DOI: 10.1063/1.347181. Growth of native oxide on a silicon surface

Growth of native oxide on a silicon surface

10.1063/1.347181

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The control factors controlling the growth of native silicon oxide on silicon (Si) surfaces have been identified. The coexistence of oxygen and water or moisture is required for growth of native oxide both in air and in ultrapure water at room temperature. Layer-by-layer growth of native oxide films occurs on Si surfaces exposed to air. Growth of native oxides on n-Si in ultrapure water is described by a parabolic law, while the native oxide film thickness on n+-Si in ultrapure water saturates at 10 Å. The native oxide growth on n-Si in ultrapure water is continuously accompanied by a dissolution of Si into the water and degrades the atomic flatness at the oxide-Si interface, producing a rough oxide surface. A dissolution of Si into the water has not been observed for the Si wafer having surface covered by the native oxide grown in air. Native oxides grown in air and in ultrapure de-ionized water have been demonstrated experimentally to exhibit remarkable differences such as contact angles of ultrapure water drops and chemical binding energy. These chemical bond structures for native oxide films grown in air and in ultrapure water are also discussed.

Bibliography

Morita, M., Ohmi, T., Hasegawa, E., Kawakami, M., & Ohwada, M. (1990). Growth of native oxide on a silicon surface. Journal of Applied Physics, 68(3), 1272â1281.

Authors 5

M. Morita (first)
T. Ohmi (additional)
E. Hasegawa (additional)
M. Kawakami (additional)
M. Ohwada (additional)

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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9 a.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 6:50 a.m.)
Indexed	6 days, 7 hours ago (Aug. 22, 2025, 12:45 a.m.)
Issued	35 years ago (Aug. 1, 1990)
Published	35 years ago (Aug. 1, 1990)
Published Print	35 years ago (Aug. 1, 1990)

Funders 0

None

BibTeX

@article{Morita_1990, title={Growth of native oxide on a silicon surface}, volume={68}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.347181}, DOI={10.1063/1.347181}, number={3}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Morita, M. and Ohmi, T. and Hasegawa, E. and Kawakami, M. and Ohwada, M.}, year={1990}, month=aug, pages={1272–1281} }

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