DOI: 10.1063/1.327687. Computer simulation of the backscattering and implantation of hydrogen and helium

Computer simulation of the backscattering and implantation of hydrogen and helium

10.1063/1.327687

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The backscattering from and the implantation of 0.5–10-keV hydrogen and helium in Au is investigated with the MARLOWE and TRIM computer codes. The following are found in this paper: (1) The results of the MARLOWE and the much faster TRIM codes are in satisfactory agreement. (2) The influence of potential parameters and energy loss models (LSS and Oen-Robinson) is mainly on the heights and to less extent on the shapes of the energy distributions of backscattered particles. (3) The experimental data from the preceding paper favor the use of a potential for the calculation, which is weaker than the Molière potential. This can be simulated by using a screening length smaller than the Firsov value.

Authors 3

W. Eckstein (first)
H. Verbeek (additional)
J. P. Biersack (additional)

References 17 Referenced 39

{'key': '2024020422380290200_r1'}
10.1007/BF00885125 / Appl. Phys. (1978)
10.1016/0022-3115(78)90174-5 / J. Nucl. Mater. (1978)
10.1016/0022-3115(78)90221-0 / J. Nucl. Mater. (1978)
{'key': '2024020422380290200_r5'}
{'key': '2024020422380290200_r6', 'first-page': 'xxxx', 'volume': '51', 'year': '1980', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. (1980)
10.1103/PhysRevB.9.5008 / Phys. Rev. B (1974)
{'key': '2024020422380290200_r8'}
10.1103/PhysRev.124.128 / Phys. Rev. (1961)
10.1016/0029-554X(76)90806-5 / Nucl. Instrum. Methods (1976)
10.1103/PhysRevB.15.2458 / Phys. Rev. B (1977)
10.1016/0029-554X(76)90807-7 / Nucl. Instrum. Methods (1976)
{'key': '2024020422380290200_r13'}
{'key': '2024020422380290200_r14', 'first-page': '243', 'volume': '14', 'year': '1976', 'journal-title': 'Verhandl. DPG'} / Verhandl. DPG (1976)
{'key': '2024020422380290200_r14a'}
{'key': '2024020422380290200_r15'}
10.1016/0022-3115(76)90328-7 / J. Nucl. Mater. (1976)

Dates

Type	When
Created	22 years, 6 months ago (Feb. 14, 2003, 5:37 p.m.)
Deposited	1 year, 7 months ago (Feb. 4, 2024, 5:38 p.m.)
Indexed	2 months, 3 weeks ago (June 15, 2025, 7:21 a.m.)
Issued	45 years, 7 months ago (Feb. 1, 1980)
Published	45 years, 7 months ago (Feb. 1, 1980)
Published Print	45 years, 7 months ago (Feb. 1, 1980)

Funders 0

None

BibTeX

@article{Eckstein_1980, title={Computer simulation of the backscattering and implantation of hydrogen and helium}, volume={51}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.327687}, DOI={10.1063/1.327687}, number={2}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Eckstein, W. and Verbeek, H. and Biersack, J. P.}, year={1980}, month=feb, pages={1194–1200} }

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