DOI: 10.1063/1.334506. Scanning capacitance microscopy

10.1063/1.334506

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Scanning capacitance microscopy is a new mechanically scanned microscopy. In its present configuration, the microscope has a demonstrated capability of detecting variations in surface topography of the order of 0.3 nm over areas of the order of 0.5 μm2. This great sensitivity to height changes is achieved by the placement of a capacitance probe some 20 nm above the sample surface. This paper describes the construction of the microscope and discusses its use in relating surface roughness of plastic parts to mold finish and material property variations.

Bibliography

Matey, J. R., & Blanc, J. (1985). Scanning capacitance microscopy. Journal of Applied Physics, 57(5), 1437â1444.

Authors 2

J. R. Matey (first)
J. Blanc (additional)

References 11 Referenced 216

{'key': '2024020503455836300_r1', 'volume': '39', 'year': '1978', 'journal-title': 'RCA Rev.'} / RCA Rev. (1978)
{'key': '2024020503455836300_r2'}
{'key': '2024020503455836300_r3'}
{'key': '2024020503455836300_r4'}
{'key': '2024020503455836300_r5'}
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{'key': '2024020503455836300_r7', 'first-page': '1327', 'volume': '28', 'year': '1983', 'journal-title': 'Bull. Am. Phys. Soc.'} / Bull. Am. Phys. Soc. (1983)
{'key': '2024020503455836300_r8'}
{'key': '2024020503455836300_r9', 'first-page': '33', 'volume': '39', 'year': '1978', 'journal-title': 'RCA Rev.'} / RCA Rev. (1978)
{'key': '2024020503455836300_r10', 'first-page': '194', 'volume': '43', 'year': '1982', 'journal-title': 'RCA Rev.'} / RCA Rev. (1982)
{'key': '2024020503455836300_r11'}

Dates

Type	When
Created	23 years ago (July 26, 2002, 8:53 a.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 10:46 p.m.)
Indexed	2 months, 1 week ago (June 18, 2025, 9:02 a.m.)
Issued	40 years, 5 months ago (March 1, 1985)
Published	40 years, 5 months ago (March 1, 1985)
Published Print	40 years, 5 months ago (March 1, 1985)

Funders 0

None

BibTeX

@article{Matey_1985, title={Scanning capacitance microscopy}, volume={57}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.334506}, DOI={10.1063/1.334506}, number={5}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Matey, J. R. and Blanc, J.}, year={1985}, month=mar, pages={1437–1444} }

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