DOI: 10.1063/1.346738. Mechanical properties of <i>a</i>-C:H films prepared by plasma decomposition of C2H2

Mechanical properties of a-C:H films prepared by plasma decomposition of C2H2

10.1063/1.346738

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Diamondlike a-C:H films have been deposited by decomposition of C2H2. By the combination of Brillouin scattering and the ultralow load indentation technique, the following mechanical properties of the films were studied: the microhardness H, the Young’s modulus E, the shear modulus μ, and the Poisson’s ratio ν. From the measured data of mass density, hydrogen concentration, and the ratio of sp3/sp2 bonds the filling factors of these films were calculated. The results show that the hardness, Young’s modulus, and shear modulus of these films depend strongly on the volume concentration of voids and are directly proportional to the filling factor.

Bibliography

Jiang, X., Reichelt, K., & Stritzker, B. (1990). Mechanical properties of a-C:H films prepared by plasma decomposition of C2H2. Journal of Applied Physics, 68(3), 1018â1022.

Authors 3

X. Jiang (first)
K. Reichelt (additional)
B. Stritzker (additional)

References 16 Referenced 76

{'key': '2024020411500656400_r1', 'first-page': '2950', 'volume': '42', 'year': '1971', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. (1971)
10.1016/0040-6090(81)90226-1 / Thin Solid Films (1981)
10.1063/1.333385 / J. Appl. Phys. (1984)
10.1063/1.94056 / Appl. Phys. Lett. (1983)
10.1063/1.98617 / Appl. Phys. Lett. (1987)
10.1063/1.343355 / J. Appl. Phys. (1989)
10.1116/1.572844 / J. Vac. Sci. Technol. A (1985)
10.1063/1.343833 / J. Appl. Phys. (1989)
10.1063/1.345230 / J. Appl. Phys. (1990)
{'key': '2024020411500656400_r10', 'first-page': '15', 'volume': '11', 'year': '1986', 'journal-title': 'MRS Bull.'} / MRS Bull. (1986)
10.1557/JMR.1986.0601 / J. Mater. Res. (1986)
{'key': '2024020411500656400_r12'}
10.1063/1.344462 / J. Appl. Phys. (1989)
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{'key': '2024020411500656400_r16'}

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9 a.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 6:50 a.m.)
Indexed	11 months, 1 week ago (Sept. 16, 2024, 12:38 p.m.)
Issued	35 years ago (Aug. 1, 1990)
Published	35 years ago (Aug. 1, 1990)
Published Print	35 years ago (Aug. 1, 1990)

Funders 0

None

BibTeX

@article{Jiang_1990, title={Mechanical properties of a-C:H films prepared by plasma decomposition of C2H2}, volume={68}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.346738}, DOI={10.1063/1.346738}, number={3}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Jiang, X. and Reichelt, K. and Stritzker, B.}, year={1990}, month=aug, pages={1018–1022} }

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