DOI: 10.1063/1.335806. Mixing of Al in Si by Ne+ ions

10.1063/1.335806

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Ion-beam mixing has been studied for the case where all components are collisionally similar. In this study a thin Al marker was mixed by implanting 40-keV 22Ne+ into electron-beam-evaporated Si. The mixing was studied with the nuclear resonance broadening technique. It is characterized by a broadening that is proportional to the square root of ion fluence. The data obtained at room temperature, where the negligible solubilities and thermal diffusivities do not contribute to the intermixing of Al and Si, indicate that even in the absence of the long-range transport there is a diffusion mechanism which enhances the mixing with a magnitude some 3–6 times that expected for ballistic mixing. The data is applicable for preparing Al/Si contacts by Al implantation.

Bibliography

Whitlow, H. J., Keinonen, J., & Hautala, M. (1985). Mixing of Al in Si by Ne+ ions. Journal of Applied Physics, 58(8), 3246â3248.

Authors 3

H. J. Whitlow (first)
J. Keinonen (additional)
M. Hautala (additional)

References 28 Referenced 5

10.1016/0168-583X(85)90451-3 / Nucl. Instrum. Methods B (1985)
10.1016/0029-554X(81)90668-6 / Nucl. Instrum. Methods (1981)
10.1016/0040-6090(84)90513-3 / Thin Solid Films (1984)
10.1063/1.94249 / Appl. Phys. Lett. (1983)
10.1063/1.1653799 / Appl. Phys. Lett. (1971)
10.1063/1.1654096 / Appl. Phys. Lett. (1972)
10.1063/1.1662511 / J. Appl. Phys. (1973)
10.1063/1.321530 / J. Appl. Phys. (1975)
{'key': '2024020504490489900_r9', 'first-page': '31', 'volume': '104', 'year': '1984', 'journal-title': 'Thin Solid Films'} / Thin Solid Films (1984)
10.1016/0167-5087(83)90787-1 / Nucl. Instrum. Methods (1983)
10.1016/0167-5087(83)90788-3 / Nucl. Instrum. Methods (1983)
10.1063/1.94546 / Appl. Phys. Lett. (1984)
10.1007/BF00618750 / Appl. Phys. A (1984)
{'key': '2024020504490489900_r13'}
10.1016/0040-6090(75)90116-9 / Thin Solid Films (1975)
{'key': '2024020504490489900_r15'}
10.1007/BF00617770 / Appl. Phys. A (1982)
10.1016/0167-5087(83)91065-7 / Nucl. Instrum. Methods (1983)
10.1016/0375-9474(78)90611-5 / Nucl. Phys. A (1978)
{'key': '2024020504490489900_r19'}
{'key': '2024020504490489900_r20'}
10.1007/BF00934407 / Appl. Phys. (1979)
10.1007/BF00617712 / Appl. Phys. A (1983)
10.1063/1.92675 / Appl. Phys. Lett. (1981)
10.1016/0029-554X(81)90670-4 / Nucl. Instrum. Methods (1981)
{'key': '2024020504490489900_r25', 'first-page': '707', 'volume': '718', 'year': '1985', 'journal-title': 'Nucl. Instrum. Methods B'} / Nucl. Instrum. Methods B (1985)
10.1080/00337577908209138 / Radiat. Eff. (1979)
10.1016/0168-583X(85)90004-7 / Nucl. Instrum. Methods B (1985)

Dates

Type	When
Created	23 years, 1 month ago (July 26, 2002, 8:53 a.m.)
Deposited	1 year, 7 months ago (Feb. 4, 2024, 11:49 p.m.)
Indexed	1 year, 7 months ago (Feb. 5, 2024, 12:10 a.m.)
Issued	39 years, 10 months ago (Oct. 15, 1985)
Published	39 years, 10 months ago (Oct. 15, 1985)
Published Print	39 years, 10 months ago (Oct. 15, 1985)

Funders 0

None

BibTeX

@article{Whitlow_1985, title={Mixing of Al in Si by Ne+ ions}, volume={58}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.335806}, DOI={10.1063/1.335806}, number={8}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Whitlow, H. J. and Keinonen, J. and Hautala, M.}, year={1985}, month=oct, pages={3246–3248} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T05:10:09Z",
    "timestamp": 1707109809437
  },
  "reference-count": 28,
  "publisher": "AIP Publishing",
  "issue": "8",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1985,
        10,
        15
      ]
    ]
  },
  "abstract": "<jats:p>Ion-beam mixing has been studied for the case where all components are collisionally similar. In this study a thin Al marker was mixed by implanting 40-keV\u200922Ne+ into electron-beam-evaporated Si. The mixing was studied with the nuclear resonance broadening technique. It is characterized by a broadening that is proportional to the square root of ion fluence. The data obtained at room temperature, where the negligible solubilities and thermal diffusivities do not contribute to the intermixing of Al and Si, indicate that even in the absence of the long-range transport there is a diffusion mechanism which enhances the mixing with a magnitude some 3\u20136 times that expected for ballistic mixing. The data is applicable for preparing Al/Si contacts by Al implantation.</jats:p>",
  "DOI": "10.1063/1.335806",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T12:53:52Z",
    "timestamp": 1027688032000
  },
  "page": "3246-3248",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 5,
  "title": "Mixing of Al in Si by Ne+ ions",
  "prefix": "10.1063",
  "volume": "58",
  "author": [
    {
      "given": "H. J.",
      "family": "Whitlow",
      "sequence": "first",
      "affiliation": [
        {
          "name": "University of Helsinki, Accelerator Laboratory, H\u00e4meentie 100, SF-00550 Helsinki, Finland"
        }
      ]
    },
    {
      "given": "J.",
      "family": "Keinonen",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of Helsinki, Accelerator Laboratory, H\u00e4meentie 100, SF-00550 Helsinki, Finland"
        }
      ]
    },
    {
      "given": "M.",
      "family": "Hautala",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of Helsinki, Accelerator Laboratory, H\u00e4meentie 100, SF-00550 Helsinki, Finland"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020504490489900_r1",
      "doi-asserted-by": "crossref",
      "first-page": "666",
      "DOI": "10.1016/0168-583X(85)90451-3",
      "volume": "7/8",
      "year": "1985",
      "journal-title": "Nucl. Instrum. Methods B"
    },
    {
      "key": "2024020504490489900_r2",
      "doi-asserted-by": "crossref",
      "first-page": "25",
      "DOI": "10.1016/0029-554X(81)90668-6",
      "volume": "182/183",
      "year": "1981",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "2024020504490489900_r3",
      "doi-asserted-by": "crossref",
      "first-page": "125",
      "DOI": "10.1016/0040-6090(84)90513-3",
      "volume": "115",
      "year": "1984",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020504490489900_r4",
      "doi-asserted-by": "crossref",
      "first-page": "1123",
      "DOI": "10.1063/1.94249",
      "volume": "43",
      "year": "1983",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020504490489900_r5",
      "doi-asserted-by": "crossref",
      "first-page": "524",
      "DOI": "10.1063/1.1653799",
      "volume": "19",
      "year": "1971",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020504490489900_r6",
      "doi-asserted-by": "crossref",
      "first-page": "171",
      "DOI": "10.1063/1.1654096",
      "volume": "20",
      "year": "1972",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020504490489900_r7",
      "doi-asserted-by": "crossref",
      "first-page": "2040",
      "DOI": "10.1063/1.1662511",
      "volume": "44",
      "year": "1973",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020504490489900_r8",
      "doi-asserted-by": "crossref",
      "first-page": "4678",
      "DOI": "10.1063/1.321530",
      "volume": "46",
      "year": "1975",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020504490489900_r9",
      "first-page": "31",
      "volume": "104",
      "year": "1984",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020504490489900_r10",
      "doi-asserted-by": "crossref",
      "first-page": "97",
      "DOI": "10.1016/0167-5087(83)90787-1",
      "volume": "209/210",
      "year": "1983",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "2024020504490489900_r11",
      "doi-asserted-by": "crossref",
      "first-page": "107",
      "DOI": "10.1016/0167-5087(83)90788-3",
      "volume": "209/210",
      "year": "1983",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "2024020504490489900_r12",
      "doi-asserted-by": "crossref",
      "first-page": "45",
      "DOI": "10.1063/1.94546",
      "volume": "44",
      "year": "1984",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020504490489900_r12a",
      "doi-asserted-by": "crossref",
      "first-page": "167",
      "DOI": "10.1007/BF00618750",
      "volume": "33",
      "year": "1984",
      "journal-title": "Appl. Phys. A"
    },
    {
      "key": "2024020504490489900_r13"
    },
    {
      "key": "2024020504490489900_r14",
      "doi-asserted-by": "crossref",
      "first-page": "265",
      "DOI": "10.1016/0040-6090(75)90116-9",
      "volume": "28",
      "year": "1975",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020504490489900_r15"
    },
    {
      "key": "2024020504490489900_r16",
      "doi-asserted-by": "crossref",
      "first-page": "141",
      "DOI": "10.1007/BF00617770",
      "volume": "29",
      "year": "1982",
      "journal-title": "Appl. Phys. A"
    },
    {
      "key": "2024020504490489900_r17",
      "doi-asserted-by": "crossref",
      "first-page": "684",
      "DOI": "10.1016/0167-5087(83)91065-7",
      "volume": "218",
      "year": "1983",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "2024020504490489900_r18",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/0375-9474(78)90611-5",
      "volume": "310",
      "year": "1978",
      "journal-title": "Nucl. Phys. A"
    },
    {
      "key": "2024020504490489900_r19"
    },
    {
      "key": "2024020504490489900_r20"
    },
    {
      "key": "2024020504490489900_r21",
      "doi-asserted-by": "crossref",
      "first-page": "131",
      "DOI": "10.1007/BF00934407",
      "volume": "18",
      "year": "1979",
      "journal-title": "Appl. Phys."
    },
    {
      "key": "2024020504490489900_r22",
      "doi-asserted-by": "crossref",
      "first-page": "43",
      "DOI": "10.1007/BF00617712",
      "volume": "30",
      "year": "1983",
      "journal-title": "Appl. Phys. A"
    },
    {
      "key": "2024020504490489900_r23",
      "doi-asserted-by": "crossref",
      "first-page": "288",
      "DOI": "10.1063/1.92675",
      "volume": "39",
      "year": "1981",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020504490489900_r24",
      "doi-asserted-by": "crossref",
      "first-page": "53",
      "DOI": "10.1016/0029-554X(81)90670-4",
      "volume": "182/183",
      "year": "1981",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "2024020504490489900_r25",
      "first-page": "707",
      "volume": "718",
      "year": "1985",
      "journal-title": "Nucl. Instrum. Methods B"
    },
    {
      "key": "2024020504490489900_r26",
      "doi-asserted-by": "crossref",
      "first-page": "201",
      "DOI": "10.1080/00337577908209138",
      "volume": "42",
      "year": "1979",
      "journal-title": "Radiat. Eff."
    },
    {
      "key": "2024020504490489900_r27",
      "doi-asserted-by": "crossref",
      "first-page": "466",
      "DOI": "10.1016/0168-583X(85)90004-7",
      "volume": "6",
      "year": "1985",
      "journal-title": "Nucl. Instrum. Methods B"
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/58/8/3246/18413287/3246_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/58/8/3246/18413287/3246_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T04:49:19Z",
    "timestamp": 1707108559000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/58/8/3246/287616/Mixing-of-Al-in-Si-by-Ne-ions"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1985,
        10,
        15
      ]
    ]
  },
  "references-count": 28,
  "journal-issue": {
    "issue": "8",
    "published-print": {
      "date-parts": [
        [
          1985,
          10,
          15
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.335806",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1985,
        10,
        15
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1985,
        10,
        15
      ]
    ]
  }
}