalder, A.}, year={1992}, month=sep, pages={1778–1798} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        5,
        2
      ]
    ],
    "date-time": "2025-05-02T12:11:35Z",
    "timestamp": 1746187895838
  },
  "reference-count": 48,
  "publisher": "AIP Publishing",
  "issue": "5",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1992,
        9,
        1
      ]
    ]
  },
  "abstract": "<jats:p>Fundamental aspects of interaction force detection and force microscopy are discussed. A formalism is developed for studying the dynamics of experimental setups in general terms. The analysis focuses on stability criteria and resonant properties of the force sensor. The latter are important for measuring interaction force gradients. Experimental techniques used for interaction force detection are examined in detail. Finally, experimental results are presented that demonstrate the potential of combining atomic scale interaction force detection with scanning tunneling microscopy.</jats:p>",
  "DOI": "10.1063/1.352348",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T13:45:29Z",
    "timestamp": 1027691129000
  },
  "page": "1778-1798",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 134,
  "title": "Interaction force detection in scanning probe microscopy: Methods and applications",
  "prefix": "10.1063",
  "volume": "72",
  "author": [
    {
      "given": "U.",
      "family": "D\u00fcrig",
      "sequence": "first",
      "affiliation": [
        {
          "name": "IBM Research Division, Zurich Research Laboratory, 8803 R\u00fcschlikon, Switzerland"
        }
      ]
    },
    {
      "given": "O.",
      "family": "Z\u00fcger",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Research Division, Zurich Research Laboratory, 8803 R\u00fcschlikon, Switzerland"
        }
      ]
    },
    {
      "given": "A.",
      "family": "Stalder",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Research Division, Zurich Research Laboratory, 8803 R\u00fcschlikon, Switzerland"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020415453694100_r1",
      "doi-asserted-by": "crossref",
      "first-page": "178",
      "DOI": "10.1063/1.92999",
      "volume": "40",
      "year": "1982",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020415453694100_r1a",
      "first-page": "1",
      "volume": "42\u201344",
      "year": "1992",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2024020415453694100_r2",
      "doi-asserted-by": "crossref",
      "first-page": "930",
      "DOI": "10.1103/PhysRevLett.56.930",
      "volume": "56",
      "year": "1986",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020415453694100_r2a",
      "doi-asserted-by": "crossref",
      "first-page": "209",
      "DOI": "10.1126/science.3051380",
      "volume": "242",
      "year": "1988",
      "journal-title": "Science"
    },
    {
      "key": "2024020415453694100_r2b",
      "first-page": "23",
      "volume": "43",
      "year": "1990",
      "journal-title": "Phys. Today"
    },
    {
      "key": "2024020415453694100_r2c",
      "doi-asserted-by": "crossref",
      "first-page": "431",
      "DOI": "10.1116/1.585585",
      "volume": "9",
      "year": "1991",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2024020415453694100_r2d"
    },
    {
      "key": "2024020415453694100_r2e"
    },
    {
      "key": "2024020415453694100_r3",
      "doi-asserted-by": "crossref",
      "first-page": "1942",
      "DOI": "10.1103/PhysRevLett.59.1942",
      "volume": "59",
      "year": "1987",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020415453694100_r3a",
      "doi-asserted-by": "crossref",
      "first-page": "5190",
      "DOI": "10.1063/1.455608",
      "volume": "89",
      "year": "1988",
      "journal-title": "J. Chem. Phys."
    },
    {
      "key": "2024020415453694100_r3b",
      "doi-asserted-by": "crossref",
      "first-page": "1283",
      "DOI": "10.1016/0042-207X(90)93934-B",
      "volume": "41",
      "year": "1990",
      "journal-title": "Vacuum"
    },
    {
      "key": "2024020415453694100_r4",
      "doi-asserted-by": "crossref",
      "first-page": "1931",
      "DOI": "10.1103/PhysRevLett.64.1931",
      "volume": "64",
      "year": "1990",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020415453694100_r4a",
      "doi-asserted-by": "crossref",
      "first-page": "2270",
      "DOI": "10.1103/PhysRevLett.65.2270",
      "volume": "65",
      "year": "1990",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020415453694100_r4b",
      "doi-asserted-by": "crossref",
      "first-page": "3449",
      "DOI": "10.1116/1.576530",
      "volume": "8",
      "year": "1990",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "2024020415453694100_r5",
      "doi-asserted-by": "crossref",
      "first-page": "2717",
      "DOI": "10.1063/1.100162",
      "volume": "53",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020415453694100_r5a",
      "doi-asserted-by": "crossref",
      "first-page": "3162",
      "DOI": "10.1103/PhysRevLett.65.3162",
      "volume": "65",
      "year": "1990",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020415453694100_r5b",
      "doi-asserted-by": "crossref",
      "first-page": "3861",
      "DOI": "10.1103/PhysRevB.45.3861",
      "volume": "45",
      "year": "1992",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020415453694100_r6",
      "first-page": "262",
      "volume": "42\u201344",
      "year": "1992",
      "journal-title": "Ultramicroscopy"
    },
    {
      "key": "2024020415453694100_r7",
      "doi-asserted-by": "crossref",
      "first-page": "2296",
      "DOI": "10.1063/1.1141354",
      "volume": "61",
      "year": "1990",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2024020415453694100_r7a"
    },
    {
      "key": "2024020415453694100_r8",
      "doi-asserted-by": "crossref",
      "first-page": "4723",
      "DOI": "10.1063/1.338807",
      "volume": "61",
      "year": "1987",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020415453694100_r8a",
      "doi-asserted-by": "crossref",
      "first-page": "1045",
      "DOI": "10.1063/1.100061",
      "volume": "53",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020415453694100_r8b",
      "doi-asserted-by": "crossref",
      "first-page": "2337",
      "DOI": "10.1063/1.1139958",
      "volume": "59",
      "year": "1988",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2024020415453694100_r8c",
      "first-page": "164",
      "volume": "65",
      "year": "1988",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020415453694100_r8d",
      "doi-asserted-by": "crossref",
      "first-page": "1968",
      "DOI": "10.1109/3.34059",
      "volume": "25",
      "year": "1989",
      "journal-title": "IEEE J. Quantum Electron."
    },
    {
      "key": "2024020415453694100_r8e",
      "doi-asserted-by": "crossref",
      "first-page": "3131",
      "DOI": "10.1063/1.1140543",
      "volume": "60",
      "year": "1989",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2024020415453694100_r9",
      "doi-asserted-by": "crossref",
      "first-page": "349",
      "DOI": "10.1103/PhysRevLett.65.349",
      "volume": "65",
      "year": "1990",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020415453694100_r9a",
      "doi-asserted-by": "crossref",
      "first-page": "382",
      "DOI": "10.1016/0042-207X(90)90365-6",
      "volume": "41",
      "year": "1990",
      "journal-title": "Vacuum"
    },
    {
      "key": "2024020415453694100_r10",
      "doi-asserted-by": "crossref",
      "first-page": "699",
      "DOI": "10.1103/PhysRevLett.67.699",
      "volume": "67",
      "year": "1991",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020415453694100_r11",
      "doi-asserted-by": "crossref",
      "first-page": "668",
      "DOI": "10.1063/1.347347",
      "volume": "69",
      "year": "1991",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020415453694100_r12"
    },
    {
      "key": "2024020415453694100_r13",
      "doi-asserted-by": "crossref",
      "first-page": "126",
      "DOI": "10.1002/j.1538-7305.1932.tb02344.x",
      "volume": "11",
      "year": "1932",
      "journal-title": "Bell Syst. Tech. J."
    },
    {
      "key": "2024020415453694100_r14",
      "first-page": "2403",
      "volume": "19",
      "year": "1986",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020415453694100_r15",
      "doi-asserted-by": "crossref",
      "first-page": "259",
      "DOI": "10.1111/j.1365-2818.1988.tb01387.x",
      "volume": "152",
      "year": "1988",
      "journal-title": "J. Microscopy"
    },
    {
      "key": "2024020415453694100_r16"
    },
    {
      "key": "2024020415453694100_r17"
    },
    {
      "key": "2024020415453694100_r18",
      "doi-asserted-by": "crossref",
      "first-page": "1998",
      "DOI": "10.1103/PhysRevLett.50.1998",
      "volume": "50",
      "year": "1983",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020415453694100_r19",
      "doi-asserted-by": "crossref",
      "first-page": "2763",
      "DOI": "10.1103/PhysRevB.41.2763",
      "volume": "41",
      "year": "1990",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020415453694100_r19a",
      "doi-asserted-by": "crossref",
      "first-page": "7618",
      "DOI": "10.1103/PhysRevB.42.7618",
      "volume": "42",
      "year": "1990",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020415453694100_r20",
      "doi-asserted-by": "crossref",
      "first-page": "4728",
      "DOI": "10.1103/PhysRevB.43.4728",
      "volume": "43",
      "year": "1991",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020415453694100_r20a"
    },
    {
      "key": "2024020415453694100_r21",
      "doi-asserted-by": "crossref",
      "first-page": "2404",
      "DOI": "10.1103/PhysRevB.43.2404",
      "volume": "43",
      "year": "1991",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020415453694100_r22",
      "first-page": "253",
      "volume": "14",
      "year": "1989",
      "journal-title": "Comments Condens. Matter Phys."
    },
    {
      "key": "2024020415453694100_r23",
      "doi-asserted-by": "crossref",
      "first-page": "5484",
      "DOI": "10.1103/PhysRevB.8.5484",
      "volume": "8",
      "year": "1973",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "2024020415453694100_r24",
      "doi-asserted-by": "crossref",
      "first-page": "123",
      "DOI": "10.1209/0295-5075/13/2/005",
      "volume": "13",
      "year": "1990",
      "journal-title": "Europhys. Lett."
    },
    {
      "key": "2024020415453694100_r25",
      "doi-asserted-by": "crossref",
      "first-page": "155",
      "DOI": "10.1016/0039-6028(84)90014-1",
      "volume": "139",
      "year": "1984",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020415453694100_r26",
      "doi-asserted-by": "crossref",
      "first-page": "2171",
      "DOI": "10.1063/1.106088",
      "volume": "59",
      "year": "1991",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020415453694100_r27"
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/72/5/1778/18651995/1778_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/72/5/1778/18651995/1778_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        4
      ]
    ],
    "date-time": "2024-02-04T15:45:54Z",
    "timestamp": 1707061554000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/72/5/1778/499934/Interaction-force-detection-in-scanning-probe"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1992,
        9,
        1
      ]
    ]
  },
  "references-count": 48,
  "journal-issue": {
    "issue": "5",
    "published-print": {
      "date-parts": [
        [
          1992,
          9,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.352348",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1992,
        9,
        1
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1992,
        9,
        1
      ]
    ]
  }
}