DOI: 10.1063/1.322355. dc electrical conduction in thin Ta2O5 films. II. Highly imperfect films

dc electrical conduction in thin Ta2O5 films. II. Highly imperfect films

10.1063/1.322355

Crossref journal-article

AIP Publishing

Journal of Applied Physics (317)

Abstract

Experimental results on the dc conduction characteristics of highly imperfect Ta2O5 films are presented. Two regions with distinct conduction mechanisms have been identified. In the high-field region the conduction mechanism is bulk limited. In the low-voltage region the conduction mechanism is electrode limited and obeys a modified field-emission equation. Quantitative comparison between theory and experiment is possible. As a result, the nature of the Ta2O5-metal interface is identified. Based on reasonable estimates of the donor density and the effective mass of conduction electrons, the energy diagram of Ta2O5 can be deduced. There is also some experimental evidence which appears to be contradictory to the present interpretation. Plausible explanations for these discrepancies are discussed.

Bibliography

Young, P. L. (1976). dc electrical conduction in thin Ta2O5 films. II. Highly imperfect films. Journal of Applied Physics, 47(1), 242â247.

Authors 1

Peter L. Young (first)

References 17 Referenced 29

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{'key': '2024020418563156000_r2'}
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10.1149/1.2404041 / J. Electrochem. Soc. (1972)
{'key': '2024020418563156000_r5'}
10.1103/PhysRev.166.912 / Phys. Rev. (1968)
10.1063/1.1708222 / J. Appl. Phys. (1966)
10.1063/1.1663327 / J. Appl. Phys. (1974)
{'key': '2024020418563156000_r9'}
10.1063/1.1657112 / J. Appl. Phys. (1969)
{'key': '2024020418563156000_r11'}
10.1063/1.1657043 / J. Appl. Phys. (1969)
{'key': '2024020418563156000_r12'}
{'key': '2024020418563156000_r13'}
10.1103/PhysRevB.7.3719 / Phys. Rev. B (1973)
{'key': '2024020418563156000_r14a'}

Dates

Type	When
Created	22 years, 6 months ago (Feb. 14, 2003, 4:11 p.m.)
Deposited	1 year, 6 months ago (Feb. 4, 2024, 1:56 p.m.)
Indexed	2 months ago (June 24, 2025, 7:28 a.m.)
Issued	49 years, 7 months ago (Jan. 1, 1976)
Published	49 years, 7 months ago (Jan. 1, 1976)
Published Print	49 years, 7 months ago (Jan. 1, 1976)

Funders 0

None

BibTeX

@article{Young_1976, title={dc electrical conduction in thin Ta2O5 films. II. Highly imperfect films}, volume={47}, ISSN={1089-7550}, url={http://dx.doi.org/10.1063/1.322355}, DOI={10.1063/1.322355}, number={1}, journal={Journal of Applied Physics}, publisher={AIP Publishing}, author={Young, Peter L.}, year={1976}, month=jan, pages={242–247} }

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