DOI: 10.1063/1.325870. Young’s modulus measurements of thin films using micromechanics

Young’s modulus measurements of thin films using micromechanics

10.1063/1.325870

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Electrostatically deflectable cantilever beams (1000–9000 Å thick, 120–8.3 μm long) have been fabricated from a number of thin insulating films prepared by a variety of deposition methods. Measurements of the transverse mechanical resonant frequencies of these beams have been used to calculate Young’s modulus of the insulating thin films. This new technique is relatively simple and accurate and is applicable to a wide range of materials and deposition procedures.

Bibliography

Petersen, K. E., & Guarnieri, C. R. (1979). Youngâs modulus measurements of thin films using micromechanics. Journal of Applied Physics, 50(11), 6761â6766.

Authors 2

Kurt E. Petersen (first)
C. R. Guarnieri (additional)

References 25 Referenced 257

10.1063/1.1735751 / J. Appl. Phys. (1960)
10.1063/1.1713735 / J. Appl. Phys. (1964)
10.1063/1.323749 / J. Appl. Phys. (1977)
10.1063/1.1708831 / J. Appl. Phys. (1966)
10.1103/PhysRev.100.1657 / Phys. Rev. (1955)
{'key': '2024020422020056100_r6', 'first-page': '1241', 'volume': 'ED-25', 'year': '1978', 'journal-title': 'IEEE Trans. Electron Devices'} / IEEE Trans. Electron Devices (1978)
{'key': '2024020422020056100_r7'}
10.1149/1.2426793 / J. Electrochem. Soc. (1967)
10.1149/1.2408064 / J. Electrochem. Soc. (1971)
{'key': '2024020422020056100_r10', 'first-page': '122', 'volume': 'ED-19', 'year': '1972', 'journal-title': 'IEEE Trans. Electron Devices'} / IEEE Trans. Electron Devices (1972)
{'key': '2024020422020056100_r11'}
{'key': '2024020422020056100_r12'}
10.1126/science.161.3848.1320 / Science (1968)
{'key': '2024020422020056100_r14'}
{'key': '2024020422020056100_r15'}
10.1109/TEI.1970.299088 / IEEE Trans. Electron. Insul. (1970)
{'key': '2024020422020056100_r17'}
{'key': '2024020422020056100_r18'}
{'key': '2024020422020056100_r19'}
{'key': '2024020422020056100_r20', 'first-page': '117', 'volume': 'ED-14', 'year': '1967', 'journal-title': 'IEEE Trans. Electron Devices'} / IEEE Trans. Electron Devices (1967)
{'key': '2024020422020056100_r21', 'first-page': '741', 'volume': '32', 'year': '1960', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. (1960)
10.1364/AO.16.001453 / Appl. Opt. (1977)
10.1063/1.325662 / J. Appl. Phys. (1979)
10.1147/rd.114.0461 / IBM J. Res. Dev. (1967)
{'key': '2024020422020056100_r25'}

Dates

Type	When
Created	22 years, 6 months ago (Feb. 14, 2003, 5:07 p.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 5:04 p.m.)
Indexed	3 weeks, 2 days ago (Aug. 5, 2025, 8:32 a.m.)
Issued	45 years, 9 months ago (Nov. 1, 1979)
Published	45 years, 9 months ago (Nov. 1, 1979)
Published Print	45 years, 9 months ago (Nov. 1, 1979)

Funders 0

None

BibTeX

@article{Petersen_1979, title={Young’s modulus measurements of thin films using micromechanics}, volume={50}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.325870}, DOI={10.1063/1.325870}, number={11}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Petersen, Kurt E. and Guarnieri, C. R.}, year={1979}, month=nov, pages={6761–6766} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        5
      ]
    ],
    "date-time": "2025-08-05T12:32:39Z",
    "timestamp": 1754397159366
  },
  "reference-count": 25,
  "publisher": "AIP Publishing",
  "issue": "11",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1979,
        11,
        1
      ]
    ]
  },
  "abstract": "<jats:p>Electrostatically deflectable cantilever beams (1000\u20139000 \u00c5 thick, 120\u20138.3 \u03bcm long) have been fabricated from a number of thin insulating films prepared by a variety of deposition methods. Measurements of the transverse mechanical resonant frequencies of these beams have been used to calculate Young\u2019s modulus of the insulating thin films. This new technique is relatively simple and accurate and is applicable to a wide range of materials and deposition procedures.</jats:p>",
  "DOI": "10.1063/1.325870",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        2,
        14
      ]
    ],
    "date-time": "2003-02-14T22:07:47Z",
    "timestamp": 1045260467000
  },
  "page": "6761-6766",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 257,
  "title": "Young\u2019s modulus measurements of thin films using micromechanics",
  "prefix": "10.1063",
  "volume": "50",
  "author": [
    {
      "given": "Kurt E.",
      "family": "Petersen",
      "sequence": "first",
      "affiliation": [
        {
          "name": "IBM Research Laboratory, San Jose, California 95193"
        }
      ]
    },
    {
      "given": "C. R.",
      "family": "Guarnieri",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "IBM Research Laboratory, San Jose, California 95193"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020422020056100_r1",
      "doi-asserted-by": "crossref",
      "first-page": "1096",
      "DOI": "10.1063/1.1735751",
      "volume": "31",
      "year": "1960",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020422020056100_r2",
      "doi-asserted-by": "crossref",
      "first-page": "1756",
      "DOI": "10.1063/1.1713735",
      "volume": "35",
      "year": "1964",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020422020056100_r3",
      "doi-asserted-by": "crossref",
      "first-page": "876",
      "DOI": "10.1063/1.323749",
      "volume": "48",
      "year": "1977",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020422020056100_r4",
      "doi-asserted-by": "crossref",
      "first-page": "2429",
      "DOI": "10.1063/1.1708831",
      "volume": "37",
      "year": "1966",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020422020056100_r5",
      "doi-asserted-by": "crossref",
      "first-page": "1657",
      "DOI": "10.1103/PhysRev.100.1657",
      "volume": "100",
      "year": "1955",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020422020056100_r6",
      "first-page": "1241",
      "volume": "ED-25",
      "year": "1978",
      "journal-title": "IEEE Trans. Electron Devices"
    },
    {
      "key": "2024020422020056100_r7"
    },
    {
      "key": "2024020422020056100_r8",
      "doi-asserted-by": "crossref",
      "first-page": "965",
      "DOI": "10.1149/1.2426793",
      "volume": "114",
      "year": "1967",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020422020056100_r9",
      "doi-asserted-by": "crossref",
      "first-page": "401",
      "DOI": "10.1149/1.2408064",
      "volume": "118",
      "year": "1971",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020422020056100_r10",
      "first-page": "122",
      "volume": "ED-19",
      "year": "1972",
      "journal-title": "IEEE Trans. Electron Devices"
    },
    {
      "key": "2024020422020056100_r11"
    },
    {
      "key": "2024020422020056100_r12"
    },
    {
      "key": "2024020422020056100_r13",
      "doi-asserted-by": "crossref",
      "first-page": "1320",
      "DOI": "10.1126/science.161.3848.1320",
      "volume": "161",
      "year": "1968",
      "journal-title": "Science"
    },
    {
      "key": "2024020422020056100_r14"
    },
    {
      "key": "2024020422020056100_r15"
    },
    {
      "key": "2024020422020056100_r16",
      "doi-asserted-by": "crossref",
      "first-page": "10",
      "DOI": "10.1109/TEI.1970.299088",
      "volume": "EI-5",
      "year": "1970",
      "journal-title": "IEEE Trans. Electron. Insul."
    },
    {
      "key": "2024020422020056100_r17"
    },
    {
      "key": "2024020422020056100_r18"
    },
    {
      "key": "2024020422020056100_r19"
    },
    {
      "key": "2024020422020056100_r20",
      "first-page": "117",
      "volume": "ED-14",
      "year": "1967",
      "journal-title": "IEEE Trans. Electron Devices"
    },
    {
      "key": "2024020422020056100_r21",
      "first-page": "741",
      "volume": "32",
      "year": "1960",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020422020056100_r22",
      "doi-asserted-by": "crossref",
      "first-page": "1453",
      "DOI": "10.1364/AO.16.001453",
      "volume": "16",
      "year": "1977",
      "journal-title": "Appl. Opt."
    },
    {
      "key": "2024020422020056100_r23",
      "doi-asserted-by": "crossref",
      "first-page": "317",
      "DOI": "10.1063/1.325662",
      "volume": "50",
      "year": "1979",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2024020422020056100_r24",
      "doi-asserted-by": "crossref",
      "first-page": "461",
      "DOI": "10.1147/rd.114.0461",
      "volume": "11",
      "year": "1967",
      "journal-title": "IBM J. Res. Dev."
    },
    {
      "key": "2024020422020056100_r25"
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/50/11/6761/18385284/6761_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/50/11/6761/18385284/6761_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        4
      ]
    ],
    "date-time": "2024-02-04T22:04:03Z",
    "timestamp": 1707084243000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/50/11/6761/291005/Young-s-modulus-measurements-of-thin-films-using"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1979,
        11,
        1
      ]
    ]
  },
  "references-count": 25,
  "journal-issue": {
    "issue": "11",
    "published-print": {
      "date-parts": [
        [
          1979,
          11,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.325870",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1979,
        11
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1979,
        11,
        1
      ]
    ]
  }
}