DOI: 10.1063/1.323077. Principles and applications of elastic scattering with high-energy protons and heavy ions for quantitative microanalysis of metal surfaces, thin layers, and sandwich structures

Principles and applications of elastic scattering with high-energy protons and heavy ions for quantitative microanalysis of metal surfaces, thin layers, and sandwich structures

10.1063/1.323077

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

The elastic non-Coulomb and Coulomb scattering of high-energy ions is proposed in useful combination of protons with 4–6 MeV and heavy ions (16O, 12,13C) with 15–35 MeV as effective quantitative and nondestructive spectroscopy of metal surfaces. This method provides analyzing depths of 1–50 μ, high mass or depth resolutions of 100–1000 Å, and selective high sensitivity for hydrogen and light elements up to Si. Successful application is demonstrated by examples measuring superconductors and metals of group V and binary A-15 compounds. The materials of interest for superconducting cavities, tunneling elements, and high field superconductivity like Nb3Sn have been investigated concerning the problems of oxide layers, composition and contamination, thermal treatment, and interfaces.

Bibliography

MÃ¼ller, P., & Ischenko, G. (1976). Principles and applications of elastic scattering with high-energy protons and heavy ions for quantitative microanalysis of metal surfaces, thin layers, and sandwich structures. Journal of Applied Physics, 47(7), 2811â2820.

Authors 2

P. Müller (first)
G. Ischenko (additional)

References 34 Referenced 22

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{'key': '2024020419171621000_r11', 'first-page': '353', 'volume': '6', 'year': '1969', 'journal-title': 'Nucl. Data A'} / Nucl. Data A (1969)
{'key': '2024020419171621000_r11a', 'first-page': '199', 'volume': '8', 'year': '1970', 'journal-title': 'Nucl. Data, Sect. A'} / Nucl. Data, Sect. A (1970)
{'key': '2024020419171621000_r11b', 'first-page': '469', 'volume': '9', 'year': '1971', 'journal-title': 'Nucl. Data, Sect. A'} / Nucl. Data, Sect. A (1971)
{'key': '2024020419171621000_r12'}
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{'key': '2024020419171621000_r24'}
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{'key': '2024020419171621000_r28'}

Dates

Type	When
Created	22 years, 6 months ago (Feb. 14, 2003, 4:11 p.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 2:17 p.m.)
Indexed	1 year, 6 months ago (Feb. 4, 2024, 2:40 p.m.)
Issued	49 years, 1 month ago (July 1, 1976)
Published	49 years, 1 month ago (July 1, 1976)
Published Print	49 years, 1 month ago (July 1, 1976)

Funders 0

None

BibTeX

@article{M_ller_1976, title={Principles and applications of elastic scattering with high-energy protons and heavy ions for quantitative microanalysis of metal surfaces, thin layers, and sandwich structures}, volume={47}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.323077}, DOI={10.1063/1.323077}, number={7}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Müller, P. and Ischenko, G.}, year={1976}, month=jul, pages={2811–2820} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        4
      ]
    ],
    "date-time": "2024-02-04T19:40:18Z",
    "timestamp": 1707075618891
  },
  "reference-count": 34,
  "publisher": "AIP Publishing",
  "issue": "7",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1976,
        7,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The elastic non-Coulomb and Coulomb scattering of high-energy ions is proposed in useful combination of protons with 4\u20136 MeV and heavy ions (16O, 12,13C) with 15\u201335 MeV as effective quantitative and nondestructive spectroscopy of metal surfaces. This method provides analyzing depths of 1\u201350 \u03bc, high mass or depth resolutions of 100\u20131000 \u00c5, and selective high sensitivity for hydrogen and light elements up to Si. Successful application is demonstrated by examples measuring superconductors and metals of group V and binary A-15 compounds. The materials of interest for superconducting cavities, tunneling elements, and high field superconductivity like Nb3Sn have been investigated concerning the problems of oxide layers, composition and contamination, thermal treatment, and interfaces.</jats:p>",
  "DOI": "10.1063/1.323077",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        2,
        14
      ]
    ],
    "date-time": "2003-02-14T21:11:22Z",
    "timestamp": 1045257082000
  },
  "page": "2811-2820",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 22,
  "title": "Principles and applications of elastic scattering with high-energy protons and heavy ions for quantitative microanalysis of metal surfaces, thin layers, and sandwich structures",
  "prefix": "10.1063",
  "volume": "47",
  "author": [
    {
      "given": "P.",
      "family": "M\u00fcller",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Physikalisches Institut der Universit\u00e4t Erlangen\u2212N\u00fcrnberg, 8520 Erlangen, West Germany"
        }
      ]
    },
    {
      "given": "G.",
      "family": "Ischenko",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Physikalisches Institut der Universit\u00e4t Erlangen\u2212N\u00fcrnberg, 8520 Erlangen, West Germany"
        }
      ]
    }
  ],
  "member": "317",
  "reference": [
    {
      "key": "2024020419171621000_r1",
      "doi-asserted-by": "crossref",
      "first-page": "1441",
      "DOI": "10.1103/PhysRev.115.1441",
      "volume": "115",
      "year": "1959",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020419171621000_r2",
      "doi-asserted-by": "crossref",
      "first-page": "177",
      "DOI": "10.1016/0029-554X(59)90180-6",
      "volume": "5",
      "year": "1959",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "2024020419171621000_r3",
      "doi-asserted-by": "crossref",
      "first-page": "1707",
      "DOI": "10.1016/0022-3697(62)90208-1",
      "volume": "23",
      "year": "1962",
      "journal-title": "J. Phys. Chem. Solids"
    },
    {
      "key": "2024020419171621000_r4",
      "doi-asserted-by": "crossref",
      "first-page": "481",
      "DOI": "10.1016/0029-554X(71)90100-5",
      "volume": "92",
      "year": "1971",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "2024020419171621000_r5",
      "doi-asserted-by": "crossref",
      "first-page": "841",
      "DOI": "10.1126/science.177.4052.841",
      "volume": "177",
      "year": "1972",
      "journal-title": "Science"
    },
    {
      "key": "2024020419171621000_r6",
      "doi-asserted-by": "crossref",
      "first-page": "263",
      "DOI": "10.1016/0039-6028(70)90081-6",
      "volume": "22",
      "year": "1970",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2024020419171621000_r7",
      "doi-asserted-by": "crossref",
      "first-page": "157",
      "DOI": "10.1016/0040-6090(73)90032-1",
      "volume": "19",
      "year": "1973",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020419171621000_r8",
      "doi-asserted-by": "crossref",
      "first-page": "189",
      "DOI": "10.1007/BF01669879",
      "volume": "268",
      "year": "1974",
      "journal-title": "Z. Phys."
    },
    {
      "key": "2024020419171621000_r9",
      "doi-asserted-by": "crossref",
      "first-page": "49",
      "DOI": "10.1016/0375-9601(75)90341-2",
      "volume": "53",
      "year": "1975",
      "journal-title": "Phys. Lett. A"
    },
    {
      "key": "2024020419171621000_r10",
      "doi-asserted-by": "crossref",
      "first-page": "315",
      "DOI": "10.1016/0375-9601(75)90486-7",
      "volume": "55",
      "year": "1975",
      "journal-title": "Phys. Lett. A"
    },
    {
      "key": "2024020419171621000_r11",
      "first-page": "353",
      "volume": "6",
      "year": "1969",
      "journal-title": "Nucl. Data A"
    },
    {
      "key": "2024020419171621000_r11a",
      "first-page": "199",
      "volume": "8",
      "year": "1970",
      "journal-title": "Nucl. Data, Sect. A"
    },
    {
      "key": "2024020419171621000_r11b",
      "first-page": "469",
      "volume": "9",
      "year": "1971",
      "journal-title": "Nucl. Data, Sect. A"
    },
    {
      "key": "2024020419171621000_r12"
    },
    {
      "key": "2024020419171621000_r13"
    },
    {
      "key": "2024020419171621000_r13a",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/0040-6090(73)90020-5",
      "volume": "19",
      "year": "1973",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020419171621000_r14",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/0040-6090(73)90002-3",
      "volume": "17",
      "year": "1973",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2024020419171621000_r15",
      "first-page": "119",
      "volume": "86",
      "year": "1965",
      "journal-title": "Nucl. Phys. A"
    },
    {
      "key": "2024020419171621000_r16",
      "first-page": "241",
      "volume": "45",
      "year": "1973",
      "journal-title": "Phys. Lett. A"
    },
    {
      "key": "2024020419171621000_r16a",
      "first-page": "104",
      "volume": "NS-20",
      "year": "1973",
      "journal-title": "IEEE Trans. Nucl. Sci."
    },
    {
      "key": "2024020419171621000_r16b",
      "doi-asserted-by": "crossref",
      "first-page": "144",
      "DOI": "10.1063/1.1655128",
      "volume": "24",
      "year": "1974",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2024020419171621000_r16c",
      "doi-asserted-by": "crossref",
      "first-page": "301",
      "DOI": "10.1016/0029-554X(75)90012-9",
      "volume": "123",
      "year": "1975",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "2024020419171621000_r17",
      "first-page": "439",
      "volume": "34",
      "year": "1971",
      "journal-title": "Phys. Lett. A"
    },
    {
      "key": "2024020419171621000_r18",
      "first-page": "530",
      "volume": "14",
      "year": "1972",
      "journal-title": "IBM J. Res. Dev."
    },
    {
      "key": "2024020419171621000_r19"
    },
    {
      "key": "2024020419171621000_r20",
      "first-page": "819",
      "volume": "61",
      "year": "1970",
      "journal-title": "Z. Metallk."
    },
    {
      "key": "2024020419171621000_r21",
      "first-page": "432",
      "volume": "55",
      "year": "1964",
      "journal-title": "Z. Metallk."
    },
    {
      "key": "2024020419171621000_r22",
      "doi-asserted-by": "crossref",
      "first-page": "2143",
      "DOI": "10.1103/PhysRev.126.2143",
      "volume": "126",
      "year": "1962",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2024020419171621000_r23"
    },
    {
      "key": "2024020419171621000_r24"
    },
    {
      "key": "2024020419171621000_r25",
      "doi-asserted-by": "crossref",
      "first-page": "1241",
      "DOI": "10.1149/1.2403670",
      "volume": "120",
      "year": "1973",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "2024020419171621000_r26",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1080/00337577208230470",
      "volume": "14",
      "year": "1972",
      "journal-title": "Radiat. Eff."
    },
    {
      "key": "2024020419171621000_r27",
      "doi-asserted-by": "crossref",
      "first-page": "1569",
      "DOI": "10.1103/PhysRevLett.33.1569",
      "volume": "33",
      "year": "1974",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2024020419171621000_r28"
    }
  ],
  "container-title": "Journal of Applied Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/47/7/2811/18373938/2811_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/jap/article-pdf/47/7/2811/18373938/2811_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        2,
        4
      ]
    ],
    "date-time": "2024-02-04T19:17:32Z",
    "timestamp": 1707074252000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jap/article/47/7/2811/171526/Principles-and-applications-of-elastic-scattering"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1976,
        7,
        1
      ]
    ]
  },
  "references-count": 34,
  "journal-issue": {
    "issue": "7",
    "published-print": {
      "date-parts": [
        [
          1976,
          7,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.323077",
  "relation": {},
  "ISSN": [
    "0021-8979",
    "1089-7550"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1976,
        7
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1976,
        7,
        1
      ]
    ]
  }
}