Abstract
An elastic recoil detection technique has been developed to depth profile light isotopes (A≲35) in low-atomic-mass solids (A≲16). It utilizes the maximum-scattering-angle property rather than an absorber to reduce background, with resultant depth precision of about ±2 μg/cm2 (100 Å). The sensitivity is ?5×1016 atoms/cm2 for isotopes lighter than the substrate and ?1015 atoms/cm2 for heavier ones.
References
8
Referenced
17
10.1021/ba-1976-0158.ch011
/ Adv. Chem. (1976){'key': '2024020422381378900_r2'}
10.1063/1.322288
/ J. Appl. Phys. (1976)10.1021/ba-1976-0158.ch013
/ Adv. Chem. (1976){'key': '2024020422381378900_r4'}
{'key': '2024020422381378900_r5'}
10.1063/1.90654
/ Appl. Phys. Lett. (1979)10.1088/0034-4885/18/1/301
/ Rep. Prog. Phys. (1955)
Dates
Type | When |
---|---|
Created | 22 years, 6 months ago (Feb. 14, 2003, 5:37 p.m.) |
Deposited | 1 year, 6 months ago (Feb. 4, 2024, 5:38 p.m.) |
Indexed | 1 year, 6 months ago (Feb. 4, 2024, 6:10 p.m.) |
Issued | 45 years, 6 months ago (Feb. 1, 1980) |
Published | 45 years, 6 months ago (Feb. 1, 1980) |
Published Print | 45 years, 6 months ago (Feb. 1, 1980) |
@article{Ross_1980, title={High precision depth profiling of light isotopes in low-atomic-mass solids}, volume={51}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.327703}, DOI={10.1063/1.327703}, number={2}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Ross, G. and Terreault, B.}, year={1980}, month=feb, pages={1259–1261} }