DOI: 10.1063/1.324522. Sputtering yields of boron bombarded by light ions

Sputtering yields of boron bombarded by light ions

10.1063/1.324522

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Boron films have been bombarded by He+ and H+ ions in the medium keV energy range at room temperature. The sputtering yields have been measured for doses of 1017–1018 ions/cm2 using a low-energy nuclear-reaction method, 11B(p,α) αα, near the 163-keV resonance, and distinguished from the erosion induced by blistering and flaking. No significant differences are found between experimental values and theoretical predictions, in contrast to the case of heavy targets bombarded by light ions.

Bibliography

Miyagawa, S., Ato, Y., & Moriya, Y. (1978). Sputtering yields of boron bombarded by light ions. Journal of Applied Physics, 49(12), 6194â6196.

Authors 3

S. Miyagawa (first)
Y. Ato (additional)
Y. Moriya (additional)

References 15 Referenced 3

{'key': '2024020421110978100_r1'}
10.13182/NT76-A31593 / Nucl. Technol. (1976)
10.1063/1.323538 / J. Appl. Phys. (1977)
10.1063/1.1659854 / J. Appl. Phys. (1971)
10.1080/00337577308232221 / Radiat. Eff. (1973)
10.1103/PhysRevLett.36.439 / Phys. Rev. Lett. (1976)
10.1063/1.88877 / Appl. Phys. Lett. (1976)
10.1016/0022-3115(76)90147-1 / J. Nucl. Mater. (1976)
10.1103/PhysRev.124.814 / Phys. Rev. (1961)
{'key': '2024020421110978100_r10'}
10.1080/00337577308234728 / Radiat. Eff. (1973)
{'key': '2024020421110978100_r12'}
10.1103/PhysRev.184.383 / Phys. Rev. (1969)
10.1080/00337577308232208 / Radiat. Eff. (1973)
10.1063/1.1728843 / J. Appl. Phys. (1962)

Dates

Type	When
Created	22 years, 6 months ago (Feb. 14, 2003, 4:46 p.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 4:11 p.m.)
Indexed	1 year, 6 months ago (Feb. 4, 2024, 4:40 p.m.)
Issued	46 years, 8 months ago (Dec. 1, 1978)
Published	46 years, 8 months ago (Dec. 1, 1978)
Published Print	46 years, 8 months ago (Dec. 1, 1978)

Funders 0

None

BibTeX

@article{Miyagawa_1978, title={Sputtering yields of boron bombarded by light ions}, volume={49}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.324522}, DOI={10.1063/1.324522}, number={12}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Miyagawa, S. and Ato, Y. and Moriya, Y.}, year={1978}, month=dec, pages={6194–6196} }

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