DOI: 10.1063/1.332560. Structure and coherence of NbAl multilayer films

Structure and coherence of NbAl multilayer films

10.1063/1.332560

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

NbnAlm multilayer films grown on oxidized Si(100) at room temperature by magnetron sputtering have Nb[110] and A[111] texture. The films have ∼1% coherency strains which decrease with increasing modulation wavelength. The composition modulation is approximately a trapezoidal wave with interfacial regions ∼11 Å thick as a result of grain boundary diffusion.

Bibliography

McWhan, D. B., Gurvitch, M., Rowell, J. M., & Walker, L. R. (1983). Structure and coherence of NbAl multilayer films. Journal of Applied Physics, 54(7), 3886â3891.

Authors 4

D. B. McWhan (first)
M. Gurvitch (additional)
J. M. Rowell (additional)
L. R. Walker (additional)

References 14 Referenced 95

10.1103/PhysRevLett.44.1597 / Phys. Rev. Lett. (1980)
10.1103/PhysRevB.24.6193 / Phys. Rev. B (1981)
{'key': '2024020502095744100_r3'}
{'key': '2024020502095744100_r4', 'first-page': '77', 'volume': '1', 'year': '1983', 'journal-title': 'J. Vac. Soc. Technol. A'} / J. Vac. Soc. Technol. A (1983)
10.1016/0022-5088(62)90059-0 / J. Less Common Metals (1962)
10.1002/zaac.19392420101 / Z. Anorg. Chem. (1939)
10.1063/1.93224 / Appl. Phys. Lett. (1982)
10.1107/S0021889873007995 / J. Appl. Cryst. (1973)
{'key': '2024020502095744100_r9'}
{'key': '2024020502095744100_r10', 'first-page': '293', 'volume': '22', 'year': '1977', 'journal-title': 'Bull. Am. Phys. Soc.'} / Bull. Am. Phys. Soc. (1977)
10.1063/1.327310 / J. Appl. Phys. (1980)
10.1364/AO.20.003027 / Appl. Opt. (1981)
10.1103/PhysRevB.25.6739 / Phys. Rev. B (1982)
10.1088/0305-4608/11/9/001 / J. Phys. F (1981)

Dates

Type	When
Created	22 years, 6 months ago (Feb. 14, 2003, 1:32 p.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 9:10 p.m.)
Indexed	2 months, 1 week ago (June 16, 2025, 8:07 a.m.)
Issued	42 years, 1 month ago (July 1, 1983)
Published	42 years, 1 month ago (July 1, 1983)
Published Print	42 years, 1 month ago (July 1, 1983)

Funders 0

None

BibTeX

@article{McWhan_1983, title={Structure and coherence of NbAl multilayer films}, volume={54}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.332560}, DOI={10.1063/1.332560}, number={7}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={McWhan, D. B. and Gurvitch, M. and Rowell, J. M. and Walker, L. R.}, year={1983}, month=jul, pages={3886–3891} }

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