DOI: 10.1063/1.332411. Rod-like defects in oxygen-rich Czochralski grown silicon

Rod-like defects in oxygen-rich Czochralski grown silicon

10.1063/1.332411

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Rod-like defects in annealed oxygen rich silicon crystals grown by the Czochralski method were investigated by means of transmission electron microscopy. The rod-like defect has an apparent Burgers vector along 〈100〉 and gives a dipole-like contrast. The rod defect plane is 〈100〉 and its character is found to be extrinsic. The clearly resolved dipoles associated with the rod-like defect consist of perfect dislocations and are interstitial in character. The rod-like defects are tentatively attributed to some form of SiOx precipitate.

Bibliography

Yamamoto, N., Petroff, P. M., & Patel, J. R. (1983). Rod-like defects in oxygen-rich Czochralski grown silicon. Journal of Applied Physics, 54(6), 3475â3478.

Authors 3

N. Yamamoto (first)
P. M. Petroff (additional)
J. R. Patel (additional)

References 10 Referenced 17

10.1002/pssa.2210270125 / Phys. Status Solidi A (1975)
10.1016/0022-0248(80)90304-8 / J. Cryst. Growth (1980)
10.1063/1.323241 / J. Appl. Phys. (1976)
{'key': '2024020502061691800_r4'}
{'key': '2024020502061691800_r5', 'first-page': '754', 'volume': '20', 'year': '1980', 'journal-title': 'J. Electrochem. Soc.'} / J. Electrochem. Soc. (1980)
10.1080/14786437108216394 / Philos. Mag. (1971)
{'key': '2024020502061691800_r7'}
10.1080/00337577208231212 / Radiat. Eff. (1972)
{'key': '2024020502061691800_r9', 'first-page': '39', 'volume': '7', 'year': '1977', 'journal-title': 'Cryst. Lattice Def.'} / Cryst. Lattice Def. (1977)
{'key': '2024020502061691800_r10'}

Dates

Type	When
Created	22 years, 6 months ago (Feb. 14, 2003, 1:32 p.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 9:06 p.m.)
Indexed	1 year, 6 months ago (Feb. 5, 2024, 12:27 a.m.)
Issued	42 years, 2 months ago (June 1, 1983)
Published	42 years, 2 months ago (June 1, 1983)
Published Print	42 years, 2 months ago (June 1, 1983)

Funders 0

None

BibTeX

@article{Yamamoto_1983, title={Rod-like defects in oxygen-rich Czochralski grown silicon}, volume={54}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.332411}, DOI={10.1063/1.332411}, number={6}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Yamamoto, N. and Petroff, P. M. and Patel, J. R.}, year={1983}, month=jun, pages={3475–3478} }

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