DOI: 10.1063/1.345411. X-ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines

X-ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines

10.1063/1.345411

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Direct x-ray diffraction determination of elastic strain and stress in aluminum and aluminum-silicon films and patterned lines has been used to investigate the effect of various passivations. Passivation over uniform metal films has very little effect. Passivation over patterned metal results in substantial triaxial tensile stress. Contrary to the conventional wisdom, high compressive stress in the passivation does not result in additional tensile stress in the metal. The deleterious effects of highly compressive silicon nitride on metal is probably due to the effect of excess hydrogen in the silicon nitride.

Bibliography

Flinn, P. A., & Chiang, C. (1990). X-ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines. Journal of Applied Physics, 67(6), 2927â2931.

Authors 2

Paul A. Flinn (first)
Chien Chiang (additional)

References 17 Referenced 158

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{'key': '2024020410564829000_r7', 'first-page': '689', 'volume': 'ED-34', 'year': '1987', 'journal-title': 'IEEE Trans. Electron Devices'} / IEEE Trans. Electron Devices (1987)
{'key': '2024020410564829000_r8', 'first-page': '1749', 'volume': '6', 'year': '1988', 'journal-title': 'J. Vacuum Sci. Technol. B'} / J. Vacuum Sci. Technol. B (1988)
10.1107/S0021889871007532 / J. Appl. Crystallogr. (1971)
10.1063/1.1661935 / J. Appl. Phys. (1973)
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{'key': '2024020410564829000_r14', 'first-page': '811', 'volume': '13A', 'year': '1982', 'journal-title': 'Metall. Trans.'} / Metall. Trans. (1982)
10.1063/1.99495 / Appl. Phys. Lett. (1988)
10.1088/0305-4608/1/3/307 / J. Phys. F (1971)
{'key': '2024020410564829000_r17', 'first-page': '682', 'volume': '52', 'year': '1961', 'journal-title': 'Zeit. Metall.'} / Zeit. Metall. (1961)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:58 a.m.)
Deposited	1 year, 7 months ago (Feb. 4, 2024, 5:56 a.m.)
Indexed	1 year, 6 months ago (Feb. 10, 2024, 6:03 a.m.)
Issued	35 years, 5 months ago (March 15, 1990)
Published	35 years, 5 months ago (March 15, 1990)
Published Print	35 years, 5 months ago (March 15, 1990)

Funders 0

None

BibTeX

@article{Flinn_1990, title={X-ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines}, volume={67}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.345411}, DOI={10.1063/1.345411}, number={6}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Flinn, Paul A. and Chiang, Chien}, year={1990}, month=mar, pages={2927–2931} }

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