DOI: 10.1063/1.336098. Direct measurement of the energy distribution of hot electrons in silicon dioxide

Direct measurement of the energy distribution of hot electrons in silicon dioxide

10.1063/1.336098

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The energy distribution of hot electrons in high-field stressed amorphous silicon dioxide (SiO2) films have been measured using a vacuum emission technique. Electrons having average energies ≳2 eV and an energy relaxation length of λ≊32 Å are observed at all fields studied (≳ 2 MV/cm). However, contrary to previous theoretical expectations, the majority of carriers in the distribution remains stable at all fields. The results are in agreement with other recent experiments (electroluminescence and carrier separation) which only measure the average energy of hot electrons in SiO2 and with recent Monte Carlo transport calculations which include scattering by both optical and acoustic phonon modes. Results for varying SiO2 thickness, metal gate thickness, oxide composition, and metal gate composition will be discussed.

Bibliography

Brorson, S. D., DiMaria, D. J., Fischetti, M. V., Pesavento, F. L., Solomon, P. M., & Dong, D. W. (1985). Direct measurement of the energy distribution of hot electrons in silicon dioxide. Journal of Applied Physics, 58(3), 1302â1313.

Authors 6

S. D. Brorson (first)
D. J. DiMaria (additional)
M. V. Fischetti (additional)
F. L. Pesavento (additional)
P. M. Solomon (additional)
D. W. Dong (additional)

References 38 Referenced 111

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Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:53 a.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 11:36 p.m.)
Indexed	2 months, 1 week ago (June 25, 2025, 5:42 p.m.)
Issued	40 years, 1 month ago (Aug. 1, 1985)
Published	40 years, 1 month ago (Aug. 1, 1985)
Published Print	40 years, 1 month ago (Aug. 1, 1985)

Funders 0

None

BibTeX

@article{Brorson_1985, title={Direct measurement of the energy distribution of hot electrons in silicon dioxide}, volume={58}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.336098}, DOI={10.1063/1.336098}, number={3}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Brorson, S. D. and DiMaria, D. J. and Fischetti, M. V. and Pesavento, F. L. and Solomon, P. M. and Dong, D. W.}, year={1985}, month=aug, pages={1302–1313} }

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