DOI: 10.1063/1.351726. Processing and electrical properties of Pb (ZrxTi1−x)O3 (x=0.2–0.75) films: Comparison of metallo-organic decomposition and sol-gel processes

Processing and electrical properties of Pb (ZrxTi1−x)O3 (x=0.2–0.75) films: Comparison of metallo-organic decomposition and sol-gel processes

10.1063/1.351726

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The deposition of thin Pb(ZrxTi1−x)O3 films by sol-gel and by metallo-organic decomposition (MOD) processes has been studied. Powders obtained from different precursor solutions were analyzed with respect to their decomposition and crystallization. Using a spin-coating technique, Pb(ZrxTi1−x)O3 films with zirconium concentrations ranging from x=0.2 to 0.75 have been deposited on Pt-electroded Si wafers. The lattice constants of the perovskite films and their dielectric and ferroelectric properties (permittivity, remanent polarization, coercive field strength) have been measured as a function of the zirconium concentration. The results are compared to the data obtained on bulk ceramics. For Pb(ZrxTi1−x)O3 films with a composition located at the morphotropic phase boundary (x≊0.53) the influence of the processing and the lead excess of the starting solutions on the film properties was examined. First measurements on the resistance degradation of thin Pb(Zr0.53Ti47)O3 films deposited by the MOD process are reported.

Bibliography

Klee, M., Eusemann, R., Waser, R., Brand, W., & van Hal, H. (1992). Processing and electrical properties of Pb (ZrxTi1âx)O3 (x=0.2â0.75) films: Comparison of metallo-organic decomposition and sol-gel processes. Journal of Applied Physics, 72(4), 1566â1576.

Authors 5

M. Klee (first)
R. Eusemann (additional)
R. Waser (additional)
W. Brand (additional)
H. van Hal (additional)

References 32 Referenced 189

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{'key': '2024020415431036200_r6', 'first-page': '107', 'volume': '36', 'year': '1985', 'journal-title': 'Br. Ceram. Proc.'} / Br. Ceram. Proc. (1985)
{'key': '2024020415431036200_r7', 'first-page': '49', 'volume': '41', 'year': '1989', 'journal-title': 'Proc. Electroceram.'} / Proc. Electroceram. (1989)
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{'key': '2024020415431036200_r14'}
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{'key': '2024020415431036200_r18', 'first-page': '687', 'volume': '47', 'year': '1970', 'journal-title': 'Ber. Dtsch. Keram. Ges.'} / Ber. Dtsch. Keram. Ges. (1970)
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{'key': '2024020415431036200_r25'}
{'key': '2024020415431036200_r26', 'first-page': '676', 'volume': '50', 'year': '1971', 'journal-title': 'Am. Ceram. Soc. Bull.'} / Am. Ceram. Soc. Bull. (1971)
{'key': '2024020415431036200_r27'}
{'key': '2024020415431036200_r28'}
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10.1111/j.1151-2916.1991.tb04130.x / J. Am. Ceram. Soc. (1991)
{'key': '2024020415431036200_r31'}
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Dates

Type	When
Created	23 years ago (July 26, 2002, 8:33 a.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 10:43 a.m.)
Indexed	1 day, 22 hours ago (Aug. 23, 2025, 12:58 a.m.)
Issued	33 years ago (Aug. 15, 1992)
Published	33 years ago (Aug. 15, 1992)
Published Print	33 years ago (Aug. 15, 1992)

Funders 0

None

BibTeX

@article{Klee_1992, title={Processing and electrical properties of Pb (ZrxTi1−x)O3 (x=0.2–0.75) films: Comparison of metallo-organic decomposition and sol-gel processes}, volume={72}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.351726}, DOI={10.1063/1.351726}, number={4}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Klee, M. and Eusemann, R. and Waser, R. and Brand, W. and van Hal, H.}, year={1992}, month=aug, pages={1566–1576} }

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