DOI: 10.1063/1.336493. Some considerations on the electric field induced in insulators by electron bombardment

Some considerations on the electric field induced in insulators by electron bombardment

10.1063/1.336493

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Starting from a simple model of the distributions of charge created in an insulator by bombardment with electrons, the components of the electric field are evaluated by using Maxwell’s equations and image effects. The results are applied to the most common experimental situations: a semi-infinite sample (i) bounded by a vacuum or (ii) covered by a conducting film, and a sample in the form of a film (iii) unsupported or (iv) covering a conducting substrate. The results are compared to some experimental data concerning, for instance, electromigration and electron-stimulated desorption. In surface analysis the decay of the Auger signal from ions of opposite charges and the opposite behavior of ions of the same charge are explained. Similar effects observed in electron-probe microanalysis of glasses are also elucidated. The results concern scanning electron microscopy, transmission electron microscopy, and electron-beam lithography applied to biological objects, polymers, ceramics, minerals, glasses, and electronic devices. With slight modifications, the same model can be applied to cases of irradiation with ions or x rays. The evolution of the trapped charges with time is suggested, and the need to indicate the electric parameters (ε and γ) of the investigated samples is outlined.

Bibliography

Cazaux, J. (1986). Some considerations on the electric field induced in insulators by electron bombardment. Journal of Applied Physics, 59(5), 1418â1430.

Authors 1

Jacques Cazaux (first)

References 39 Referenced 298

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10.1063/1.335247 / J. Appl. Phys. (1985)
{'key': '2024020505110347600_r4'}
{'key': '2024020505110347600_r5'}
10.1016/0378-5963(81)90065-9 / Appl. Surf. Sci. (1981)
10.1088/0022-3719/11/11/011 / J. Phys. C (1978)
10.1016/0022-3093(80)90483-4 / J. Non-Cryst. Solids (1980)
{'key': '2024020505110347600_r9', 'first-page': 'C2', 'volume': '45', 'year': '1984', 'journal-title': 'J. Phys. (Paris) Suppl.'} / J. Phys. (Paris) Suppl. (1984)
10.1002/sia.740020303 / Surf. Interf. Anal. (1980)
{'key': '2024020505110347600_r11', 'first-page': '13', 'volume': '27', 'year': '1979', 'journal-title': 'Expt. Technik Phys.'} / Expt. Technik Phys. (1979)
10.1088/0022-3719/14/14/014 / J. Phys. C (1981)
10.1088/0022-3719/15/27/017 / J. Phys. C (1982)
10.1116/1.571315 / J. Vac. Sci. Technol. (1982)
10.1063/1.331005 / J. Appl. Phys. (1982)
{'key': '2024020505110347600_r16'}
{'key': '2024020505110347600_r17'}
{'key': '2024020505110347600_r18'}
{'key': '2024020505110347600_r19'}
{'key': '2024020505110347600_r20', 'first-page': '41', 'volume': '1', 'year': '1984', 'journal-title': 'Scan Electron Microsc.'} / Scan Electron Microsc. (1984)
10.1063/1.436109 / J. Chem. Phys. (1978)
10.1063/1.436448 / J. Chem. Phys. (1978)
{'key': '2024020505110347600_r22', 'first-page': '1187', 'volume': '3', 'year': '1984', 'journal-title': 'Scan Electron Microsc.'} / Scan Electron Microsc. (1984)
{'key': '2024020505110347600_r23', 'first-page': '87', 'volume': '2', 'year': '1979', 'journal-title': 'Scan Electron Microsc.'} / Scan Electron Microsc. (1979)
10.1002/sia.740010606 / Surf. Interf. Anal. (1979)
{'key': '2024020505110347600_r25', 'first-page': '291', 'volume': '78', 'year': '1983', 'journal-title': 'Radiat. Eff.'} / Radiat. Eff. (1983)
{'key': '2024020505110347600_r26'}
10.1016/0022-3093(82)90205-8 / J. Non-Cryst. Solids (1982)
10.1063/1.1654681 / Appl. Phys. Lett. (1973)
10.1063/1.1708778 / J. Appl. Phys. (1966)
10.3406/bulmi.1980.7429 / Bull. Mineralogie (1980)
10.1063/1.1702680 / J. Appl. Phys. (1963)
10.1063/1.1709908 / J. Appl. Phys. (1967)
10.1051/jphysrad:01955001604030400 / J. Phys. Rad. (1955)
10.1016/0378-5963(85)90167-9 / Appl. Surf. Sci. (1985)
10.1002/pssa.2210430119 / Phys. Status Solidi A (1977)
10.1063/1.1660019 / J. Appl. Phys. (1971)
10.1063/1.321759 / J. Appl. Phys. (1975)
{'key': '2024020505110347600_r38', 'first-page': '24', 'volume': '136', 'year': '1984', 'journal-title': 'J. Microsc.'} / J. Microsc. (1984)

Dates

Type	When
Created	23 years ago (July 26, 2002, 8:53 a.m.)
Deposited	1 year, 6 months ago (Feb. 5, 2024, 12:12 a.m.)
Indexed	2 weeks, 4 days ago (Aug. 5, 2025, 8:43 a.m.)
Issued	39 years, 5 months ago (March 1, 1986)
Published	39 years, 5 months ago (March 1, 1986)
Published Print	39 years, 5 months ago (March 1, 1986)

Funders 0

None

BibTeX

@article{Cazaux_1986, title={Some considerations on the electric field induced in insulators by electron bombardment}, volume={59}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.336493}, DOI={10.1063/1.336493}, number={5}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Cazaux, Jacques}, year={1986}, month=mar, pages={1418–1430} }

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