DOI: 10.1063/1.2721422. Topography imaging with a heated atomic force microscope cantilever in tapping mode

Topography imaging with a heated atomic force microscope cantilever in tapping mode

10.1063/1.2721422

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

This article describes tapping mode atomic force microscopy (AFM) using a heated AFM cantilever. The electrical and thermal responses of the cantilever were investigated while the cantilever oscillated in free space or was in intermittent contact with a surface. The cantilever oscillates at its mechanical resonant frequency, 70.36 kHz, which is much faster than its thermal time constant of 300 μs, and so the cantilever operates in thermal steady state. The thermal impedance between the cantilever heater and the sample was measured through the cantilever temperature signal. Topographical imaging was performed on silicon calibration gratings of height 20 and 100 nm. The obtained topography sensitivity is as high as 200 μV∕nm and the resolution is as good as 0.5 nm∕Hz1∕2, depending on the cantilever power. The cantilever heating power ranges 0–7 mW, which corresponds to a temperature range of 25–700 °C. The imaging was performed entirely using the cantilever thermal signal and no laser or other optics was required. As in conventional AFM, the tapping mode operation demonstrated here can suppress imaging artifacts and enable imaging of soft samples.

Bibliography

Park, K., Lee, J., Zhang, Z. M., & King, W. P. (2007). Topography imaging with a heated atomic force microscope cantilever in tapping mode. Review of Scientific Instruments, 78(4).

Authors 4

Keunhan Park (first)
Jungchul Lee (additional)
Zhuomin M. Zhang (additional)
William P. King (additional)

References 27 Referenced 40

10.1103/PhysRevLett.56.930 / Phys. Rev. Lett. (1986)
10.1063/1.97288 / Appl. Phys. Lett. (1986)
10.1063/1.123540 / Appl. Phys. Lett. (1999)
10.1109/84.661386 / J. Microelectromech. Syst. (1998)
10.1063/1.1351846 / Appl. Phys. Lett. (2001)
10.1109/TNANO.2002.1005425 / IEEE Trans. NanoTechnol. (2002)
10.1021/la036112w / Langmuir (2004)
10.1063/1.2128040 / Appl. Phys. Lett. (2005)
10.1021/nl061196p / Nano Lett. (2006)
10.1063/1.1785860 / Appl. Phys. Lett. (2004)
10.1063/1.2164394 / Appl. Phys. Lett. (2006)
10.1021/ja0612807 / J. Am. Chem. Soc. (2006)
10.1002/adfm.200500724 / Adv. Funct. Mater. (2006)
10.1021/ma0615912 / Macromolecules (2006)
10.1063/1.1787160 / Appl. Phys. Lett. (2004)
10.1088/0960-1317/15/12/028 / J. Micromech. Microeng. (2005)
{'year': '2007', 'key': '2023070317363134000_c17', 'article-title': 'Sens. Actuators A'} / Sens. Actuators A (2007)
10.1063/1.1711153 / Rev. Sci. Instrum. (2004)
10.1063/1.338807 / J. Appl. Phys. (1987)
10.1016/0039-6028(93)90582-5 / Surf. Sci. (1993)
10.1016/S0167-5729(02)00077-8 / Surf. Sci. Rep. (2002)
10.1109/JMEMS.2006.886020 / J. Microelectromech. Syst. (2006)
10.1080/108939599199765 / Microscale Thermophys. Eng. (1999)
{'key': '2023070317363134000_c24', 'article-title': 'J. Microelectromech. Syst.'} / J. Microelectromech. Syst.
{'key': '2023070317363134000_c25', 'first-page': '370', 'volume': '123–124', 'year': '2005', 'journal-title': 'Sens. Actuators, A'} / Sens. Actuators, A (2005)
10.1063/1.2169469 / Rev. Sci. Instrum. (2006)
10.1063/1.358001 / J. Appl. Phys. (1994)

Dates

Type	When
Created	18 years, 4 months ago (May 1, 2007, 10:47 a.m.)
Deposited	2 years, 2 months ago (July 3, 2023, 4:44 p.m.)
Indexed	1 month ago (July 30, 2025, 6:48 a.m.)
Issued	18 years, 5 months ago (April 1, 2007)
Published	18 years, 5 months ago (April 1, 2007)
Published Online	18 years, 4 months ago (April 30, 2007)
Published Print	18 years, 5 months ago (April 1, 2007)

Funders 0

None

BibTeX

@article{Park_2007, title={Topography imaging with a heated atomic force microscope cantilever in tapping mode}, volume={78}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.2721422}, DOI={10.1063/1.2721422}, number={4}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Park, Keunhan and Lee, Jungchul and Zhang, Zhuomin M. and King, William P.}, year={2007}, month=apr }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        30
      ]
    ],
    "date-time": "2025-07-30T10:48:53Z",
    "timestamp": 1753872533199,
    "version": "3.41.2"
  },
  "reference-count": 27,
  "publisher": "AIP Publishing",
  "issue": "4",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2007,
        4,
        1
      ]
    ]
  },
  "abstract": "<jats:p>This article describes tapping mode atomic force microscopy (AFM) using a heated AFM cantilever. The electrical and thermal responses of the cantilever were investigated while the cantilever oscillated in free space or was in intermittent contact with a surface. The cantilever oscillates at its mechanical resonant frequency, 70.36 kHz, which is much faster than its thermal time constant of 300\u2009\u03bcs, and so the cantilever operates in thermal steady state. The thermal impedance between the cantilever heater and the sample was measured through the cantilever temperature signal. Topographical imaging was performed on silicon calibration gratings of height 20 and 100 nm. The obtained topography sensitivity is as high as 200\u2009\u03bcV\u2215nm and the resolution is as good as 0.5\u2009nm\u2215Hz1\u22152, depending on the cantilever power. The cantilever heating power ranges 0\u20137 mW, which corresponds to a temperature range of 25\u2013700\u2009\u00b0C. The imaging was performed entirely using the cantilever thermal signal and no laser or other optics was required. As in conventional AFM, the tapping mode operation demonstrated here can suppress imaging artifacts and enable imaging of soft samples.</jats:p>",
  "DOI": "10.1063/1.2721422",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        5,
        1
      ]
    ],
    "date-time": "2007-05-01T14:47:25Z",
    "timestamp": 1178030845000
  },
  "update-policy": "https://doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 40,
  "title": "Topography imaging with a heated atomic force microscope cantilever in tapping mode",
  "prefix": "10.1063",
  "volume": "78",
  "author": [
    {
      "given": "Keunhan",
      "family": "Park",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Georgia Institute of Technology Woodruff School of Mechanical Engineering, , Atlanta, Georgia 30332"
        }
      ]
    },
    {
      "given": "Jungchul",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Georgia Institute of Technology Woodruff School of Mechanical Engineering, , Atlanta, Georgia 30332"
        }
      ]
    },
    {
      "given": "Zhuomin M.",
      "family": "Zhang",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Georgia Institute of Technology Woodruff School of Mechanical Engineering, , Atlanta, Georgia 30332"
        }
      ]
    },
    {
      "given": "William P.",
      "family": "King",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "University of Illinois Urbana-Champaign Department of Mechanical Science and Engineering, , Urbana, Illinois 61801"
        }
      ]
    }
  ],
  "member": "317",
  "published-online": {
    "date-parts": [
      [
        2007,
        4,
        30
      ]
    ]
  },
  "reference": [
    {
      "key": "2023070317363134000_c1",
      "doi-asserted-by": "publisher",
      "first-page": "930",
      "DOI": "10.1103/PhysRevLett.56.930",
      "volume": "56",
      "year": "1986",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2023070317363134000_c2",
      "doi-asserted-by": "publisher",
      "first-page": "1587",
      "DOI": "10.1063/1.97288",
      "volume": "49",
      "year": "1986",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070317363134000_c3",
      "doi-asserted-by": "publisher",
      "first-page": "1329",
      "DOI": "10.1063/1.123540",
      "volume": "74",
      "year": "1999",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070317363134000_c4",
      "doi-asserted-by": "publisher",
      "first-page": "69",
      "DOI": "10.1109/84.661386",
      "volume": "7",
      "year": "1998",
      "journal-title": "J. Microelectromech. Syst."
    },
    {
      "key": "2023070317363134000_c5",
      "doi-asserted-by": "publisher",
      "first-page": "1300",
      "DOI": "10.1063/1.1351846",
      "volume": "78",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070317363134000_c6",
      "doi-asserted-by": "crossref",
      "first-page": "39",
      "DOI": "10.1109/TNANO.2002.1005425",
      "volume": "1",
      "year": "2002",
      "journal-title": "IEEE Trans. NanoTechnol."
    },
    {
      "key": "2023070317363134000_c7",
      "doi-asserted-by": "publisher",
      "first-page": "1495",
      "DOI": "10.1021/la036112w",
      "volume": "20",
      "year": "2004",
      "journal-title": "Langmuir"
    },
    {
      "key": "2023070317363134000_c8",
      "doi-asserted-by": "publisher",
      "first-page": "194102",
      "DOI": "10.1063/1.2128040",
      "volume": "87",
      "year": "2005",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070317363134000_c9",
      "doi-asserted-by": "publisher",
      "first-page": "2145",
      "DOI": "10.1021/nl061196p",
      "volume": "6",
      "year": "2006",
      "journal-title": "Nano Lett."
    },
    {
      "key": "2023070317363134000_c10",
      "doi-asserted-by": "publisher",
      "first-page": "1589",
      "DOI": "10.1063/1.1785860",
      "volume": "85",
      "year": "2004",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070317363134000_c11",
      "doi-asserted-by": "publisher",
      "first-page": "033104",
      "DOI": "10.1063/1.2164394",
      "volume": "88",
      "year": "2006",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070317363134000_c12",
      "doi-asserted-by": "crossref",
      "first-page": "6774",
      "DOI": "10.1021/ja0612807",
      "volume": "128",
      "year": "2006",
      "journal-title": "J. Am. Chem. Soc."
    },
    {
      "key": "2023070317363134000_c13",
      "doi-asserted-by": "publisher",
      "first-page": "1499",
      "DOI": "10.1002/adfm.200500724",
      "volume": "16",
      "year": "2006",
      "journal-title": "Adv. Funct. Mater."
    },
    {
      "key": "2023070317363134000_c14",
      "doi-asserted-by": "crossref",
      "first-page": "6793",
      "DOI": "10.1021/ma0615912",
      "volume": "39",
      "year": "2006",
      "journal-title": "Macromolecules"
    },
    {
      "key": "2023070317363134000_c15",
      "doi-asserted-by": "publisher",
      "first-page": "2086",
      "DOI": "10.1063/1.1787160",
      "volume": "85",
      "year": "2004",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2023070317363134000_c16",
      "doi-asserted-by": "publisher",
      "first-page": "2441",
      "DOI": "10.1088/0960-1317/15/12/028",
      "volume": "15",
      "year": "2005",
      "journal-title": "J. Micromech. Microeng."
    },
    {
      "year": "2007",
      "key": "2023070317363134000_c17",
      "article-title": "Sens. Actuators A"
    },
    {
      "key": "2023070317363134000_c18",
      "doi-asserted-by": "publisher",
      "first-page": "1222",
      "DOI": "10.1063/1.1711153",
      "volume": "75",
      "year": "2004",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2023070317363134000_c19",
      "doi-asserted-by": "publisher",
      "first-page": "4723",
      "DOI": "10.1063/1.338807",
      "volume": "61",
      "year": "1987",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2023070317363134000_c20",
      "doi-asserted-by": "publisher",
      "first-page": "L688",
      "DOI": "10.1016/0039-6028(93)90582-5",
      "volume": "290",
      "year": "1993",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "2023070317363134000_c21",
      "doi-asserted-by": "publisher",
      "first-page": "197",
      "DOI": "10.1016/S0167-5729(02)00077-8",
      "volume": "47",
      "year": "2002",
      "journal-title": "Surf. Sci. Rep."
    },
    {
      "key": "2023070317363134000_c22",
      "doi-asserted-by": "publisher",
      "first-page": "1644",
      "DOI": "10.1109/JMEMS.2006.886020",
      "volume": "15",
      "year": "2006",
      "journal-title": "J. Microelectromech. Syst."
    },
    {
      "key": "2023070317363134000_c23",
      "doi-asserted-by": "publisher",
      "first-page": "217",
      "DOI": "10.1080/108939599199765",
      "volume": "3",
      "year": "1999",
      "journal-title": "Microscale Thermophys. Eng."
    },
    {
      "key": "2023070317363134000_c24",
      "article-title": "J. Microelectromech. Syst."
    },
    {
      "key": "2023070317363134000_c25",
      "first-page": "370",
      "volume": "123\u2013124",
      "year": "2005",
      "journal-title": "Sens. Actuators, A"
    },
    {
      "key": "2023070317363134000_c26",
      "doi-asserted-by": "publisher",
      "first-page": "023705",
      "DOI": "10.1063/1.2169469",
      "volume": "77",
      "year": "2006",
      "journal-title": "Rev. Sci. Instrum."
    },
    {
      "key": "2023070317363134000_c27",
      "doi-asserted-by": "publisher",
      "first-page": "7209",
      "DOI": "10.1063/1.358001",
      "volume": "76",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    }
  ],
  "container-title": "Review of Scientific Instruments",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/doi/10.1063/1.2721422/14873649/043709_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/aip/rsi/article-pdf/doi/10.1063/1.2721422/14873649/043709_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        7,
        3
      ]
    ],
    "date-time": "2023-07-03T20:44:04Z",
    "timestamp": 1688417044000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/rsi/article/78/4/043709/349846/Topography-imaging-with-a-heated-atomic-force"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2007,
        4,
        1
      ]
    ]
  },
  "references-count": 27,
  "journal-issue": {
    "issue": "4",
    "published-print": {
      "date-parts": [
        [
          2007,
          4,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1063/1.2721422",
  "relation": {},
  "ISSN": [
    "0034-6748",
    "1089-7623"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2007,
        4
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2007,
        4,
        1
      ]
    ]
  },
  "article-number": "043709"
}