DOI: 10.1063/1.2709758. Atom probe tomography

10.1063/1.2709758

Crossref journal-article

AIP Publishing

Review of Scientific Instruments (317)

Abstract

The technique of atom probe tomography (APT) is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution (sub-0.3-nm) three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and ceramic materials. This trend toward a broader range of materials and applications is likely to continue.

Bibliography

Kelly, T. F., & Miller, M. K. (2007). Atom probe tomography. Review of Scientific Instruments, 78(3).

Authors 2

Thomas F. Kelly (first)
Michael K. Miller (additional)

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Dates

Type	When
Created	18 years, 4 months ago (March 30, 2007, 6:28 p.m.)
Deposited	2 months, 4 weeks ago (May 23, 2025, 9:09 a.m.)
Indexed	1 day, 13 hours ago (Aug. 21, 2025, 1:37 p.m.)
Issued	18 years, 5 months ago (March 1, 2007)
Published	18 years, 5 months ago (March 1, 2007)
Published Online	18 years, 4 months ago (March 30, 2007)
Published Print	18 years, 5 months ago (March 1, 2007)

Funders 0

None

BibTeX

@article{Kelly_2007, title={Atom probe tomography}, volume={78}, ISSN={1089-7623}, url={http://dx.doi.org/10.1063/1.2709758}, DOI={10.1063/1.2709758}, number={3}, journal={Review of Scientific Instruments}, publisher={AIP Publishing}, author={Kelly, Thomas F. and Miller, Michael K.}, year={2007}, month=mar }

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