DOI: 10.1063/1.344361. Measurements of carbon thin films using x-ray reflectivity

Measurements of carbon thin films using x-ray reflectivity

10.1063/1.344361

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

We report x-ray reflectivity measurements on ultrathin (∼250 Å) amorphous carbon films and show that for film thicknesses of a few hundred angstroms this is an extremely effective, accurate, and nondestructive technique for measuring the thickness, density, and microscopic surface roughness. These properties are difficult to accurately measure using other methods. However, since they affect the functional performance of these films and are dependent on preparation conditions, their determination is particularly important.

Bibliography

Toney, M. F., & Brennan, S. (1989). Measurements of carbon thin films using x-ray reflectivity. Journal of Applied Physics, 66(4), 1861â1863.

Authors 2

Michael F. Toney (first)
Sean Brennan (additional)

References 17 Referenced 69

10.1116/1.574188 / J. Vac. Sci. Technol. A (1987)
{'key': '2024020409573906900_r2'}
{'key': '2024020409573906900_r3'}
10.1016/0040-6090(86)90023-4 / Thin Solid Films (1986)
10.1016/0040-6090(86)90115-X / Thin Solid Films (1986)
{'key': '2024020409573906900_r6'}
{'key': '2024020409573906900_r7'}
10.1103/PhysRevB.38.2297 / Phys. Rev. B (1988)
10.1103/PhysRevA.38.2457 / Phys. Rev. A (1988)
{'key': '2024020409573906900_r10'}
10.1063/1.339895 / J. Appl. Phys. (1988)
{'key': '2024020409573906900_r12'}
{'key': '2024020409573906900_r13', 'first-page': '133', 'volume': '90', 'year': '1987', 'journal-title': 'Mater. Res. Soc. Proc.'} / Mater. Res. Soc. Proc. (1987)
{'key': '2024020409573906900_r14'}
10.1103/PhysRevB.28.7229 / Phys. Rev. B (1983)
10.1016/0169-4332(88)90401-1 / Appl. Surf. Sci. (1988)
10.1063/1.341331 / J. Appl. Phys. (1988)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:58 a.m.)
Deposited	1 year, 7 months ago (Feb. 4, 2024, 4:57 a.m.)
Indexed	5 months ago (April 1, 2025, 2:43 a.m.)
Issued	36 years ago (Aug. 15, 1989)
Published	36 years ago (Aug. 15, 1989)
Published Print	36 years ago (Aug. 15, 1989)

Funders 0

None

BibTeX

@article{Toney_1989, title={Measurements of carbon thin films using x-ray reflectivity}, volume={66}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.344361}, DOI={10.1063/1.344361}, number={4}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Toney, Michael F. and Brennan, Sean}, year={1989}, month=aug, pages={1861–1863} }

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