Abstract
Deep impurity levels due to ion-implanted tellurium in n–silicon are studied. Two donor levels at Ec−0.13 and Ec−0.56 eV are obtained using deep level transient spectroscopy. Thermal electron capture cross sections for both levels are too large to be measured. Electron photoionization cross section spectrum confirms the Ec−0.56 level and also reveals an excited state 0.45 eV above the ground state.
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Dates
Type | When |
---|---|
Created | 22 years, 6 months ago (Feb. 14, 2003, 1:32 p.m.) |
Deposited | 1 year, 6 months ago (Feb. 4, 2024, 9:22 p.m.) |
Indexed | 1 year, 6 months ago (Feb. 4, 2024, 10:55 p.m.) |
Issued | 41 years, 9 months ago (Nov. 1, 1983) |
Published | 41 years, 9 months ago (Nov. 1, 1983) |
Published Print | 41 years, 9 months ago (Nov. 1, 1983) |
@article{Kalyanaraman_1983, title={Deep levels related to ion-implanted tellurium in silicon}, volume={54}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.331919}, DOI={10.1063/1.331919}, number={11}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Kalyanaraman, V. and Mohan Chandra, M. and Kumar, Vikram}, year={1983}, month=nov, pages={6417–6420} }