DOI: 10.1063/1.337883. Inhomogeneous carbon bonding in hydrogenated amorphous carbon films

Inhomogeneous carbon bonding in hydrogenated amorphous carbon films

10.1063/1.337883

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Hard-carbon films prepared by the rf-plasma decomposition of acetylene have been investigated by high-resolution 13C nuclear magnetic resonance spectroscopy, x-ray photoelectron spectroscopy (XPS), and the H(15Nα,γ)C nuclear resonant reaction. It was found that the ratio of sp2:sp3 bound carbon was 1.6, and that virtually all sp3 carbon atoms are, in fact, bound to one or more hydrogen atoms. Bulk layers contain about 40% hydrogen; however, results of the measurements of the hydrogen concentration, as well as those of XPS, confirm that the composition and properties of these carbon films are a strong function of their distance from the initial growth interface, and are spatially varying over the first 40 nm.

Bibliography

Grill, A., Meyerson, B. S., Patel, V. V., Reimer, J. A., & Petrich, M. A. (1987). Inhomogeneous carbon bonding in hydrogenated amorphous carbon films. Journal of Applied Physics, 61(8), 2874â2877.

Authors 5

A. Grill (first)
B. S. Meyerson (additional)
V. V. Patel (additional)
J. A. Reimer (additional)
M. A. Petrich (additional)

References 18 Referenced 125

10.1016/0040-6090(81)90288-1 / Thin Solid Films (1981)
10.1063/1.332613 / J. Appl. Phys. (1983)
{'key': '2024020406052112000_r3', 'first-page': '305', 'volume': '1', 'year': '1983', 'journal-title': 'J. Vac. Sci. Technol.'} / J. Vac. Sci. Technol. (1983)
10.1116/1.572887 / J. Vac. Sci. Technol. A (1985)
10.1016/0040-6090(84)90202-5 / Thin Solid Films (1984)
10.1016/0040-6090(82)90210-3 / Thin Solid Films (1982)
10.1016/0040-6090(85)90084-7 / Thin Solid Films (1985)
10.1063/1.96027 / Appl. Phys. Lett. (1985)
10.1021/ja00291a012 / Amer. Chem. Soc. (1985)
10.1016/0079-6565(71)80001-8 / Prog. Nucl. Magn. Spec. (1971)
10.1103/PhysRev.111.853 / Phys. Rev. (1958)
10.1063/1.333385 / J. Appl. Phys. (1984)
10.1063/1.328514 / J. Appl. Phys. (1981)
{'key': '2024020406052112000_r14'}
10.1016/0378-5963(82)90167-2 / Appl. Surf. Sci. (1982)
10.1016/0040-6090(83)90163-3 / Thin Solid Films (1983)
10.1116/1.571459 / J. Vac. Sci. Technol. (1982)
10.1016/0378-5963(85)90223-5 / Appl. Surf. Sci. (1985)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 9:05 a.m.)
Deposited	1 year, 7 months ago (Feb. 4, 2024, 1:05 a.m.)
Indexed	1 month ago (Aug. 6, 2025, 8:25 a.m.)
Issued	38 years, 4 months ago (April 15, 1987)
Published	38 years, 4 months ago (April 15, 1987)
Published Print	38 years, 4 months ago (April 15, 1987)

Funders 0

None

BibTeX

@article{Grill_1987, title={Inhomogeneous carbon bonding in hydrogenated amorphous carbon films}, volume={61}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.337883}, DOI={10.1063/1.337883}, number={8}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Grill, A. and Meyerson, B. S. and Patel, V. V. and Reimer, J. A. and Petrich, M. A.}, year={1987}, month=apr, pages={2874–2877} }

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