DOI: 10.1063/1.2901147. Hydrocarbon lithography on graphene membranes

Hydrocarbon lithography on graphene membranes

10.1063/1.2901147

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

We present a simple and efficient way to obtain freestanding graphene membranes. On these membranes, we demonstrate that electron-beam induced deposition of carbon can be used to obtain arbitrary patterns with a nanometer-scale resolution. In the case of a periodic grating, we obtain a half-pitch of 2.5nm. Electron-beam induced deposition on graphene might be used to create nanometer-scale doping patterns, diffraction gratings, or etch masks in this novel electronic material.

Bibliography

Meyer, J. C., Girit, C. O., Crommie, M. F., & Zettl, A. (2008). Hydrocarbon lithography on graphene membranes. Applied Physics Letters, 92(12).

Authors 4

Jannik C. Meyer (first)
C. O. Girit (additional)
M. F. Crommie (additional)
A. Zettl (additional)

References 33 Referenced 253

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Dates

Type	When
Created	17 years, 4 months ago (March 29, 2008, 4:02 a.m.)
Deposited	2 years, 1 month ago (July 2, 2023, 11:19 a.m.)
Indexed	3 days, 4 hours ago (Aug. 19, 2025, 6:27 a.m.)
Issued	17 years, 4 months ago (March 24, 2008)
Published	17 years, 4 months ago (March 24, 2008)
Published Online	17 years, 4 months ago (March 28, 2008)
Published Print	17 years, 4 months ago (March 24, 2008)

Funders 0

None

BibTeX

@article{Meyer_2008, title={Hydrocarbon lithography on graphene membranes}, volume={92}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.2901147}, DOI={10.1063/1.2901147}, number={12}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Meyer, Jannik C. and Girit, C. O. and Crommie, M. F. and Zettl, A.}, year={2008}, month=mar }

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