DOI: 10.1063/1.3133862. Polarization sensitive silicon photodiodes using nanostructured metallic grids

Polarization sensitive silicon photodiodes using nanostructured metallic grids

10.1063/1.3133862

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

In this paper, we present the design, fabrication, and characterization of wire grid polarizers. These polarizers show high extinction ratios and high transmission with structure dimensions that are compatible with current complementary metal-oxide-semiconductor (CMOS) technology. To design these wire grids, we first analyze the transmission properties of single apertures. From the understanding of a single aperture, we apply a modal expansion method to model wire grids. The most promising grids are fabricated on both a glass substrate and CMOS photodiode. An extinction ratio higher than 200 is measured.

Bibliography

GuillaumÃ©e, M., Dunbar, L. A., Santschi, Ch., Grenet, E., Eckert, R., Martin, O. J. F., & Stanley, R. P. (2009). Polarization sensitive silicon photodiodes using nanostructured metallic grids. Applied Physics Letters, 94(19).

Authors 7

M. Guillaumée (first)
L. A. Dunbar (additional)
Ch. Santschi (additional)
E. Grenet (additional)
R. Eckert (additional)
O. J. F. Martin (additional)
R. P. Stanley (additional)

References 22 Referenced 54

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10.1117/1.601452 / Opt. Eng. (Bellingham) (1997)
10.1364/JOSAA.16.001168 / J. Opt. Soc. Am. A Opt. Image Sci. Vis (1999)
10.1093/ietele/e90-c.5.1046 / IEICE Trans. Electron. (2007)
{'volume-title': 'Optics', 'year': '1998', 'first-page': '319', 'key': '2023070222063940900_c6'} / Optics (1998)
{'key': '2023070222063940900_c7', 'first-page': '769', 'volume': '36', 'year': '1889', 'journal-title': 'Ann. Phys. Chem.'} / Ann. Phys. Chem. (1889)
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{'key': '2023070222063940900_c17'}
10.1103/PhysRevLett.88.057403 / Phys. Rev. Lett. (2002)
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Dates

Type	When
Created	16 years, 3 months ago (May 12, 2009, 6:23 p.m.)
Deposited	2 years, 2 months ago (July 2, 2023, 6:06 p.m.)
Indexed	1 month ago (July 30, 2025, 6:53 a.m.)
Issued	16 years, 3 months ago (May 11, 2009)
Published	16 years, 3 months ago (May 11, 2009)
Published Online	16 years, 3 months ago (May 12, 2009)
Published Print	16 years, 3 months ago (May 11, 2009)

Funders 0

None

BibTeX

@article{Guillaum_e_2009, title={Polarization sensitive silicon photodiodes using nanostructured metallic grids}, volume={94}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.3133862}, DOI={10.1063/1.3133862}, number={19}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Guillaumée, M. and Dunbar, L. A. and Santschi, Ch. and Grenet, E. and Eckert, R. and Martin, O. J. F. and Stanley, R. P.}, year={2009}, month=may }

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