DOI: 10.1063/1.350501. Pulsed laser deposition of diamond-like carbon films

Pulsed laser deposition of diamond-like carbon films

10.1063/1.350501

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Carbon thin films have been prepared by 248 nm excimer laser vaporization of graphite targets. The effect of a variety of process parameters on the film properties is investigated. Deposition at or below room temperature yields diamond-like films with low hydrogen content, high optical transmission, and high resistivity. Electron energy loss spectra indicate sp3 bond fractions of 70–85%. Detailed analyses of the pseudodielectric functions, measured using spectroscopic ellipsometry, show the films to have normal dispersion and an index of refraction of 2.5 in the visible wavelength region. The effects of a low pressure hydrogen background and the use of auxiliary pulsed and dc plasma enhancements are also examined.

Bibliography

Pappas, D. L., Saenger, K. L., Bruley, J., Krakow, W., Cuomo, J. J., Gu, T., & Collins, R. W. (1992). Pulsed laser deposition of diamond-like carbon films. Journal of Applied Physics, 71(11), 5675â5684.

Authors 7

David L. Pappas (first)
Katherine L. Saenger (additional)
John Bruley (additional)
William Krakow (additional)
Jerome J. Cuomo (additional)
Tieer Gu (additional)
Robert W. Collins (additional)

References 39 Referenced 306

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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:45 a.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 10:27 a.m.)
Indexed	4 months, 3 weeks ago (March 31, 2025, 1:25 a.m.)
Issued	33 years, 2 months ago (June 1, 1992)
Published	33 years, 2 months ago (June 1, 1992)
Published Print	33 years, 2 months ago (June 1, 1992)

Funders 0

None

BibTeX

@article{Pappas_1992, title={Pulsed laser deposition of diamond-like carbon films}, volume={71}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.350501}, DOI={10.1063/1.350501}, number={11}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Pappas, David L. and Saenger, Katherine L. and Bruley, John and Krakow, William and Cuomo, Jerome J. and Gu, Tieer and Collins, Robert W.}, year={1992}, month=jun, pages={5675–5684} }

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