DOI: 10.1063/1.339458. Low-loss epitaxial ZnO optical waveguides on sapphire by rf magnetron sputtering

Low-loss epitaxial ZnO optical waveguides on sapphire by rf magnetron sputtering

10.1063/1.339458

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Optical waveguide loss of about 0.55 dB cm−1 has been measured on epitaxial ZnO films on sapphire by magnetron sputtering. Measurements were also made of the refractive index of those films. The experimental results are compared with theory when TE and TM guided waves propagate in the plane at an arbitrary angle with respect to the c axis where the c axis is lying in the plane of the film. Surface acoustic wave (SAW) properties were also measured for SAW propagating along the c axis of ZnO film on the (011̄2)-oriented Al2O3 substrate.

Bibliography

Wu, M.-S., Azuma, A., Shiosaki, T., & Kawabata, A. (1987). Low-loss epitaxial ZnO optical waveguides on sapphire by rf magnetron sputtering. Journal of Applied Physics, 62(6), 2482â2484.

Authors 4

Mu-Shiang Wu (first)
Atsushi Azuma (additional)
Tadashi Shiosaki (additional)
Akira Kawabata (additional)

References 20 Referenced 44

10.1063/1.1654411 / Appl. Phys. Lett. (1972)
10.1063/1.1654849 / Appl. Phys. Lett. (1973)
{'key': '2024020406481270000_r3', 'first-page': '138', 'volume': 'QE-11', 'year': '1975', 'journal-title': 'IEEE J. Quantum Electron.'} / IEEE J. Quantum Electron. (1975)
10.1016/0040-6090(76)90220-0 / Thin Solid Films (1976)
10.1063/1.326391 / J. Appl. Phys. (1979)
{'key': '2024020406481270000_r6', 'first-page': '173', 'volume': '22-3', 'year': '1983', 'journal-title': 'Jpn. J. Appl. Phys. Suppl.'} / Jpn. J. Appl. Phys. Suppl. (1983)
10.1016/0022-0248(78)90461-X / J. Cryst. Growth (1978)
{'key': '2024020406481270000_r8'}
{'key': '2024020406481270000_r9', 'first-page': '863', 'volume': 'QE-14', 'year': '1978', 'journal-title': 'IEEE J. Quantum Electron.'} / IEEE J. Quantum Electron. (1978)
10.1063/1.326262 / J. Appl. Phys. (1979)
10.1016/0030-4018(79)90289-X / Opt. Commun. (1979)
10.1116/1.1492639 / J. Vac. Sci. Technol. (1969)
10.1063/1.1655024 / Appl. Phys. Lett. (1974)
10.1364/AO.14.000923 / Appl. Opt. (1975)
{'key': '2024020406481270000_r15'}
10.1063/1.1652820 / Appl. Phys. Lett. (1969)
{'key': '2024020406481270000_r17'}
{'key': '2024020406481270000_r18'}
{'key': '2024020406481270000_r19', 'first-page': '856', 'volume': 'MTT-17', 'year': '1969', 'journal-title': 'IEEE Trans. Microwave Theory Tech.'} / IEEE Trans. Microwave Theory Tech. (1969)
10.1063/1.328019 / J. Appl. Phys. (1980)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:53 a.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 1:48 a.m.)
Indexed	1 year, 6 months ago (Feb. 10, 2024, 7:38 p.m.)
Issued	37 years, 11 months ago (Sept. 15, 1987)
Published	37 years, 11 months ago (Sept. 15, 1987)
Published Print	37 years, 11 months ago (Sept. 15, 1987)

Funders 0

None

BibTeX

@article{Wu_1987, title={Low-loss epitaxial ZnO optical waveguides on sapphire by rf magnetron sputtering}, volume={62}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.339458}, DOI={10.1063/1.339458}, number={6}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Wu, Mu-Shiang and Azuma, Atsushi and Shiosaki, Tadashi and Kawabata, Akira}, year={1987}, month=sep, pages={2482–2484} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        11
      ]
    ],
    "date-time": "2024-02-11T00:38:44Z",
    "timestamp": 1707611924935
  },
  "reference-count": 20,
  "publisher": "AIP Publishing",
  "issue": "6",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1987,
        9,
        15
      ]
    ]
  },
  "abstract": "<jats:p>Optical waveguide loss of about 0.55 dB\u2009cm\u22121 has been measured on epitaxial ZnO films on sapphire by magnetron sputtering. Measurements were also made of the refractive index of those films. The experimental results are compared with theory when TE and TM guided waves propagate in the plane at an arbitrary angle with respect to the c axis where the c axis is lying in the plane of the film. Surface acoustic wave (SAW) properties were also measured for SAW propagating along the c axis of ZnO film on the (011\u03042)-oriented Al2O3 substrate.</jats:p>",
  "DOI": "10.1063/1.339458",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T12:53:52Z",
    "timestamp": 1027688032000
  },
  "page": "2482-2484",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 44,
  "title": "Low-loss epitaxial ZnO optical waveguides on sapphire by rf magnetron sputtering",
  "prefix": "10.1063",
  "volume": "62",
  "author": [
    {
      "given": "Mu-Shiang",
      "family": "Wu",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Electronics, Faculty of Engineering, Kyoto University, Kyoto 606, Japan"
        }
      ]
    },
    {
      "given": "Atsushi",
      "family": "Azuma",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Electronics, Faculty of Engineering, Kyoto University, Kyoto 606, Japan"
        }
      ]
    },
    {
      "given": "Tadashi",
      "family": "Shiosaki",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Electronics, Faculty of Engineering, Kyoto University, Kyoto 606, Japan"
        }
      ]
    },
    {
      "given": "Akira",
      "family": "Kawabata",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Electronics, Faculty of Engineering, Kyoto University, Kyoto 606, Japan"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020406481270000_r1",
      "doi-asserted-by": "crossref",
      "first-page": "358",
      "DOI": "10.1063/1.1654411",
      "volume": "21",
      "year": "1972",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020406481270000_r2",
      "doi-asserted-by": "crossref",
      "first-page": "176",
      "DOI": "10.1063/1.1654849",
      "volume": "23",
      "year": "1973",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020406481270000_r3",
      "first-page": "138",
      "volume": "QE-11",
      "year": "1975",
      "journal-title": "IEEE J. Quantum Electron."
    },
    {
      "key": "2024020406481270000_r4",
      "doi-asserted-by": "crossref",
      "first-page": "131",
      "DOI": "10.1016/0040-6090(76)90220-0",
      "volume": "38",
      "year": "1976",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020406481270000_r5",
      "doi-asserted-by": "crossref",
      "first-page": "3113",
      "DOI": "10.1063/1.326391",
      "volume": "50",
      "year": "1979",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020406481270000_r6",
      "first-page": "173",
      "volume": "22-3",
      "year": "1983",
      "journal-title": "Jpn. J. Appl. Phys. Suppl."
    },
    {
      "key": "2024020406481270000_r7",
      "doi-asserted-by": "crossref",
      "first-page": "346",
      "DOI": "10.1016/0022-0248(78)90461-X",
      "volume": "45",
      "year": "1978",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "2024020406481270000_r8"
    },
    {
      "key": "2024020406481270000_r9",
      "first-page": "863",
      "volume": "QE-14",
      "year": "1978",
      "journal-title": "IEEE J. Quantum Electron."
    },
    {
      "key": "2024020406481270000_r10",
      "doi-asserted-by": "crossref",
      "first-page": "2555",
      "DOI": "10.1063/1.326262",
      "volume": "50",
      "year": "1979",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020406481270000_r11",
      "doi-asserted-by": "crossref",
      "first-page": "139",
      "DOI": "10.1016/0030-4018(79)90289-X",
      "volume": "31",
      "year": "1979",
      "journal-title": "Opt. Commun."
    },
    {
      "key": "2024020406481270000_r12",
      "doi-asserted-by": "crossref",
      "first-page": "115",
      "DOI": "10.1116/1.1492639",
      "volume": "6",
      "year": "1969",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "2024020406481270000_r13",
      "doi-asserted-by": "crossref",
      "first-page": "490",
      "DOI": "10.1063/1.1655024",
      "volume": "24",
      "year": "1974",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020406481270000_r14",
      "doi-asserted-by": "crossref",
      "first-page": "923",
      "DOI": "10.1364/AO.14.000923",
      "volume": "14",
      "year": "1975",
      "journal-title": "Appl. Opt."
    },
    {
      "key": "2024020406481270000_r15"
    },
    {
      "key": "2024020406481270000_r16",
      "doi-asserted-by": "crossref",
      "first-page": "291",
      "DOI": "10.1063/1.1652820",
      "volume": "14",
      "year": "1969",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020406481270000_r17"
    },
    {
      "key": "2024020406481270000_r18"
    },
    {
      "key": "2024020406481270000_r19",
      "first-page": "856",
      "volume": "MTT-17",
      "year": "1969",
      "journal-title": "IEEE Trans. Microwave Theory Tech."
    },
    {
      "key": "2024020406481270000_r20",
      "doi-asserted-by": "crossref",
      "first-page": "2464",
      "DOI": "10.1063/1.328019",
      "volume": "51",
      "year": "1980",
      "journal-title": "J. Appl. Phys."
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/62/6/2482/18612200/2482_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/62/6/2482/18612200/2482_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        4
      ]
    ],
    "date-time": "2024-02-04T06:48:26Z",
    "timestamp": 1707029306000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/62/6/2482/174621/Low-loss-epitaxial-ZnO-optical-waveguides-on"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1987,
        9,
        15
      ]
    ]
  },
  "references-count": 20,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          1987,
          9,
          15
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.339458",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1987,
        9,
        15
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1987,
        9,
        15
      ]
    ]
  }
}