DOI: 10.1063/1.339260. Study of the interfacial structure between Si (100) and thermally grown SiO2 using a ball-and-spoke model

Study of the interfacial structure between Si (100) and thermally grown SiO2 using a ball-and-spoke model

10.1063/1.339260

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Structural models of the a-SiO2/(100)Si interface have been constructed using plastic balls and spokes to study the atomic scale structure of the thermally grown a-SiO2/(100)Si interface. Various properties of the models such as distortion energy, composition, and interface undulation have been estimated on the basis of the models. The results of the simulation indicate that the energetically favorable interface is not flat but undulated with (111) facets or has a transition region with partially oxidized Si atoms. High-resolution transmission electron microscopy images have also been simulated for the models.

Bibliography

Ohdomari, I., Akatsu, H., Yamakoshi, Y., & Kishimoto, K. (1987). Study of the interfacial structure between Si (100) and thermally grown SiO2 using a ball-and-spoke model. Journal of Applied Physics, 62(9), 3751â3754.

Authors 4

Iwao Ohdomari (first)
Hiroyuki Akatsu (additional)
Yukio Yamakoshi (additional)
Koji Kishimoto (additional)

References 32 Referenced 59

{'key': '2024020407023412500_r1', 'first-page': '504', 'volume': '2', 'year': '1984', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1984)
{'key': '2024020407023412500_r2', 'first-page': '496', 'volume': '2', 'year': '1984', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1984)
{'key': '2024020407023412500_r3'}
10.1016/0039-6028(80)90487-2 / Surf. Sci. (1980)
{'key': '2024020407023412500_r5'}
10.1063/1.95870 / Appl. Phys. Lett. (1985)
{'key': '2024020407023412500_r7', 'first-page': '199', 'volume': '37', 'year': '1985', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1985)
{'key': '2024020407023412500_r8', 'first-page': '301', 'volume': '53', 'year': '1986', 'journal-title': 'Mater. Res. Soc. Symp. Proc.'} / Mater. Res. Soc. Symp. Proc. (1986)
{'key': '2024020407023412500_r9', 'first-page': '346', 'volume': '2', 'year': '1984', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1984)
10.1116/1.572449 / J. Vac. Sci. Technol. A (1984)
{'key': '2024020407023412500_r11'}
10.1147/rd.223.0294 / IBM J. Res. Dev. (1978)
10.1116/1.570218 / J. Vac. Sci. Technol. (1979)
10.1016/0039-6028(80)90578-6 / Surf. Sci. (1980)
10.1063/1.94565 / Appl. Phys. Lett. (1984)
{'key': '2024020407023412500_r16'}
10.1143/JJAP.25.544 / Jpn. J. Appl. Phys. (1986)
10.1063/1.323047 / J. Appl. Phys. (1976)
{'key': '2024020407023412500_r19'}
{'key': '2024020407023412500_r20'}
{'key': '2024020407023412500_r21'}
10.1063/1.326003 / J. Appl. Phys. (1979)
{'key': '2024020407023412500_r23'}
10.1063/1.88345 / Appl. Phys. Lett. (1975)
{'key': '2024020407023412500_r25', 'first-page': '20', 'volume': '41', 'year': '1978', 'journal-title': 'Phys. Rev. Lett.'} / Phys. Rev. Lett. (1978)
10.1063/1.331320 / J. Appl. Phys. (1982)
10.1016/S0022-3093(87)80335-6 / J. Non-Cryst. Solids (1987)
10.1063/1.337563 / J. Appl. Phys. (1986)
10.1103/PhysRev.145.637 / Phys. Rev. (1966)
{'key': '2024020407023412500_r30'}
{'key': '2024020407023412500_r31', 'first-page': '2706', 'volume': '34', 'year': '1986', 'journal-title': 'Phys. Rev. B'} / Phys. Rev. B (1986)
10.1063/1.336908 / J. Appl. Phys. (1986)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:53 a.m.)
Deposited	1 year, 7 months ago (Feb. 4, 2024, 2:02 a.m.)
Indexed	3 months ago (June 6, 2025, 5:08 a.m.)
Issued	37 years, 10 months ago (Nov. 1, 1987)
Published	37 years, 10 months ago (Nov. 1, 1987)
Published Print	37 years, 10 months ago (Nov. 1, 1987)

Funders 0

None

BibTeX

@article{Ohdomari_1987, title={Study of the interfacial structure between Si (100) and thermally grown SiO2 using a ball-and-spoke model}, volume={62}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.339260}, DOI={10.1063/1.339260}, number={9}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Ohdomari, Iwao and Akatsu, Hiroyuki and Yamakoshi, Yukio and Kishimoto, Koji}, year={1987}, month=nov, pages={3751–3754} }

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