DOI: 10.1063/1.3033545. Quantitative scanning thermal microscopy using double scan technique

Quantitative scanning thermal microscopy using double scan technique

10.1063/1.3033545

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

Although scanning thermal microscope has shown the highest spatial resolution in local temperature and thermophysical property measurement, its usefulness has been severely limited due to difficulties in quantitative measurement. We propose a double scan technique that measures temperature only from the heat transfer through the tip-sample contact by the subtraction of the signal due to the heat transfer through the air. A rigorous theoretical model for this technique is derived. The effectiveness of the double scan technique in quantitative temperature measurement is demonstrated experimentally.

Bibliography

Kim, K., Chung, J., Won, J., Kwon, O., Lee, J. S., Park, S. H., & Choi, Y. K. (2008). Quantitative scanning thermal microscopy using double scan technique. Applied Physics Letters, 93(20).

Authors 7

Kyeongtae Kim (first)
Jaehoon Chung (additional)
Jongbo Won (additional)
Ohmyoung Kwon (additional)
Joon Sik Lee (additional)
Seung Ho Park (additional)
Young Ki Choi (additional)

References 11 Referenced 56

10.1115/1.1454111 / ASME J. Heat Transfer (2002)
10.1063/1.1524305 / J. Appl. Phys. (2003)
10.1146/annurev.matsci.29.1.505 / Annu. Rev. Mater. Sci. (1999)
10.1088/0022-3727/34/9/201 / J. Phys. D (2001)
10.1109/84.946785 / J. Microelectromech. Syst. (2001)
10.1115/1.1447939 / ASME J. Heat Transfer (2002)
10.1116/1.2353842 / J. Vac. Sci. Technol. B (2006)
10.1116/1.2353843 / J. Vac. Sci. Technol. B (2006)
10.1116/1.589319 / J. Vac. Sci. Technol. B (1997)
10.1016/j.ijheatmasstransfer.2005.07.010 / Int. J. Heat Mass Transfer (2006)
10.1063/1.1932313 / Phys. Fluids (2005)

Dates

Type	When
Created	16 years, 9 months ago (Nov. 20, 2008, 6:18 p.m.)
Deposited	2 years, 1 month ago (July 2, 2023, 4:31 p.m.)
Indexed	3 weeks, 3 days ago (Aug. 2, 2025, 12:46 a.m.)
Issued	16 years, 9 months ago (Nov. 17, 2008)
Published	16 years, 9 months ago (Nov. 17, 2008)
Published Online	16 years, 9 months ago (Nov. 20, 2008)
Published Print	16 years, 9 months ago (Nov. 17, 2008)

Funders 0

None

BibTeX

@article{Kim_2008, title={Quantitative scanning thermal microscopy using double scan technique}, volume={93}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.3033545}, DOI={10.1063/1.3033545}, number={20}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Kim, Kyeongtae and Chung, Jaehoon and Won, Jongbo and Kwon, Ohmyoung and Lee, Joon Sik and Park, Seung Ho and Choi, Young Ki}, year={2008}, month=nov }

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