DOI: 10.1063/1.2420794. Higher-k LaYOx films with strong moisture resistance

Higher-k LaYOx films with strong moisture resistance

10.1063/1.2420794

Crossref journal-article

AIP Publishing

Applied Physics Letters (317)

Abstract

The permittivities and the moisture resistance of LaYOx films annealed at 600°C with different Y concentrations are investigated. The permittivities of 40%Y–LaYOx and 70%Y–LaYOx films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaYOx films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaYOx films (40%Y–LaYOx and 70%Y–LaYOx) show a strong resistance to the moisture due to the introduction of Y2O3.

Bibliography

Zhao, Y., Kita, K., Kyuno, K., & Toriumi, A. (2006). Higher-kâLaYOx films with strong moisture resistance. Applied Physics Letters, 89(25).

Authors 4

Yi Zhao (first)
Koji Kita (additional)
Kentaro Kyuno (additional)
Akira Toriumi (additional)

References 13 Referenced 65

10.1063/1.1355002 / Appl. Phys. Lett. (2001)
10.1063/1.1576299 / J. Appl. Phys. (2003)
10.1149/1.1585055 / J. Electrochem. Soc. (2003)
10.1143/JJAP.42.3519 / Jpn. J. Appl. Phys., Part 1 (2003)
10.1063/1.2174840 / Appl. Phys. Lett. (2006)
{'year': '2006', 'key': '2023080105244087600_c6', 'first-page': '402'} (2006)
10.1021/ic50039a013 / Inorg. Chem. (1966)
10.1063/1.353856 / J. Appl. Phys. (1993)
{'key': '2023080105244087600_c9', 'first-page': '342', 'volume': '84', 'year': '1976', 'journal-title': 'J. Ceram. Soc. Jpn.'} / J. Ceram. Soc. Jpn. (1976)
10.1143/JJAP.44.6131 / Jpn. J. Appl. Phys., Part 1 (2005)
{'first-page': '16', 'article-title': 'Digest of Technical Papers', 'volume-title': 'VLSI Technology', 'key': '2023080105244087600_c11'} / VLSI Technology / Digest of Technical Papers
10.1016/S0925-8388(02)01043-5 / J. Alloys Compd. (2003)
{'key': '2023080105244087600_c13', 'first-page': '267', 'volume': '85', 'year': '1962', 'journal-title': 'Bull. Soc. Fr. Mineral. Cristallogr.'} / Bull. Soc. Fr. Mineral. Cristallogr. (1962)

Dates

Type	When
Created	18 years, 8 months ago (Dec. 21, 2006, 10:37 a.m.)
Deposited	2 years ago (Aug. 1, 2023, 1:34 a.m.)
Indexed	3 weeks, 1 day ago (July 30, 2025, 6:48 a.m.)
Issued	18 years, 8 months ago (Dec. 18, 2006)
Published	18 years, 8 months ago (Dec. 18, 2006)
Published Online	18 years, 8 months ago (Dec. 20, 2006)
Published Print	18 years, 8 months ago (Dec. 18, 2006)

Funders 0

None

BibTeX

@article{Zhao_2006, title={Higher-k LaYOx films with strong moisture resistance}, volume={89}, ISSN={1077-3118}, url={http://dx.doi.org/10.1063/1.2420794}, DOI={10.1063/1.2420794}, number={25}, journal={Applied Physics Letters}, publisher={AIP Publishing}, author={Zhao, Yi and Kita, Koji and Kyuno, Kentaro and Toriumi, Akira}, year={2006}, month=dec }

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